Abstract: A method of processing a substrate is provided. The method includes forming a first oxide layer on the substrate and patterning the first oxide layer utilizing a lithography process, the patterning defining a plurality of active areas on the substrate. The method includes forming a second oxide layer in each active area and forming a plurality of metal electrodes over the second oxide layer through a shadow mask technique, wherein the shadow mask technique is performed without alignment to an active area.

Abstract: Methods and structures are described for determining contact resistivities and Schottky barrier heights for conductors deposited on semiconductor wafers that can be combined with combinatorial processing, allowing thereby numerous processing conditions and materials to be tested concurrently. Methods for using multi-ring as well as single-ring CTLM structures to cancel parasitic resistance are also described, as well as structures and processes for inline monitoring of properties.

Abstract: Disclosed is an integrated circuit design method that determines maximum direct currents for metal components and uses them as design constraints in the design flow in order to avoid/minimize electromigration failures. Short and long metal components are treated differently for purposes of establishing the design constraints. For a short metal component, the maximum direct current as a function of a given temperature for a given expected lifetime of the integrated circuit is determined, another maximum direct current is determined based on the Blech length, and the higher of these two is selected and used as the design constraint for that short metal component. For a long metal component, only the maximum direct current as a function of the given temperature for the given expected lifetime is determined and used as the design constraint. Also disclosed herein are associated system and program storage device embodiments for designing an integrated circuit.

Abstract: A method for fabricating a memory device with a self-aligned trap layer and rounded active region corners is disclosed. In the present invention, an STI process is performed before any of the charge-trapping and top-level layers are formed. Immediately after the STI process, the sharp corners of the active regions are exposed. Because these sharp corners are exposed at this time, they are available to be rounded through any number of known rounding techniques. Rounding the corners improves the performance characteristics of the memory device. Subsequent to the rounding process, the charge-trapping structure and other layers can be formed by a self-aligned process.

Abstract: Capacitor device structures can be fabricated on a substrate including multiple separate first electrodes and a common distributed second electrode. The second electrode can be common to the multiple first electrodes and can be distributed in a shape of a grid interdigitating the multiple first electrodes. The distributed nature of the second electrode can replace the substrate backside as the bottom electrode and can reduce the device parasitic characteristics. In some embodiments, the capacitor device structures can be used in a high productivity combinatorial process, wherein the distributed nature of the second electrode can make the test structures more tolerant to misalignment.

Abstract: Metal gate high-k capacitor structures with lithography patterning are used to extract gate work function using a combinatorial workflow. Oxide terracing, together with high productivity combinatorial process flow for metal deposition can provide optimum high-k gate dielectric and metal gate solutions for high performance logic transistors. The high productivity combinatorial technique can provide an evaluation of effective work function for given high-k dielectric metal gate stacks for PMOS and NMOS transistors, which is critical in identifying and selecting the right materials.

Abstract: A method is disclosed comprising using a circuit recognition engine running on a computerized device to detect a number and type devices in an integrated circuit. The method characterizes device variation by selecting a set of dominant active devices and performing simulation using the set of dominant active devices. Three different options may be used to optimize the number of simulations for any arc/slew/load combination. Aggressive reduction uses a minimal number of simulations at the cost of some accuracy loss, conservative reduction reduces the number of simulations with negligible accuracy loss, and dynamic reduction dynamically determines the minimum number of simulations needed for a given accuracy requirement.

Abstract: Disclosed is an integrated circuit design method that determines maximum direct currents for metal components and uses them as design constraints in the design flow in order to avoid/minimize electromigration failures. Short and long metal components are treated differently for purposes of establishing the design constraints. For a short metal component, the maximum direct current as a function of a given temperature for a given expected lifetime of the integrated circuit is determined, another maximum direct current is determined based on the Blech length, and the higher of these two is selected and used as the design constraint for that short metal component. For a long metal component, only the maximum direct current as a function of the given temperature for the given expected lifetime is determined and used as the design constraint. Also disclosed herein are associated system and program storage device embodiments for designing an integrated circuit.

Abstract: Methods and systems perform a simulation on an integrated circuit design by applying a first value to a first variable and a second value to a second variable of the simulation to produce a first matrix corner simulation value. The methods and systems repeat the simulation using different values for the first and said second variables to produce a second matrix corner simulation value, a third matrix corner simulation value, and a fourth matrix corner simulation value. The methods and systems create a matrix, and the matrix has the first matrix corner simulation value, the second matrix corner simulation value, the third matrix corner simulation value, and the fourth matrix corner simulation value. The methods and systems interpolate all remaining values within the matrix based upon existing simulation values within the matrix.

Abstract: A statistical single library that includes on-chip variation (OCV) is created for timing and power analysis of a digital chip design. Initially, library values for all cells of a digital chip design, including ranges for environmental and process parameters, are subject to a statistical model to create statistical timing for the ranges of the parameters. A statistical timing tool is applied across the ranges of the parameters to determine statistical corners for delay and input power to a subset of cells. The statistically determined delay and input power to the subset of cells is entered into the statistical single library. Each delay of each statistical corner for the subset of cells is compared with a chip sign-off statistical delay requirement of a test macro.

Abstract: A method, apparatus and program product are provided for simulating a circuit. A plurality of elements of the circuit is represented by device models including pass/fail criteria. A circuit simulation program is executed on a hardware implemented processor where the circuit simulation program is configured to obtain simulation results from the device models in response to applied parameters. The circuit simulation program identifies a failure of one or more of the plurality of elements of the circuit based on the pass/fail criteria of the device models. The circuit simulation program is further configured to output the failures during simulation of the one or more of the plurality of elements that are identified in response to the applied parameters.

