Abstract: A HEMT comprising a channel layer of a first III-Nitride semiconductor material, grown on a N-polar surface of a back barrier layer of a second III-Nitride semiconductor material; the second III-Nitride semiconductor material having a larger band gap than the first III-Nitride semiconductor material, such that a positively charged polarization interface and two-dimensional electron gas is obtained in the channel layer; a passivation, capping layer, of said first III-Nitride semiconductor material, formed on top of and in contact with a first portion of a N-polar surface of said channel layer; a gate trench traversing the passivation, capping layer, and ending at said N-polar surface of said channel layer; and a gate conductor filling said gate trench.

Abstract: A HEMT comprising a channel layer of a first III-Nitride semiconductor material, grown on a N-polar surface of a back barrier layer of a second III-Nitride semiconductor material; the second III-Nitride semiconductor material having a larger band gap than the first III-Nitride semiconductor material, such that a positively charged polarization interface and two-dimensional electron gas is obtained in the channel layer; a passivation, capping layer, of said first III-Nitride semiconductor material, formed on top of and in contact with a first portion of a N-polar surface of said channel layer; a gate trench traversing the passivation, capping layer, and ending at said N-polar surface of said channel layer; and a gate conductor filling said gate trench.

Abstract: A transistor includes a substrate, a channel layer coupled to the substrate, a source electrode coupled to the channel layer, a drain electrode coupled to the channel layer, and a gate electrode coupled to the channel layer between the source electrode and the drain electrode. The gate electrode has a length dimension of less than 50 nanometers near the channel layer, and the channel layer includes at least a first GaN layer and a first graded AlGaN layer on the first GaN layer.

Abstract: A monolithically integrated device includes a substrate, a first set of Group III nitride epitaxial layers grown for a first HFET on a first region of the substrate, and a second set of Group III nitride epitaxial layers for a second HFET grown on a second region of the substrate.

Abstract: A transistor includes a substrate, a channel layer coupled to the substrate, a source electrode coupled to the channel layer, a drain electrode coupled to the channel layer, and a gate electrode coupled to the channel layer between the source electrode and the drain electrode. The gate electrode has a length dimension of less than 50 nanometers near the channel layer, and the channel layer includes at least a first GaN layer and a first graded AlGaN layer on the first GaN layer.

Abstract: A HEMT device comprising a III-Nitride material substrate, the surface of which follows a plane that is not parallel to the C-plane of the III-Nitride material; an epitaxial layer of III-Nitride material grown on said substrate; a recess etched in said epitaxial layer, having at least one plane wall parallel to a polar plane of the III-Nitride material; a carrier supply layer formed on a portion of the plane wall of the recess, such that a 2DEG region is formed along the portion of the plane wall of the recess; a doped source region formed at the surface of said epitaxial layer such that the doped source region is separated from said 2DEG region by a channel region of the epitaxial layer; a gate insulating layer formed on the channel region of the epitaxial layer; and a gate contact layer formed on the gate insulating layer.

Abstract: Methods using chemical vapor deposition (CVD) of diamond deposited on a sacrificial material provide CVD diamond microchannel structures and 3-D interconnection structures of CVD diamond microfluidic channels. The sacrificial material is patterned to define locations and dimensions of the microchannels. The patterned sacrificial material is selectively removed from underneath the chemical vapor deposited (CVD) diamond to form the CVD diamond microchannels. The CVD diamond microchannels are integrated with electronic structures to provide an integral microfluidic cooling system to electronic devices.

Abstract: A monolithically integrated device includes a substrate, a first set of Group III nitride epitaxial layers grown for a first HFET on a first region of the substrate, and a second set of Group III nitride epitaxial layers for a second HFET grown on a second region of the substrate.

Abstract: A method of making a stepped field gate for an FET including forming a first passivation layer on a barrier layer, defining a first field plate by using electron beam (EB) lithography and by depositing a first negative EB resist, forming a second passivation layer over first negative EB resist and the first passivation layer, planarizing the first negative EB resist and the second passivation layer, defining a second field plate by using EB lithography and by depositing a second negative EB resist connected to the first negative EB resist, forming a third passivation layer over second negative EB resist and the second passivation layer, planarizing the second negative EB resist and the third passivation layer, removing the first and second negative EB resist, and forming a stepped field gate by using lithography and plating in a void left by the removed first and second negative EB resist.

Abstract: A HEMT device comprising a III-Nitride material substrate, the surface of which follows a plane that is not parallel to the C-plane of the III-Nitride material; an epitaxial layer of III-Nitride material grown on said substrate; a recess etched in said epitaxial layer, having at least one plane wall parallel to a polar plane of the III-Nitride material; a carrier supply layer formed on a portion of the plane wall of the recess, such that a 2DEG region is formed along the portion of the plane wall of the recess; a doped source region formed at the surface of said epitaxial layer such that the doped source region is separated from said 2DEG region by a channel region of the epitaxial layer; a gate insulating layer formed on the channel region of the epitaxial layer; and a gate contact layer formed on the gate insulating layer.

