Abstract: A method for determining relevant deposition parameters in i-PVD processes, includes, first calculating the reaction rates for desired reagents of the gas plasma and of a metal and/or metal compound to be deposited, then simulating the edge coverage of a predetermined structure with the deposited metal based upon the calculated reaction rates with systematic variation of the relevant deposition parameters, and compiling variant tables therefrom. By comparing an experimental verification of the simulated edge coverage by imaging the edge coverage of the metal layer deposited over the determined structure, e.g., using a TEM cross-section, with the simulated deposition parameters for the edge coverages that have been recorded in the variant table, it is possible to read the deposition parameters that are of relevance to the process from the variant table.

Abstract: A method and an apparatus for implementing the method produces at least one depression as a microstructure, in particular, a deep trench, in a semiconductor material, in particular, during the production of DRAMs and heats an area of at least one depression in the semiconductor material during an etching step, at least from time to time and/or locally. Such a configuration makes it possible to produce depressions in semiconductor materials efficiently, in particular, those with a high aspect ratio.

Abstract: Buried straps are produced on one side in deep trench structures. A PVD process is used to deposit masking material in the recess inclined at an angle. As a result, a masking wedge is produced on the buried strap, on one side in the base region of the recess. The masking wedge serves as a mask during a subsequent anisotropic etching step, which is carried out selectively with respect to the masking wedge, for removing the buried strap on one side.

Abstract: The invention relates to a method for fabricating in particular a TMR element for use in a MRAM, wherein a mask is arranged on a substrate and structured in such a manner that it shadows but does not cover a surface region of the substrate, and wherein material of the structure which is to be fabricated is then deposited on the substrate in a directed deposition process. The invention also relates to a component with a micro-technical structure which has been fabricated in this manner.

Abstract: A reaction chamber for processing a substrate wafer is described. The reaction chamber has a wafer holder for receiving the substrate wafer, a convection plate, which is disposed above the wafer holder, for suppressing convective movements over the substrate wafer, and a gas distributor plate which is disposed on a side face of the reaction chamber, for distributing process or purge gases that flow in. A flow plate is disposed on the gas distributor plate and extends substantially in a plane that is perpendicular to the gas distributor plate. This allows rapid and efficient purging of the reaction chamber.

Abstract: The invention relates to a method for fabricating a microtechnical structure (28) having a depression (25), which has a high aspect ratio. In order to achieve a good filling behavior, it is proposed to increase the quantity of the passivating particles which are present in the reactor and passivate the surface of the structure (28) against further addition of the filling material (30). With suitable process control, the additional passivation has an effect essentially only on the side walls (27) of the depression (25).

Abstract: The invention relates to a method for fabricating in particular a TMR element for use in a MRAM, wherein a mask is arranged on a substrate and structured in such a manner that it shadows but does not cover a surface region of the substrate, and wherein material of the structure which is to be fabricated is then deposited on the substrate in a directed deposition process. The invention also relates to a component with a micro-technical structure which has been fabricated in this manner.

Abstract: The present invention relates to a system for executing a plasma-based sputtering method, such as for example a PVD (Physical Vapor Deposition) method. In a process chamber (1), a plasma (2) is produced in order to accelerate ionized particles, carried away from a sputter target (21), through the plasma (2) towards a substrate (3), using an electrical field. In the process chamber (1), between the plasma (2) and the substrate (3) a magnetic field component (6) is produced that is situated parallel to a substrate surface (5). Through the magnetic field component (6), the angular distribution of the ionized particles is deflected from its flight path perpendicular to the substrate surface, so that impact angles are produced that have a greater angular scattering.

Abstract: In addition to the starting gases containing the elements of the solid-state layer to be deposited, at least one auxiliary substance is introduced into the reaction space of a reactor chamber. This auxiliary substance contains molecules which have a dipole moment and which have the property of briefly attaching themselves during the deposition process to the substrate surface with a dipole moment perpendicular to the substrate surface. In this way, the crystal structure of the solid-state layer to be grown on is dictated.

Abstract: An apparatus for processing a substrate wafer wherein the apparatus includes a reaction chamber, a wafer holder intended to hold the substrate wafer, and a susceptor. A temperature sensor, preferably a thermocouple with two junctions, is provided for measuring the difference between the temperatures at the site of the susceptor and at a site between the susceptor and the substrate wafer.

Abstract: A method for depositing a layer on a substrate is disclosed wherein a collimator having cylindrical holes is employed to reduce the lateral component of a particle flux. The cylindrical holes are aligned to be perpendicular to a substrate wafer and have a variety of radii such that the hole radii are smaller in regions having a higher vertical component of particle flux than in regions which have a lower vertical component of the particle flux.