Abstract: A dual node memory device and methods for fabricating the device are provided. In one embodiment the method comprises forming a layered structure with an insulator layer, a charge storage layer, a buffer layer, and a sacrificial layer on a semiconductor substrate. The layers are patterned to form two spaced apart stacks and an exposed substrate portion between the stacks. A gate insulator and a gate electrode are formed on the exposed substrate, and the sacrificial layer and buffer layer are removed. An additional insulator layer is deposited overlying the charge storage layer to form insulator-storage layer-insulator memory storage areas on each side of the gate electrode. Sidewall spacers are formed at the sidewalls of the gate electrode overlying the storage areas. Bit lines are formed in the substrate spaced apart from the gate electrode, and a word line is formed that contacts the gate electrode and the sidewall spacers.

Abstract: A method, apparatus and program product are provided for simulating a circuit. A plurality of elements of the circuit is represented by device models including pass/fail criteria. A circuit simulation program is executed on a hardware implemented processor where the circuit simulation program is configured to obtain simulation results from the device models in response to applied parameters. The circuit simulation program identifies a failure of one or more of the plurality of elements of the circuit based on the pass/fail criteria of the device models. The circuit simulation program is further configured to output the failures during simulation of the one or more of the plurality of elements that are identified in response to the applied parameters.

Abstract: A dual node memory device and methods for fabricating the device are provided. In one embodiment the method comprises forming a layered structure with an insulator layer, a charge storage layer, a buffer layer, and a sacrificial layer on a semiconductor substrate. The layers are patterned to form two spaced apart stacks and an exposed substrate portion between the stacks. A gate insulator and a gate electrode are formed on the exposed substrate, and the sacrificial layer and buffer layer are removed. An additional insulator layer is deposited overlying the charge storage layer to form insulator-storage layer-insulator memory storage areas on each side of the gate electrode. Sidewall spacers are formed at the sidewalls of the gate electrode overlying the storage areas. Bit lines are formed in the substrate spaced apart from the gate electrode, and a word line is formed that contacts the gate electrode and the sidewall spacers.

Abstract: A dual node memory device and methods for fabricating the device are provided. In one embodiment the method comprises forming a layered structure with an insulator layer, a charge storage layer, a buffer layer, and a sacrificial layer on a semiconductor substrate. The layers are patterned to form two spaced apart stacks and an exposed substrate portion between the stacks. A gate insulator and a gate electrode are formed on the exposed substrate, and the sacrificial layer and buffer layer are removed. An additional insulator layer is deposited overlying the charge storage layer to form insulator-storage layer-insulator memory storage areas on each side of the gate electrode. Sidewall spacers are formed at the sidewalls of the gate electrode overlying the storage areas. Bit lines are formed in the substrate spaced apart from the gate electrode, and a word line is formed that contacts the gate electrode and the sidewall spacers.

Abstract: A semiconductor memory device and a method for its fabrication are provided. In accordance with one embodiment of the invention the method comprises the steps of forming a gate insulator and a gate electrode overlying a semiconductor substrate. The gate insulator is etched to form an undercut opening beneath an edge of the gate electrode and the undercut opening is filled with a layered structure comprising a charge trapping layer sandwiched between layers of oxide and nitride. A region of the semiconductor substrate is impurity doped to form a bit line aligned with the gate electrode, and a conductive layer is deposited and patterned to form a word line coupled to the gate electrode.

Abstract: A method of estimating decaps required for an IC during an initial floorplanning design phase begins by obtaining voltage variation waveforms for a plurality of nodes in a power distribution network of the IC. Next, the method computes a minimum value for each of the voltage variation waveforms and selects voltage variation waveforms below a minimum threshold value. Following this, an FDA is performed on the voltage variation waveforms below the minimum threshold value to create a set of frequency values. This involves performing an FFT on each of the voltage variation waveforms to obtain frequency domain data, wherein frequencies that cause a drop in voltage in the plurality of nodes are filtered. The method then sorts the frequency domain data, wherein the frequency domain data is arranged in order based on amplitude value, total power, frequency components, and/or amplitude of imaginary components.

Abstract: A semiconductor memory device and a method for its fabrication are provided. In accordance with one embodiment of the invention the method comprises the steps of forming a gate insulator and a gate electrode overlying a semiconductor substrate. The gate insulator is etched to form an undercut opening beneath an edge of the gate electrode and the undercut opening is filled with a layered structure comprising a charge trapping layer sandwiched between layers of oxide and nitride. A region of the semiconductor substrate is impurity doped to form a bit line aligned with the gate electrode, and a conductive layer is deposited and patterned to form a word line coupled to the gate electrode.

Abstract: A semiconductor memory device and a method for its fabrication are provided. In accordance with one embodiment of the invention the method comprises the steps of forming a gate insulator and a gate electrode overlying a semiconductor substrate. The gate insulator is etched to form an undercut opening beneath an edge of the gate electrode and the undercut opening is filled with a layered structure comprising a charge trapping layer sandwiched between layers of oxide and nitride. A region of the semiconductor substrate is impurity doped to form a bit line aligned with the gate electrode, and a conductive layer is deposited and patterned to form a word line coupled to the gate electrode.

Abstract: According to one exemplary embodiment, a structure, for example a flash memory cell, comprises a transistor gate dielectric stack situated on a semiconductor substrate. The transistor gate dielectric stack includes a bottom oxide layer, a silicon-rich nitride layer situated on the bottom oxide layer, a low silicon-rich nitride layer situated on the silicon-rich nitride layer, and a top oxide layer situated on the low silicon-rich nitride layer. This embodiment results in a nitride based flash memory cell having improved program speed and retention while maintaining a high erase speed. In another embodiment, a flash memory cell may further comprise a high-K dielectric layer situated on the transistor gate dielectric stack.