Abstract: A method of processing a substrate includes forming a photoresist layer over the substrate, exposing the substrate to a pattern of an actinic radiation, where the exposing causes a photo-reaction in an exposed portion of the photoresist layer. The method includes treating the photoresist layer with a binding agent, where the binding agent is selectively adsorbed on a first portion of the photoresist layer, and performing a development process to remove a second portion of the photoresist, the first portion remaining after the development process.

Abstract: Various embodiments of improved systems and methods are provided herein to monitor process chemicals used in a semiconductor process. More specifically, new semiconductor processing systems and methods that utilize infrared (IR) spectroscopy techniques are provided herein to monitor the composition and/or concentration of process chemicals utilized to process a substrate and/or the by-products produced during substrate processing. By monitoring the process chemicals and/or the by-products in real-time, the systems and methods described herein can be used to provide better process control and/or end-point detection for a wide variety of semiconductor processes.

Abstract: A method for fabricating a semiconductor device with organometallic based photoresists and commercial extreme ultraviolet photolithography. The method for fabricating a semiconductor device includes applying organometallic based photoresist to a substrate and exposing the organometallic based photoresist to extreme ultraviolet photolithography. The method may include introducing an additive to the organometallic based photoresist to promote at least one of adhesion, passivation, reactivity and cross-linking of components in the organometallic based photoresist. The method may also include exposing the organometallic based photoresist to microwave radiation. The microwave radiation may couple with molecular motions, such as internal rotations, to enhance organometallic based photoresist cluster mobility or reorientations. In addition, microwave radiation may induce charge polarization and eddy currents in materials, resulting in induced electron transport and heating due to resistive losses.

Abstract: Embodiments disclosed herein include electronic packages with vents to prevent pressure buildup below a die. In an embodiment, an electronic package comprises a package substrate and a die attached to the package substrate by interconnects. In an embodiment, an underfill is under the die and surrounds the interconnects. In an embodiment, a void is provided in the underfill, and a vent is in the underfill. In an embodiment, the vent is fluidically coupled to the void and extends to an edge of the underfill.

Abstract: Methods, systems, and non-transitory computer-readable media are configured to perform operations comprising determining an image of an environment. A drivable area and boundary information associated with the environment are determined based on the image. At least one boundary for navigation of the environment is generated based on the drivable area and boundary information.

Abstract: Methods, systems, and non-transitory computer readable media are configured to perform operations comprising determining an occurrence of a sign in an environment of a vehicle; determining that at least a portion of the sign is unrecognized by a local machine learning model of the vehicle; and providing sensor data associated with the at least one portion of the sign to an operations center remote from the vehicle.

Abstract: The present teaching relates to method, system, medium, and implementations for sensor calibration. An ego vehicle determines whether a sensor deployed on the ego vehicle to facilitate autonomous driving of the ego vehicle needs to be calibrated and sends, if it is determined that the sensor needs to be calibrated, a request for assistance in collaborative calibration of the sensor, with a first position of the ego vehicle or a first configuration of the sensor with respect to the ego vehicle. When a response of the request is received, an assisting vehicle is indicated to travel to be near the ego vehicle to facilitate the calibration of the sensor by collaborating with the moving ego vehicle and the ego vehicle coordinates with the assisting vehicle to enable the sensor to acquire information of a target present on the assisting vehicle for the collaborative calibration of the sensor.

Abstract: Embodiments of processing systems and methods are provided to control operational parameter(s) of a spin-on process based on a fluid height and/or a fluid velocity of a processing liquid dispensed onto a surface of a spinning semiconductor substrate. The disclosed embodiments determine the fluid height and/or the fluid velocity of the processing liquid by: (a) monitoring an intensity of light, which is transmitted through the processing liquid as the processing liquid flows across the surface of the spinning substrate or leaves the periphery of the spinning substrate, or (b) monitoring how long it takes for the processing liquid to flow from a dispensed location to the periphery of the spinning substrate. Once determined, the fluid velocity is used to control one or more operational parameters of a spin-on process.

Abstract: Systems and methods are provided to control operational parameter(s) of a spin-on process based on a localized fluid velocity of a processing liquid dispensed onto a surface of a spinning semiconductor substrate. In the present disclosure, a tracer is introduced within, or incorporated onto a surface of, a processing liquid as the processing liquid is dispensed onto the spinning semiconductor substrate. Movement of the tracer is tracked over time, as the tracer flows along with the processing liquid across the spinning substrate surface, to determine a localized fluid velocity of the processing liquid at one or more radial positions on the substrate surface. The localized fluid velocity is then used to control one or more operational parameters of a spin-on process.

Abstract: Methods, systems, and non-transitory computer-readable media are configured to perform operations comprising determining an image of an environment. A drivable area and boundary information associated with the environment are determined based on the image. At least one boundary for navigation of the environment is generated based on the drivable area and boundary information.

Abstract: In implementation of techniques for generating video from an image based on variable speed, a computing device implements a variable speed system to receive a static digital image displayed in a user interface, an indication of a movement direction, and an indication of a variable rate of speed. The variable speed system generates a digital video based on the static digital image, the digital video having pixels that move in the movement direction at a speed that varies based on the variable rate of speed based on pixels from the static digital image. The variable speed system then displays the digital video in the user interface.

