Patents by Inventor Anthony Vacca
Anthony Vacca has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20090324054Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: June 22, 2009Publication date: December 31, 2009Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Publication number: 20080133160Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: October 31, 2007Publication date: June 5, 2008Inventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Publication number: 20070140548Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: November 22, 2006Publication date: June 21, 2007Inventors: Anthony Vacca, Thomas Vavul, Donald Parker, Zain Saidin, Sterling Watson, James Wiley
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Publication number: 20050140970Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: February 25, 2005Publication date: June 30, 2005Inventors: Anthony Vacca, Thomas Vavul, Donald Parker, Zain Saidin, Sterling Watson, James Wiley
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Publication number: 20040096094Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: November 13, 2003Publication date: May 20, 2004Applicant: KLA-TENCOR CORPORATIONInventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Patent number: 6731787Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: GrantFiled: April 30, 2002Date of Patent: May 4, 2004Assignee: KLA-Tencor CorporationInventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Publication number: 20030138138Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: January 13, 2003Publication date: July 24, 2003Applicant: KLA-TENCOR CORPORATIONInventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Publication number: 20020126888Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: February 11, 2002Publication date: September 12, 2002Applicant: KLA-TENCOR CORPORATIONInventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Patent number: 6381358Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: GrantFiled: April 27, 2000Date of Patent: April 30, 2002Assignee: KLA-Tencor CorporationInventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Patent number: 6076465Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: GrantFiled: September 19, 1997Date of Patent: June 20, 2000Assignee: KLA-Tencor CorporationInventors: Anthony Vacca, Thomas Vavul, Donald J. Parker, Zain Saidin, Sterling G. Watson, James N. Wiley
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Patent number: 5211565Abstract: The invention comprises a plurality of stacked planar processing circuit boards surrounded on at least one side by a plurality of memory boards located substantially perpendicular to the planar processing boards, the processing and memory boards connected by orthogonal interconnect modules. The orthogonal interconnect modules allow closely-spaced orthogonal connection of the processing boards to the memory boards. The memory boards are of a densely packed design having a plurality of removeable memory chip stacks located on the memory boards.Type: GrantFiled: March 19, 1992Date of Patent: May 18, 1993Assignee: Cray Research, Inc.Inventors: Nicholas J. Krajewski, Carl D. Breske, David J. Johnson, David R. Kiefer, Kent T. McDaniel, William T. Moore, Jr., Michael R. Edwards, Bricky A. Stephenson, Anthony A. Vacca
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Patent number: 5167511Abstract: The invention comprises a plurality of stacked planar processing circuit boards surrounded on at least one side by a plurality of memory boards located substantially perpendicular to the planar processing boards, the processing and memory boards connected by orthogonal interconnect modules. The orthogonal interconnect modules allow closely-spaced orthogonal connection of the processing boards to the memory boards. The memory boards are of a densely packed design having a plurality of removeable memory chip stacks located on the memory boards.Type: GrantFiled: November 27, 1990Date of Patent: December 1, 1992Assignee: Cray Research, Inc.Inventors: Nicholas J. Krajewski, Carl D. Breske, David J. Johnson, David R. Kiefer, Kent T. McDaniel, William T. Moore, Jr., Michael R. Edwards, Bricky A. Stephenson, Anthony A. Vacca
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Patent number: 4037270Abstract: A circuit board is provided with a plurality of groups of connectors, so disposed and arranged in respect to each other that each group is capable of receiving a chip carrier. A fluid conduit, carrying a coolant, extends through each group so that when the contacts of a chip carrier are assembled to a group of connectors, a circuit chip, having a heat dissipating bar, is in close contact with the conduit. Conductors on each chip make electrical contact to the contacts on the chip carrier. A clip fastener is fastened to the carrier and includes bias means to bias the chip so that electrical connection is established between the chip contacts and the carrier contacts and thermal connection is established between the heat dissipating bar and the conduit.Type: GrantFiled: May 24, 1976Date of Patent: July 19, 1977Assignee: Control Data CorporationInventors: Gerald L. Ahmann, Douglas M. Carlson, Warren B. Marquardt, Richard E. Offerdahl, Roger A. Paulson, Anthony A. Vacca