Patents by Inventor An-Chi Chang

An-Chi Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240113101
    Abstract: Techniques are provided herein to form a semiconductor device that has a capacitor structure integrated with the source or drain region of the semiconductor device. A given semiconductor device includes one or more semiconductor regions extending in a first direction between corresponding source or drain regions. A gate structure extends in a second direction over the one or more semiconductor regions. A capacitor structure is integrated with one of the source or drain regions of the integrated circuit such that a first electrode of the capacitor contacts the source or drain region and a second electrode of the capacitor contacts a conductive contact formed over the capacitor structure. The capacitor structure may include a ferroelectric capacitor having a ferroelectric layer between the electrodes.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Sourav Dutta, Nazila Haratipour, Vachan Kumar, Uygar E. Avci, Shriram Shivaraman, Sou-Chi Chang
  • Publication number: 20240113183
    Abstract: Methods for tuning effective work functions of gate electrodes in semiconductor devices and semiconductor devices formed by the same are disclosed. In an embodiment, a semiconductor device includes a channel region over a semiconductor substrate; a gate dielectric layer over the channel region; and a gate electrode over the gate dielectric layer, the gate electrode including a first work function metal layer over the gate dielectric layer, the first work function metal layer including aluminum (Al); a first work function tuning layer over the first work function metal layer, the first work function tuning layer including aluminum tungsten (AlW); and a fill material over the first work function tuning layer.
    Type: Application
    Filed: November 30, 2023
    Publication date: April 4, 2024
    Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Weng Chang, Chi On Chui
  • Publication number: 20240113187
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a substrate having one or more interior surfaces forming a recess within an upper surface of the substrate. Source/drain regions are disposed within the substrate on opposing sides of the recess. A first gate dielectric is arranged along the one or more interior surfaces forming the recess, and a second gate dielectric is arranged on the first gate dielectric and within the recess. A gate electrode is disposed on the second gate dielectric. The second gate dielectric includes one or more protrusions that extend outward from a recessed upper surface of the second gate dielectric and that are arranged along opposing sides of the second gate dielectric.
    Type: Application
    Filed: January 5, 2023
    Publication date: April 4, 2024
    Inventors: Jhu-Min Song, Ying-Chou Chen, Yi-Kai Ciou, Chien-Chih Chou, Fei-Yun Chen, Yu-Chang Jong, Chi-Te Lin
  • Publication number: 20240114696
    Abstract: Multiple-ferroelectric capacitor structures in memory devices, including in integrated circuit devices, and techniques for forming the structures. Insulators separating individual outer plates in a ferroelectric capacitor array are supported between wider portions of a shared, inner plate. Wider portions of an inner plate may be formed in lateral recesses between insulating layers. Ferroelectric material may be deposited over the inner plate between insulating layers after removing sacrificial layers. An etch-stop layer may protect the inner plate when sacrificial layers are removed. An etch-stop or interface layer may remain over the inner plate adjacent insulators.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Christopher Neumann, Cory Weinstein, Nazila Haratipour, Brian Doyle, Sou-Chi Chang, Tristan Tronic, Shriram Shivaraman, Uygar Avci
  • Publication number: 20240109739
    Abstract: This disclosure is directed to an automatic sheet feeding device having a flipping mechanism which is used for a sheet. The automatic sheet feeding device has a sheet outputting tray, a sheet outputting channel, the flipping mechanism and a switching guide mechanism. The sheet outputting channel is disposed corresponding to the sheet outputting tray. The flipping mechanism is arranged between the sheet outputting channel and the sheet outputting tray. The switching guide mechanism is arranged between the sheet outputting channel and the flipping mechanism, and the switching guide mechanism is used for guiding the sheet to be conveyed to the sheet outputting tray from the sheet outputting channel or conveyed to the sheet outputting tray from the flipping mechanism. Therefore, an efficiency of duplex scanning of the automatic sheet feeding device may be improved.
    Type: Application
    Filed: November 23, 2022
    Publication date: April 4, 2024
    Inventors: Pei-Chi HO, Po-Chih CHANG
  • Publication number: 20240112959
    Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.
    Type: Application
    Filed: December 1, 2023
    Publication date: April 4, 2024
    Inventors: Kuan-Ting PAN, Zhi-Chang LIN, Yi-Ruei JHAN, Chi-Hao WANG, Huan-Chieh SU, Shi Ning JU, Kuo-Cheng CHIANG
  • Publication number: 20240114698
    Abstract: A semiconductor device includes a substrate, a bottom electrode, a ferroelectric layer, a noble metal electrode, and a non-noble metal electrode. The bottom electrode is over the substrate. The ferroelectric layer is over the bottom electrode. The noble metal electrode is over the ferroelectric layer. The non-noble metal electrode is over the noble metal electrode.
