Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of CD40 ligand. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding CD40 ligand. Methods of using these compounds for modulation of CD40 ligand expression and for treatment of diseases associated with expression of CD40 ligand are provided.

Abstract: Compounds, compositions and methods are provided for modulating the expression of SLC26A2. The compositions comprise oligonucleotides, targeted to nucleic acid encoding SLC26A2. Methods of using these compounds for modulation of SLC26A2 expression and for diagnosis and treatment of disease associated with expression of SLC26A2 are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of matrix metalloproteinase 1. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding matrix metalloproteinase 1. Methods of using these compounds for modulation of matrix metalloproteinase 1 expression and for treatment of diseases associated with expression of matrix metalloproteinase 1 are provided.

Abstract: A method is provided for patterning a substrate. In such method a first mask, for example, a front-end-of-line (“FEOL”) mask is fabricated, the first mask including a plurality of first features such as FEOL features which are usable to pattern regular elements and redundancy elements of a substrate such as a microelectronic substrate and/or a micro-electromechanical substrate. The first mask is tested, i.e., inspected for defects in the features. Thereafter, a second sequentially used mask, for example, a back-end-of-line (“BEOL”) mask is fabricated which includes a plurality of second features, e.g., BEOL features, such features being usable to pattern a plurality of interconnections between individual ones of the regular elements and between the regular elements and the redundancy elements. The regular elements and the redundancy elements are patterned using the first mask and the interconnections between them are patterned using the second mask.

Abstract: A method to correct critical dimension errors during a semiconductor manufacturing process. The method includes providing a first semiconductor device. The first semiconductor device is analyzed to determine at least one critical dimension error within the first semiconductor device. A dose of electron beam exposure to correct the at least one critical dimension error during a subsequent process to form a second semiconductor device, or during modification of the first semiconductor device is determined. The subsequent process comprises providing a semiconductor structure. The semiconductor structure comprises a photoresist layer on a semiconductor substrate. A plurality of features are formed in the photoresist layer. At least one feature of the plurality of features comprises the at least one critical dimension error.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of MEKK4. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding MEKK4. Methods of using these compounds for modulation of MEKK4 expression and for treatment of diseases associated with expression of MEKK4 are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of p70 S6 kinase. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding p70 S6 kinase. Methods of using these compounds for modulation of p70 S6 kinase expression and for treatment of diseases associated with expression of p70 S6 kinase are provided.

Abstract: A monolithic optical pellicle and method of making used to protect a photomask during photolithography processing. The monolithic optical pellicle is comprised of a pellicle plate having a recessed central portion integrally formed with a perimeter frame of the pellicle plate such that it is a one-piece optical pellicle. The monolithic optical pellicle comprises a material of sufficient rigidity to minimize distortions in and maximize durability of the pellicle when used in combination with the recessed portion having a thickness that prevents sagging thereof due to applied forces on the resultant monolithic optical pellicle. This recessed central portion is the optical pellicle portion of the present monolithic optical pellicle, while the integral perimeter frame is used to attach the monolithic optical pellicle at the desired stand-off distance to a photomask. The monolithic optical pellicle preferably comprises a material that is transparent to an exposure field at about 157 nm wavelengths.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of TFAP2C. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding TFAP2C. Methods of using these compounds for modulation of TFAP2C expression and for treatment of diseases associated with expression of TFAP2C are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of sterol regulatory element-binding protein-1. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding sterol regulatory element-binding protein-1. Methods of using these compounds for modulation of sterol regulatory element-binding protein-1 expression and for treatment of diseases associated with expression of sterol regulatory element-binding protein-1 are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of dual specific phosphatase 5. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding dual specific phosphatase 5. Methods of using these compounds for modulation of dual specific phosphatase 5 expression and for treatment of diseases associated with expression of dual specific phosphatase 5 are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of EIF2C1. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding EIF2C1. Methods of using these compounds for modulation of EIF2C1 expression and for treatment of diseases associated with expression of EIF2C1 are provided.

Abstract: A method of making an embedded attenuated phase shift mask (EAPSM) comprises initially providing a phase shift mask substrate having a layer of phase shifting material and a layer of an opaque material, and depositing a first resist layer on the substrate. The first resist layer is exposed by a direct write electron beam or laser energy source and developed, and the substrate is etched, to create first level phase shifting image segments on the substrate corresponding to areas of critical structures to be exposed with the EAPSM. The method then includes depositing a second resist layer on the substrate. Using a single frame exposure mask corresponding to non-critical areas outside the critical structure areas, the second resist layer is then exposed by simultaneous projection exposure. The method then includes developing the second resist layer and etching the substrate to remove the opaque material from the critical structure areas.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of Interferon gamma receptor 2. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding Interferon gamma receptor 2. Methods of using these compounds for modulation of Interferon gamma receptor 2 expression and for treatment of diseases associated with expression of Interferon gamma receptor 2 are provided.

Abstract: Compounds, compositions and methods are provided for modulating the expression of hepatocyte growth factor receptor. The compositions comprise oligonucleotides, targeted to nucleic acid encoding hepatocyte growth factor receptor. Methods of using these compounds for modulation of hepatocyte growth factor receptor expression and for diagnosis and treatment of disease associated with expression of hepatocyte growth factor receptor are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of PLML. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding PLML. Methods of using these compounds for modulation of PLML expression and for treatment of diseases associated with expression of PLML are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of caspase 7. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding caspase 7. Methods of using these compounds for modulation of caspase 7 expression and for treatment of diseases associated with expression of caspase 7 are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of WRN. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding WRN. Methods of using these compounds for modulation of WRN expression and for treatment of diseases associated with expression of WRN are provided.

Abstract: Antisense compounds, compositions and methods are provided for modulating the expression of connective tissue growth factor. The compositions comprise antisense compounds, particularly antisense oligonucleotides, targeted to nucleic acids encoding connective tissue growth factor. Methods of using these compounds for modulation of connective tissue growth factor expression and for treatment of diseases associated with expression of connective tissue growth factor are provided.

Abstract: Compounds, compositions and methods are provided for modulating the RNAi pathway. The compositions comprise oligonucleotides, targeted to nucleic acid molecules encoding EIF2C2. Methods of using these compounds for modulation of RNA interference as well as EIF2C2 expression and for diagnosis and treatment of disease associated with expression of EIF2C2 are provided. Also provided are compounds, compositions and methods for modulating the expression of DDX36. The compositions comprise oligonucleotides, targeted to nucleic acid encoding DDX36. Methods of using these compounds for modulation of DDX36 expression and for diagnosis and treatment of diseases and conditions associated with expression of DDX36 are provided.