Abstract: In some embodiments, an apparatus, comprises an unmanned vehicle configured to be disposed with a vehicle and a processor operatively coupled to the unmanned vehicle. The processor is configured to receive a first signal indicating a stop of the vehicle without a user request and a second signal indicating a location of the vehicle. The processor is configured to determine, based on the location of the vehicle, a target location in a pre-defined area surrounding the vehicle. The processor is configured to send a third signal to the unmanned vehicle to instruct the unmanned vehicle to move to the target location to alert other vehicles via a warning regarding occurrence of the stop.

Abstract: Methods, systems, and non-transitory computer readable media are configured to perform operations comprising determining an occurrence of a sign in an environment of a vehicle; determining that at least a portion of the sign is unrecognized by a local machine learning model of the vehicle; and providing sensor data associated with the at least one portion of the sign to an operations center remote from the vehicle.

Abstract: In some embodiments, an apparatus, comprises an unmanned vehicle configured to be disposed with a vehicle and a processor operatively coupled to the unmanned vehicle. The processor is configured to receive a first signal indicating a stop of the vehicle without a user request and a second signal indicating a location of the vehicle. The processor is configured to determine, based on the location of the vehicle, a target location in a pre-defined area surrounding the vehicle. The processor is configured to send a third signal to the unmanned vehicle to instruct the unmanned vehicle to move to the target location to alert other vehicles via a warning regarding occurrence of the stop.

Abstract: Methods, systems, and non-transitory computer-readable media are configured to perform operations comprising determining an image of an environment. A drivable area and boundary information associated with the environment are determined based on the image. At least one boundary for navigation of the environment is generated based on the drivable area and boundary information.

Abstract: A system is disclosed, in accordance with one or more embodiments of the present disclosure. The system includes a metrology tool configured to acquire one or more measurements of a portion of a sample. The system includes a controller including one or more processors configured to execute program instructions causing the one or more processors to: generate a surface kinetics model output based on a surface kinetics model; determine an expected response of the surface kinetics model output to excitation by polarized light; compare the determined expected response to the one or more measurements; generate one or more metrics based on the comparison between the determined expected response and the one or more measurements of the sample; adjust one or more parameters of the surface kinetics model to generate an adjusted surface kinetics model; and apply the adjusted surface kinetics model to simulate on-sample performance during plasma processing.

Abstract: The present teaching relates to method, system, medium, and implementations for sensor calibration. A request is received from an ego vehicle in motion for assistance in collaborative calibration, when the ego vehicle determines that a sensor deployed thereon needs to be calibrated. The request includes at least one of a first position of the ego vehicle and a first configuration of the sensor with respect to the ego vehicle. An assisting vehicle is identified based on the first position, the first configuration, and a second position associated with the assisting vehicle and an assistance plan is generated in response to the request indicative of the assisting vehicle to travel to the ego vehicle to facilitate the calibration of the sensor by collaborating with the moving ego vehicle. Such generated assistance plan is then sent out to initiate the collaborative calibration.

Abstract: The present teaching relates to method, system, medium, and implementations for sensor calibration. An ego vehicle determines whether a sensor deployed thereon to facilitate autonomous driving needs to be calibrated and sends, if it is determined that the sensor needs to be calibrated, a request for assistance in collaborative calibration of the sensor to a center. The request includes at least a first position of the ego vehicle on the route and a first configuration of the sensor with respect to the ego vehicle. When the ego vehicle receives a calibration assistant package, which includes information associated with a collaborative means present along the route and to be used to assist the ego vehicle to calibrate the sensor, it identifies, based on the information, the collaborative means along the route when the ego vehicle is in a vicinity of the collaborative means in order to capture a target present on the collaborative means to enable calibration of the sensor.

Abstract: Techniques are described for determining whether to process a job request. An example, method can include a device emitting a first pulse using a light detection and ranging (LIDAR) system coupled to an autonomous vehicle. The device can receive a first signal reflected off of an object. The device can emit a second pulse using the system, a threshold time interval being configured for the second laser pulse to hit the object in motion. The device can receive a second signal reflected off of the object. The device can determine a first time of flight information of the first signal and a second time of flight information of the second signal. The device can determine a velocity of the object based at least in part on the first time of flight information and the second time of flight information.

Abstract: The present teaching relates to method, system, medium, and implementations for sensor calibration. A request is received from an ego vehicle in motion for assistance in collaborative calibration, when the ego vehicle determines that a sensor deployed thereon needs to be calibrated. The request includes at least one of a first position of the ego vehicle and a first configuration of the sensor with respect to the ego vehicle. An assisting vehicle is identified based on the first position, the first configuration, and a second position associated with the assisting vehicle and an assistance plan is generated in response to the request indicative of the assisting vehicle to travel to the ego vehicle to facilitate the calibration of the sensor by collaborating with the moving ego vehicle. Such generated assistance plan is then sent out to initiate the collaborative calibration.