Abstract: A composition of microorganisms, comprising photoautotrophic microorganisms (16) which produce oxygen by photosynthetic water oxidation chemoheterotrophic microorganisms (17) which respire oxygen, wherein the photoautotrophic microorganisms (16) and the chemoheterotrophic microorganisms (17) are comprised in a biofilm (13), the biofilm further comprising components (15) which were secreted by the photoautotrophic microorganisms (16) and/or the chemoheterotrophic microorganisms (17), and a reactor (1), a method for forming a biofilm, and a method for biocatalytic conversion employing such composition.

Abstract: A process kit enclosure system includes walls and a retention device structure. The retention device structure includes a retention device post and a retention device fin. The retention device fin in a first position is disposed above and secures a process kit ring supported in the interior volume of the process kit enclosure system. The retention device fin is rotated from the first position to be in a second position to be outside a boundary of the process kit ring. The retention device post is aligned with and inserts into a recess formed by a top cover of the process kit enclosure system responsive to the retention device post being in the first position. The retention device post is misaligned with and blocked from inserting into the recess formed by the top cover responsive to the retention device post of the retention device structure being in the second position.

Abstract: Disclosed herein is a seal assembly for a substrate processing chamber and a component assembly containing the seal assembly. The seal assembly includes a ring-shaped seal member; a holder disposed radially inward of the ring-shaped seal member; and a retaining mechanism coupling the ring-shaped seal member with the holder. The component assembly includes a first component coupled with a second component via a bonding layer; a groove formed by the first component, the second component, and the bonding layer; and the seal assembly disposed in the groove.

Abstract: A device automatically establishes at least one connection between a towing vehicle and a trailer vehicle. The device includes an outrigger, an alignment device, a gripper arm and a gripper arm drive. A system includes the device. A towing vehicle includes a device or a system. A trailer vehicle is configured to be connected to a towing vehicle including the device or the system. A truck-trailer combination includes a towing vehicle and a trailer vehicle. Further, a method automatically establishes connections between a towing vehicle and a trailer vehicle.

Abstract: Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes a ring having a first ring component and a second ring component, a sliding ring, and an actuating mechanism. The first ring component is interfaced with the second ring component such that the second ring component is movable relative to the first ring component forming a gap therebetween. The sliding ring is positioned beneath the ring and contacts a bottom surface of the second ring component. A top surface of the sliding ring contacts the second ring component. The actuating mechanism is interfaced with the bottom surface of the sliding ring. The actuating mechanism is configured to actuate the sliding ring such that the gap between the first ring component and the second ring component varies.

Abstract: Embodiments described herein generally related to a substrate processing chamber and a method of processing substrate in a processing chamber. In one embodiment, a method of using a process kit for a substrate processing chamber disclosed herein. The method begins by positioning the substrate on a substrate support disposed in the substrate processing chamber. A plasma is formed above the substrate and a tilt and height of an edge ring is adjusted with a controller. The controller is coupled to a movement assembly having one of three linear actuators for tilting a sliding ring interfaced with the edge ring to change a direction of ions at one edge of the substrate.

Abstract: Substrate supports and related components including additive manufacturing processes are disclosed. One substrate support assembly includes an electrostatic chuck; and a cooling base having a first surface that is bonded to a first surface of the electrostatic chuck with a metallic bonding material, the cooling base comprising: a ceramic body having a coefficient of thermal expansion substantially the same as the electrostatic chuck; one or more cooling channels formed within the ceramic body; and one or more conductive zones extending through the ceramic body from the first surface to a second surface on an opposite side of the cooling base.

Abstract: A process kit enclosure system includes surfaces to enclose an interior volume, a first support structure including first fins, a second support structure including second fins, and a front interface to interface the process kit enclosure system with a load port of a wafer processing system. The first and second fins are sized and spaced to hold process kit ring carriers and process kit rings in the interior volume. Each of the process kit rings is secured to one of the process kit ring carriers. The process kit enclosure system enables first automated transfer of a first process kit ring carrier securing a first process kit ring from the process kit enclosure system into the wafer processing system and second automated transfer of a second process kit ring carrier securing a second process kit ring from the wafer processing system into the process kit enclosure system.

