Abstract: A valve mounted in pod door of a SMIF pod for allowing gas flow to and from the sealed pod while the pod is seated on a SMIF port. The valve is provided to allow fluid flow to or from the pod upon the valve be actuated by either a standard registration pin or a specially adapted fluid flow pin. The valve includes a body and a valve stem capable of vertical translation within the valve body. A spring biases the valve stem downward with respect to the valve body such that a top of the valve stem lies in sealing engagement with a O-ring 54. When not engaged by a registration pin or fluid flow pin, the engagement between the valve top and the O-ring prevents passage of fluid into or out of the pod.

Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

Abstract: A transportable, sealable container, for example a SMIF pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. The two sealing surfaces form a seal when the box door is moved in a sealing position with respect to the box. A latch mechanism is provided in the box door for holding the box door in the sealing position. The container further includes a breather assembly having an aperture, with a filter, that allows gas to flow between the interior of the container and an environment external to the container. A valve, which is actuated by the latch, opens and closes the aperture. When the latch unlocks the box door, the valve opens the aperture. When the door is locked, the valve closes the aperture.

Abstract: An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The adaptor plate has a substantially circular outer circumference conforming substantially in size and shape to the outer circumference of a conventional 300 mm SMIF pod, and a central opening conforming substantially in size and shape to a conventional rectangular 200 mm SMIF pod. The one or more semiconductor wafers are supported on pod door of the pod, and the semiconductor wafers and pod door are lowered through the central opening in the adaptor plate into the wafer processing station. With the adaptor plate supported on the access port, and a cover of the 200 mm SMIF pod supported around the central opening, the access port is entirely covered and entry of contaminants into the processing station through the access port is prevented.

Abstract: A transportable, sealable container, for example a Standard Mechanical Interface (or SMIF) pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. A liner, preferably stainless steel, is attached to the inside surface of the box door. An elastomer sealing material is integrally molded to the liner. The sealing material forms a first seal with the first sealing surface and a second seal with the second sealing surface when the box door is moved in a sealing position with respect to the box.

Abstract: A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, mechanisms for transferring the cassette into a chamber which may be sealed and evacuated, and mechanisms for allowing transfer of wafers between the cassette and the various process chambers, wherein each of the mechanisms operates in an environment that is sealed against the external environment.

Abstract: A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

Abstract: A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

Abstract: A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for electrostatic discharge protection. A membrane for isolating the gasket from the interior region of the container is bonded to the gasket and the conductive liner. The membrane may be impervious to gasses to prevent outgassing of the gasket or impervious to particles but not gasses to prevent particulate matter generated by the gasket from entering the interior region of the container.

Abstract: A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

Abstract: A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door iself is purged prior to the purging of the environment within the container.

Abstract: A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Abstract: Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

Abstract: A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the first sealing surface when the box door is moved in a sealing direction with respect to the box. A latch mechanism provided in the box door is operable in two stages. The first stage of operation moves latch members from a retracted position to an extended position, in the retracted position the latch members are contained in the box door to allow movement of the box door with respect to the box, and in the extended position the latch members are adjacent to latch surfaces of the box. Movement from the retracted to the extended position is performed without contact between the latch members and the latch surfaces to avoid any scraping or rubbing action which would create particles in the "clean" interior region of the box.

Abstract: A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container.

Abstract: A polishing apparatus has a conventional carrier with a plurality of floating subcarriers. The benefits of single wafer polishing are achieved with the economies of multiple wafer polishing by adding the plurality of floating subcarriers to the conventional carrier. Each subcarrier has a single wafer adhered to its underside. Axial freedom is provided to duplicate the dynamics of single wafer polishing. The required axial freedom is obtained by axially loading each subcarrier via a mechanical spring or via pneumatic/hydraulic devices. In two variations, each subcarrier is also allowed auto-rotational freedom. In another two variations, the subcarriers are rotationally driven. In all variations, the wafers adhered to the floating subcarriers are substantially uniformly polished and the total indicated reading of the maximum deviation on the wafer surface is improved.

Abstract: An apparatus is provided for transporting a holder for holding articles between a port opening providing access to the system and a loading and unloading station, the apparatus comprising: a first platform for supporting the holder in the course of transport of the holder between the port opening and the station; an elevator for moving the first platform between the port opening and the station; and an assembly for rotatably moving the first platform between a first position in which the first platform is oriented substantially perpendicular to a vertical axis and a second position in which the first platform is inclined relative to the vertical axis; and wherein the assembly moves the first platform between the first and second positions while the elevator moves the first platform between the port opening and the station.

Abstract: The present invention provides an apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a cassette port for receiving the cassette when the cassette moves along a central axis extending from outside the processing station through the cassette port, and into the processing station, said apparatus comprising: a platform device including a cassette platform transportable substantially along the central axis for transferring the cassette to and from the container substantially along the central axis; a manipulator device including a first member extending substantially orthogonal to the central axis, the first member including a first portion and a second portion; a pivoting arm including a pivoting portion and a coupling portion, the pivoting portion mounted pivotally adjacent to the second portion of the first member, the pivoting arm operable to pivot about a pivot axis extending substantially through th

Abstract: The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior space for containing the articles. The box includes a box top and box base which supports the box top and includes a box door for opening and closing the container. The box door provide a region for supporting the articles in the interior space. A liner is insertable into the interior space and surrounds the region. The box door is retractable from the box space. The articles in the region are retractable with the box door.

Abstract: A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering fluids passing through the conduit. The box including a box top having sealing surfaces and a box door sealably mating with the box top. The port plate also includes sealing surfaces and is sealably mated to the box top. The port door includes a sealing surface and is sealably mated to the port plate. The box door includes a latch for mechanically opening and closing of the box and the port door includes a device for activating the latch.