    Type: Application
    Filed: December 1, 2023
    Publication date: April 4, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu-Yu CHEN, Sheng-Hung SHIH, Fu-Chen CHANG, Kuo-Chi TU, Wen-Ting CHU, Alexander KALNITSKY
  • Publication number: 20240112714
    Abstract: A memory device includes a group of ferroelectric capacitors with a shared plate that extends through the ferroelectric capacitors, has a greatest width between ferroelectric capacitors, and is coupled to an access transistor. The shared plate may be vertically between ferroelectric layers of the ferroelectric capacitors at the shared plate's greatest width. The memory device may include an integrated circuit die and be coupled to a power supply. Forming a group of ferroelectric capacitors includes forming an opening through an alternating stack of insulators and conductive plates, selectively forming ferroelectric material on the conductive plates rather than the insulators, and forming a shared plate in the opening over the ferroelectric material.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Christopher Neumann, Brian Doyle, Sou-Chi Chang, Bernal Granados Alpizar, Sarah Atanasov, Matthew Metz, Uygar Avci, Jack Kavalieros, Shriram Shivaraman
  • Publication number: 20240112730
    Abstract: Techniques and mechanisms for storing data with a memory cell which comprises a ferroelectric (FE) resistive junction. In an embodiment, a memory cell comprises a transistor and a FE resistive junction structure which is coupled to the transistor. The FE resistive junction structure comprises electrode structures, and a layer of a material which is between said electrode structures, wherein the material is a FE oxide or a FE semiconductor. The FE resistive junction structure selectively provides any of various levels of resistance, each to represent a respective one or more bits. A current flow through the FE resistive junction structure is characterized by thermionic emission through a Schottky barrier at an interface with one of the electrode structures. In another embodiment, the FE resistive junction structure further comprises one or more dielectric layers each between the layer of material and a different respective one of the electrode structures.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Sou-Chi Chang, Nazila Haratipour, Saima Siddiqui, Uygar Avci, Chia-Ching Lin
  • Publication number: 20240112731
    Abstract: Techniques and mechanisms for operating a ferroelectric (FE) circuit element as a cell of a crossbar memory array. In an embodiment, the crossbar memory array comprises a bit line, a word line, and a data storage cell which includes a circuit element that extends to each of the bit line and the word line. The data storage cell is a FE circuit element which comprises terminals, each at a different respective one of the bit line or the word line, and one or more material layers between said terminals. One such layer comprises a FE nitride or a FE oxide. The FE circuit element is operable to selectively enable, or disable, operation as a diode. In another embodiment, the memory array is coupled to circuitry which corresponds a given mode of operation of the FE circuit element to a particular data bit value.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Sou-Chi Chang, Chia-Ching Lin, Saima Siddiqui, Sarah Atanasov, Bernal Granados Alpizar, Uygar Avci
  • Publication number: 20240111118
    Abstract: A lens shift backlash elimination device includes a base, a transmission mechanism, and a lens. The transmission mechanism is disposed on the base and includes a first element, a second element, and an elastic element. The second element is mechanically connected to the first element. The elastic element is disposed between the first element and the second element, or abutted against the first element. The lens is mechanically connected to the transmission mechanism. The lens may be displaced relative to the base in a first direction.
    Type: Application
    Filed: November 3, 2022
    Publication date: April 4, 2024
    Applicant: Young Optics Inc.
    Inventors: Chia-Chang Lee, Chi-Yu Meng
  • Publication number: 20240114697
    Abstract: Embodiments disclosed herein include a memory device. In an embodiment, the memory device comprises a first transistor, where the first transistor is an access transistor to write data. In an embodiment, the memory device further comprises a ferroelectric capacitor for storing data. In an embodiment, the memory device further comprises a second transistor, where the second transistor is a sense transistor to read the data stored on the ferroelectric capacitor.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Inventors: Shriram SHIVARAMAN, Sou-Chi CHANG, Sourav DUTTA, Uygar E. AVCI
  • Publication number: 20240113123
    Abstract: An apparatus is provided which comprises: a plurality of logic blocks comprising transistors on a substrate, the logic blocks to implement logic functions; a plurality of input/output (I/O) blocks connecting the logic blocks with components external to the apparatus; a plurality of interconnect layers comprising wires and vias surrounded by interlayer dielectric above the substrate, the wires and vias conductively coupling the plurality of logic blocks and the plurality of I/O blocks; a plurality of programmable switches to configure connections between the plurality of logic blocks and the plurality of I/O blocks; and a ferroelectric material in a capacitor coupled to the gate or on the gate dielectric itself of one or more of the transistors. Other embodiments are also disclosed and claimed.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Elijah V. Karpov, Sou-Chi Chang
  • Publication number: 20240114694
