Patents by Inventor Anthony Vacca

Anthony Vacca has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090324054
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: June 22, 2009
    Publication date: December 31, 2009
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Publication number: 20080133160
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: October 31, 2007
    Publication date: June 5, 2008
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Publication number: 20070140548
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: November 22, 2006
    Publication date: June 21, 2007
    Inventors: Anthony Vacca, Thomas Vavul, Donald Parker, Zain Saidin, Sterling Watson, James Wiley
  • Publication number: 20050140970
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: February 25, 2005
    Publication date: June 30, 2005
    Inventors: Anthony Vacca, Thomas Vavul, Donald Parker, Zain Saidin, Sterling Watson, James Wiley
  • Publication number: 20040096094
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: November 13, 2003
    Publication date: May 20, 2004
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Patent number: 6731787
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Grant
    Filed: April 30, 2002
    Date of Patent: May 4, 2004
    Assignee: KLA-Tencor Corporation
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Publication number: 20030138138
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: January 13, 2003
    Publication date: July 24, 2003
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Publication number: 20020126888
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Application
    Filed: February 11, 2002
    Publication date: September 12, 2002
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Patent number: 6381358
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: April 30, 2002
    Assignee: KLA-Tencor Corporation
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Patent number: 6076465
    Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.
    Type: Grant
    Filed: September 19, 1997
    Date of Patent: June 20, 2000
    Assignee: KLA-Tencor Corporation
    Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
  • Patent number: 5211565
    Abstract: The invention comprises a plurality of stacked planar processing circuit boards surrounded on at least one side by a plurality of memory boards located substantially perpendicular to the planar processing boards, the processing and memory boards connected by orthogonal interconnect modules. The orthogonal interconnect modules allow closely-spaced orthogonal connection of the processing boards to the memory boards. The memory boards are of a densely packed design having a plurality of removeable memory chip stacks located on the memory boards.
    Type: Grant
    Filed: March 19, 1992
    Date of Patent: May 18, 1993
    Assignee: Cray Research, Inc.
    Inventors: Nicholas J. Krajewski, Carl D. Breske, David J. Johnson, David R. Kiefer, Kent T. McDaniel, William T. Moore, Jr., Michael R. Edwards, Bricky A. Stephenson, Anthony A. Vacca
  • Patent number: 5167511
    Abstract: The invention comprises a plurality of stacked planar processing circuit boards surrounded on at least one side by a plurality of memory boards located substantially perpendicular to the planar processing boards, the processing and memory boards connected by orthogonal interconnect modules. The orthogonal interconnect modules allow closely-spaced orthogonal connection of the processing boards to the memory boards. The memory boards are of a densely packed design having a plurality of removeable memory chip stacks located on the memory boards.
    Type: Grant
    Filed: November 27, 1990
    Date of Patent: December 1, 1992
    Assignee: Cray Research, Inc.
    Inventors: Nicholas J. Krajewski, Carl D. Breske, David J. Johnson, David R. Kiefer, Kent T. McDaniel, William T. Moore, Jr., Michael R. Edwards, Bricky A. Stephenson, Anthony A. Vacca
  • Patent number: 4037270
    Abstract: A circuit board is provided with a plurality of groups of connectors, so disposed and arranged in respect to each other that each group is capable of receiving a chip carrier. A fluid conduit, carrying a coolant, extends through each group so that when the contacts of a chip carrier are assembled to a group of connectors, a circuit chip, having a heat dissipating bar, is in close contact with the conduit. Conductors on each chip make electrical contact to the contacts on the chip carrier. A clip fastener is fastened to the carrier and includes bias means to bias the chip so that electrical connection is established between the chip contacts and the carrier contacts and thermal connection is established between the heat dissipating bar and the conduit.
    Type: Grant
    Filed: May 24, 1976
    Date of Patent: July 19, 1977
    Assignee: Control Data Corporation
    Inventors: Gerald L. Ahmann, Douglas M. Carlson, Warren B. Marquardt, Richard E. Offerdahl, Roger A. Paulson, Anthony A. Vacca