Abstract: Apparatus and methods are provided for heat removal and spreading from a field effect transistor (FET) including a substrate, a first source, a first gate, and a drain on the substrate, and a poly-diamond dielectric thermally coupled to the first gate wherein the poly-diamond dielectric facilitates heat removal from a top of the FET.

Abstract: A HEMT device comprising a III-Nitride material substrate, the surface of which follows a plane that is not parallel to the C-plane of the III-Nitride material; an epitaxial layer of III-Nitride material grown on said substrate; a recess etched in said epitaxial layer, having at least one plane wall parallel to a polar plane of the III-Nitride material; a carrier supply layer formed on a portion of the plane wall of the recess, such that a 2DEG region is formed along the portion of the plane wall of the recess; a doped source region formed at the surface of said epitaxial layer such that the doped source region is separated from said 2DEG region by a channel region of the epitaxial layer; a gate insulating layer formed on the channel region of the epitaxial layer; and a gate contact layer formed on the gate insulating layer.

Abstract: A method of making a stepped field gate for an FET including forming a first set of layers having a passivation layer on a barrier layer of the FET and a first etch stop layer over the first passivation layer, forming additional sets of layers having alternating passivation layer and etch stop layers, successively removing portions of each set of layers using lithography and reactive ion etching to form stepped passivation layers and a gate foot, applying a mask having an opening defining an extent of a stepped field-plate gate, and forming the stepped field plate gate and the gate foot by plating through the opening in the mask.

Abstract: A monolithically integrated device includes a substrate, a first set of Group III nitride epitaxial layers grown for a first HFET on a first region of the substrate, and a second set of Group III nitride epitaxial layers for a second HFET grown on a second region of the substrate.

Abstract: The interface resistance between the source/drain and gate of an HFET may be significantly reduced by engineering the bandgap of the 2DEG outside a gate region such that the charge density is substantially increased. The resistance may be further reduced by using an n+GaN Cap layer over the channel layer and barrier layer such that a horizontal surface of the barrier layer beyond the gate region is covered by the n+GaN Cap layer. This technique is applicable to depletion and enhancement mode HFETs.

Abstract: A method of making a stepped field gate for an FET including forming a first set of layers having a passivation layer on a barrier layer of the FET and a first etch stop layer over the first passivation layer, forming additional sets of layers having alternating passivation layer and etch stop layers, successively removing portions of each set of layers using lithography and reactive ion etching to form stepped passivation layers and a gate foot, applying a mask having an opening defining an extent of a stepped field-plate gate, and forming the stepped field plate gate and the gate foot by plating through the opening in the mask.

Abstract: A method of making a stepped field gate for an FET including forming a first passivation layer on a barrier layer, defining a first field plate by using electron beam (EB) lithography and by depositing a first negative EB resist, forming a second passivation layer over first negative EB resist and the first passivation layer, planarizing the first negative EB resist and the second passivation layer, defining a second field plate by using EB lithography and by depositing a second negative EB resist connected to the first negative EB resist, forming a third passivation layer over second negative EB resist and the second passivation layer, planarizing the second negative EB resist and the third passivation layer, removing the first and second negative EB resist, and forming a stepped field gate by using lithography and plating in a void left by the removed first and second negative EB resist.

Abstract: A method of forming a slanted field plate including forming epitaxy for a FET on a substrate, forming a wall near a drain of the FET, the wall comprising a first negative tone electron-beam resist (NTEBR), depositing a dielectric over the epitaxy and the wall, the wall causing the dielectric to have a step near the drain of the FET, depositing a second NTEBR over the dielectric, wherein surface tension causes the deposited second NTEBR to have a slanted top surface between the step and a source of the FET, etching anisotropically vertically the second NTEBR and the dielectric to remove the second NTEBR and to transfer a shape of the slanted top surface to the dielectric, and forming a gatehead comprising metal on the dielectric between the step and the source of the FET, wherein the gatehead forms a slanted field plate.

Abstract: A HEMT device comprising a III-Nitride material substrate, the surface of which follows a plane that is not parallel to the C-plane of the III-Nitride material; an epitaxial layer of III-Nitride material grown on said substrate; a recess etched in said epitaxial layer, having at least one plane wall parallel to a polar plane of the III-Nitride material; a carrier supply layer formed on a portion of the plane wall of the recess, such that a 2DEG region is formed along the portion of the plane wall of the recess; a doped source region formed at the surface of said epitaxial layer such that the doped source region is separated from said 2DEG region by a channel region of the epitaxial layer; a gate insulating layer formed on the channel region of the epitaxial layer; and a gate contact layer formed on the gate insulating layer.

Abstract: A monolithically integrated device includes a substrate, a first set of Group III nitride epitaxial layers grown for a first HFET on a first region of the substrate, and a second set of Group III nitride epitaxial layers for a second HFET grown on a second region of the substrate.