Abstract: According to embodiments described herein, an oil-cooled exhaust turbine apparatus is provided. The exhaust turbine apparatus comprises a rotatable shaft with a turbine wheel, a bearing member comprising a bearing, a bearing housing comprising a sealing bush portion for providing a first sealing device axially between the turbine wheel and the bearing member; an oil cooling chamber for cooling an inner face of the bearing housing, an oil channel for providing oil into the oil cooling chamber, an oil drainage chamber arranged axially between the bearing member and the sealing bush portion and an oil barrier wall surrounding, in at least a vertically top circumferential segment, a radially outer side of the oil drainage chamber for covering the oil drainage chamber from the oil cooling chamber.

Abstract: In order to provide a method for manufacturing a bipolar plate layer for a bipolar plate of an electrochemical unit of an electrochemical device having the method steps of: providing a starting material for the bipolar plate layer; and shaping the starting material such that an edge web which borders a flow field of the bipolar plate layer is formed, which is configured to be carried out simply and reliably even when large numbers of bipolar plate layers are to be manufactured, it is proposed that the method comprises the following: separating out gas passage openings from an edge web portion of the starting material, wherein after the gas passage openings have been separated out the edge web portion is shaped such that the edge web is formed from the edge web portion.

Abstract: The present disclosure generally relates to a method and apparatus for determining a metric related to erosion of a ring assembly used in an etching within a plasma processing chamber. In one example, the apparatus is configured to obtain a metric indicative of erosion on an edge ring disposed on a substrate support assembly in a plasma processing chamber. A sensor obtains the metric for the edge ring. The metric correlates to the quantity of erosion in the edge ring. In another example, the ring sensor may be arranged outside of a periphery of a substrate support assembly. The metric may be acquired by the ring sensor through a plasma screen.

Abstract: A method of providing an assembled image using a digital microscope, the digital microscope having an optical system, an image sensor having a predefined number of image pixels, and a stage, the stage being movable in relation to the optical system and the image sensor, includes receiving a user selection regarding an area of interest of the sample, the user selection indicating the position and extension of the area of interest, selecting one of a full resolution mode or and a reduced resolution mode, wherein individual images with a reduced number of image pixels are generated, moving the stage with respect to the optical system and the image sensor, and generating individual images of the area of interest in accordance with the selected one of the full resolution mode or the reduced resolution mode, and combining the individual images into the assembled image, representing the area of interest.

Abstract: A vehicle radar detection system arranged to be mounted in an ego vehicle and including at least one detector arrangement and at least one control unit arrangement. The detector arrangement is adapted to obtain a dataset initially including a number K of radar detections. The control unit arrangement is adapted to repeatedly determine a dominating line from the dataset of radar detections, remove radar detections associated with the dominating line from the dataset of radar detections until a first stopping criterion is fulfilled, thereby determining a plurality of lines from the number K of radar detections.

Abstract: A vehicle environment detection system in an ego vehicle, including a sensor arrangement and a main control unit is arranged to detect and track at least one oncoming vehicle, and to determine whether the ego vehicle has entered a curve. The main control unit is arranged to determine a common curve with a radius, along which common curve the ego vehicle is assumed to travel, determine a measured oncome direction of the oncoming vehicle on the common curve, corresponding to an oncome angle, determine a difference angle between the measured oncome direction and an oncome direction corresponding to if the oncoming vehicle would be moving along the common curve, compare the difference angle with a threshold angle, and to determine that the oncoming vehicle is crossing if the difference angle exceeds the threshold angle.

Abstract: The present disclosure generally relates to a method and apparatus for determining a metric related to erosion of a ring assembly used in an etching within a plasma processing chamber. In one example, the apparatus is configured to obtain a metric indicative of erosion on an edge ring disposed on a substrate support assembly in a plasma processing chamber. A sensor obtains the metric for the edge ring. The metric correlates to the quantity of erosion in the edge ring. In another example, the ring sensor may be arranged outside of a periphery of a substrate support assembly. The metric may be acquired by the ring sensor through a plasma screen.

Abstract: A shaft bearing assembly having a shaft supported in a bearing housing is described. The shaft bearing assembly includes a pressure reduction device for generating an underpressure inside the bearing housing. The pressure reduction device is operated by employing an incompressible fluid. Further, a method of reducing a pressure inside a bearing housing supporting a shaft is described. The method includes using an incompressible fluid for operating a pressure reduction device for generating an underpressure inside the bearing housing.

Abstract: A method and apparatus for cooling a semiconductor chamber are described herein. A semiconductor chamber component, includes a powered region, a grounded region, and a fluid conduit disposed within the semiconductor chamber component and passing through the powered region and grounded region, the fluid conduit comprising a ceramic material.