    Abstract: Backside integrated circuit capacitor structures. In an example, a capacitor structure includes a layer of ferroelectric material between first and second electrodes. The first electrode can be connected to a transistor terminal by a backside contact that extends downward from a bottom surface of the transistor terminal to the first electrode. The transistor terminal can be, for instance, a source or drain region, and the backside contact can be self-aligned with the source or drain region. The second electrode can be connected to a backside interconnect feature. In some cases, the capacitor has a height that extends through at least one backside interconnect layer. In some cases, the capacitor is a multi-plate capacitor in which the second conductor is one of a plurality of plate line conductors arranged in a staircase structure. The capacitor structure may be, for example, part of a non-volatile memory device or the cache of a processor.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Sourav Dutta, Nazila Haratipour, Uygar E. Avci, Vachan Kumar, Christopher M. Neumann, Shriram Shivaraman, Sou-Chi Chang, Brian S. Doyle
  • Publication number: 20240114693
    Abstract: In one embodiment, an apparatus includes a first metal layer, a second metal layer above the first metal layer, a first metal via generally perpendicular with and connected to the first metal layer, a second metal via generally perpendicular with and connected to the second metal layer, a third metal via generally perpendicular with and extending through the first metal layer and the second metal layer, a ferroelectric material between the third metal via and the first metal layer and between the third metal via and the second metal layer, and a hard mask material around a portion of the first metal via above the first metal layer and the second metal layer, around a portion of the second metal via above the first metal layer and the second metal layer, and around a portion of the ferroelectric material above the first metal layer and the second metal layer.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Christopher M. Neumann, Brian Doyle, Nazila Haratipour, Shriram Shivaraman, Sou-Chi Chang, Uygar E. Avci, Eungnak Han, Manish Chandhok, Nafees Aminul Kabir, Gurpreet Singh
  • Publication number: 20240114695
    Abstract: Apparatuses, memory systems, capacitor structures, and techniques related to anti-ferroelectric capacitors having a cerium oxide doped hafnium zirconium oxide based anti-ferroelectric are described. A capacitor includes layers of hafnium oxide, cerium oxide, and zirconium oxide between metal electrodes. The cerium of the cerium oxide provides a mid gap state to protect the hafnium zirconium oxide during operation.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Sou-Chi Chang, Nazila Haratipour, Christopher Neumann, Shriram Shivaraman, Brian Doyle, Sarah Atanasov, Bernal Granados Alpizar, Uygar Avci
  • Patent number: 11947204
    Abstract: A cholesterol liquid crystal display device includes a liquid crystal display panel and a liquid crystal driving unit. The liquid crystal display panel has a plurality of pixels. The liquid crystal driving unit applies row driving voltages and column driving voltages to a designated pixel according to the input signal. After the input signal is transmitted, the liquid crystal driving unit activates the power-down signal within a certain period of time to reduce the row driving voltage and the column driving voltage applied to the specified pixel. Thereby, the crosstalk phenomenon on the cholesteric liquid crystal display device can be improved.
    Type: Grant
    Filed: November 14, 2022
    Date of Patent: April 2, 2024
    Assignee: IRIS OPTRONICS CO., LTD.
    Inventors: Wu-Chang Yang, Chi-Chang Liao
  • Patent number: 11948981
    Abstract: A method includes forming a dummy gate stack over a semiconductor region, forming epitaxial source/drain regions on opposite sides of the dummy gate stack, removing the dummy gate stack to form a trench, depositing a gate dielectric layer extending into the trench, and depositing a work-function layer over the gate dielectric layer. The work-function layer comprises a seam therein. A silicon-containing layer is deposited to fill the seam. A planarization process is performed to remove excess portions of the silicon-containing layer, the work-function layer, and the gate dielectric layer. Remaining portions of the silicon-containing layer, the work-function layer, and the gate dielectric layer form a gate stack.
    Type: Grant
    Filed: August 18, 2021
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Yi Lee, Weng Chang, Chi On Chui
  • Patent number: 11948879
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a device, a first dielectric material disposed over the device, and an opening is formed in the first dielectric material. The semiconductor device structure further includes a conductive structure disposed in the opening, and the conductive structure includes a first sidewall. The semiconductor device structure further includes a surrounding structure disposed in the opening, and the surrounding structure surrounds the first sidewall of the conductive structure. The surrounding structure includes a first spacer layer and a second spacer layer adjacent the first spacer layer. The first spacer layer is separated from the second spacer layer by an air gap.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11948800
    Abstract: A device includes a pair of gate spacers on a substrate, and a gate structure on the substrate and between the gate spacers. The gate structure includes an interfacial layer, a metal oxide layer, a nitride-containing layer, a tungsten-containing layer, and a metal compound layer. The interfacial layer is over the substrate. The metal oxide layer is over the interfacial layer. The nitride-containing layer is over the metal oxide layer. The tungsten-containing layer is over the nitride-containing layer. The metal compound layer is over the tungsten-containing layer. The metal compound layer has a different material than a material of the tungsten-containing layer.
    Type: Grant
    Filed: December 14, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yen-Yu Chen, Yu-Chi Lu, Chih-Pin Tsao, Shih-Hsun Chang