Abstract: Apparatus is described for treating an effluent fluid stream from a semiconductor manufacturing process tool. The apparatus comprises a combustion chamber, means for heating the combustion chamber, and a nozzle for injecting the effluent stream into the combustion chamber. The apparatus is configured to enable a fuel and an oxidant to be selectively injected into the effluent stream as required to optimise the combustion conditions for a particular effluent stream. In one to embodiment, a lance projecting into the nozzle selectively injects an oxidant into the effluent stream, and a sleeve surrounding the nozzle selectively injects a fuel into the effluent stream.

Abstract: A method for the abatement of one or more pyrophoric gases in a gas stream, which includes introducing water in to the gas stream and/or mixing the gas stream with preheated air and introducing the gas stream in to a container in which the pyrophoric gases are abated.

Abstract: A process for the combustive destruction of noxious substances in a gas stream which comprises injecting the gas stream into a heated chamber with sufficient oxygen to allow substantially complete combustion therein, wherein hydrogen is also present in the chamber as a fuel gas.

Abstract: A method for the abatement of one or more pyrophoric gases in a gas stream, which comprises introducing water in to the gas stream and/or mixing the gas stream with preheated air and introducing the gas stream in to a container in which the pyrophoric gases are abated.

Abstract: A process for the combustive destruction of noxious substances from a gas stream in which the gas stream and added fuel gas as a mixture into a combustion zone that is surrounded by an exit surface of a foraminous gas burner. A fuel gas and air/oxygen mixture are simultaneously supplied to the foraminous gas burner to effect combustion at the exit surface. The resulting combustion product stream is discharged from the combustion zone. The oxygen is added to the gas stream and the fuel gas prior to the introduction of the mixture to the combustion zone and the oxygen/fuel gas mixture burns at the point of injection.