Abstract: An optical measuring device for a three-dimensional measuring of a hollow space formed within an object is provided. The optical measurement device has a light source, which is provided for emitting illumination light along an illumination beam path, and an optical deflection element, which spatially structures the radiated illumination light such that on an inside wall an illumination line forms, which extends along the longitudinal axis. The shape of the line is dependant on the size and shape of the hollow space. Further, the optical measuring device has a camera, which detects the illumination line via an imaging beam path at a triangulation angle. Through an appropriate evaluation of the image of the detected shape and size of the illumination line by the camera, the three-dimensional shape of the hollow space is determined.

Abstract: The invention describes an optical deflection element for the refractive production of a spatially structured bundle of light beams fanned concentrically to an optical axis of the deflection element. The optical deflection element has a base body made of optically transparent material, and has a light input and output side. The light input side is configured such that a primary bundle of light beams can be coupled in the base body. The light output side has a cylindrically symmetrical contour, which defines a recess in the base body. The fanning of the primary bundle of light beams is achieved by refraction on rotationally symmetric interfaces, which are variably inclined relative to the optical axis. The invention further relates to an optical measuring device for the three-dimensional measurement of a cavity in an object and a method for producing a concentrically fanned, spatially structured bundle of light beams.

Abstract: A confocal displacement sensor is created in which, through a graduated arrangement of optical outputs relative to an imaging optic in the object area of displacement sensor, real images of the optical outputs can be created at different heights. A surface to be measured, which is located in the area between the real images, at least partly scatters back illumination beams emitted by the optical outputs. As such, two measurement beams are created for which the intensities are each recorded by a light detector. This is done by interpolation between the measured light intensities. The height position of the scanned points of the surface can be calculated and the surface to be measured can be measured simultaneously at a number of scanning points. Two planar light sources are preferably used for light generation and two planar high-resolution cameras for light detection.

Abstract: An optical measuring device for measuring an inner wall of a cavity has a confocal proximity sensor. The beam path of the illumination light and the measuring light is deflected by a rotatably mounted reflector. By introducing an object-side end of the measuring device into the cavity a peripheral side wall of the cavity is measured. The reflector is rotated about an axis of rotation which coincides with the longitudinal axis of the optical measuring device. The inner wall is scanned along a line that revolves around the axis of rotation. The optical measuring device is equipped with two confocal proximity sensors. At the object-side end of the measuring device dual optics with a plurality of optical components are provided, by which the illumination beams of the two confocal proximity sensors are focused diametrically outwards at mutually opposing scanning points on the inner wall of the cavity.

Abstract: A sensor device is for performing rapid optical measurement of distances according to the confocal optical imaging principle in order to determine distance values and/or height values of a surface. The sensor device includes a point-shaped light-emitting element that is arranged on an optical axis, a reflector, which is arranged perpendicular to the optical axis and which can be displaced along the optical axis, imaging optics centered with regard to the optical axis, and a point-shaped light-receiving element that is situated at the same location as the light-emitting element.

Abstract: A confocal spacer switch for a fast, non-contacting determination of the spacing includes a point-shaped element that simultaneously transmits and receives light, imaging optics that form an image of the light-emitting element on a switching range and a light detection device that is coupled to the light-receiving element and emits a signal if an at least partially reflecting object enters the switching range and reflected light falls onto on the light-receiving element. The light-emitting and the light-receiving element preferably is realized with an optical waveguide end. As a result, the optical spacer switch can be divided into two modules that are connected via the optical waveguide, wherein a purely optical module can be realized in a compact and lightweight manner. A method for inserting components on substrates, uses the spacer switch, for which the insertion speed of the components is reduced immediately prior to inserting them.

Abstract: A sensor device is for performing rapid optical measurement of distances according to the confocal optical imaging principle in order to determine distance values and/or height values of a surface. The sensor device includes a point-shaped light-emitting element that is arranged on an optical axis, a reflector, which is arranged perpendicular to the optical axis and which can be displaced along the optical axis, imaging optics centered with regard to the optical axis, and a point-shaped light-receiving element that is situated at the same location as the light-emitting element.

Abstract: A confocal imaging system is equipped with a retroreflector, which oscillates with a high frequency, for increasing the data rate during the recording of distance values. A mirror system having a small mass is provided that, by use of an electrostatic drive, makes extremely rapid focusing movements or height detections possible in the case of a small mass. The mirror system includes two separate micromechanically produced mirrors, which are set at 90° to one another and which synchronously oscillate in the direction of the optical axis of the confocal imaging system.

Abstract: A sensor is for rapid optical distance measurement based on the confocal imaging principle. The sensor includes a light source, which emits an illuminating light with different spectral components, and an optical imaging system, through which the illuminating light is directed onto the surface of a measurement object. Different spectral components of the illuminating light are focused at different distances from the optical imaging system due to a chromatic aberration of the optical imaging system. Also provided are a beam splitter, arranged so that measuring light reflected back at least partially from the surface, is separated spatially from the beam path of the illuminating light. Further, a light receiver is included, which records the measuring light, separated spatially from the beam path of the illuminating light, with spectral resolution.

Abstract: The inventive confocal imaging system is equipped with a retroreflector, which oscillates with a high frequency, for increasing the data rate during the recording of distance values. A mirror system having a small mass is provided that, by means of an electrostatic drive, makes extremely rapid focussing movements or height detections possible in the case of a small mass. The mirror system is comprised of two separate micromechanically produced mirrors, which are set at 90° to one another and which synchronously oscillate in the direction of the optical axis of the confocal imaging system.

Abstract: A confocal displacement sensor is created in which, through a graduated arrangement of optical outputs relative to an imaging optic in the object area of displacement sensor, real images of the optical outputs can be created at different heights. A surface to be measured, which is located in the area between the real images, at least partly scatters back illumination beams emitted by the optical outputs. As such, two measurement beams are created for which the intensities are each recorded by a light detector. This is done by interpolation between the measured light intensities. The height position of the scanned points of the surface can be calculated and the surface to be measured can be measured simultaneously at a number of scanning points. Two planar light sources are preferably used for light generation and two planar high-resolution cameras for light detection.

Abstract: A confocal spacer switch for a fast, non-contacting determination of the spacing includes a point-shaped element that simultaneously transmits and receives light, imaging optics that form an image of the light-emitting element on a switching range and a light detection device that is coupled to the light-receiving element and emits a signal if an at least partially reflecting object enters the switching range and reflected light falls onto on the light-receiving element. The light-emitting and the light-receiving element preferably is realized with an optical waveguide end. As a result, the optical spacer switch can be divided into two modules that are connected via the optical waveguide, wherein a purely optical module can be realized in a compact and lightweight manner. A method for inserting components on substrates, uses the spacer switch, for which the insertion speed of the components is reduced immediately prior to inserting them.

Abstract: In addition to triangulation methods, measurement systems according to the confocal principle are employed for the three-dimensional sensing of surfaces. These measurement systems have a higher resolution but, under certain circumstances, a lower data rate. An optical proximity sensor is described which, on the basis of the confocal microscope, carries out automatic inspection of surfaces in a time which is acceptable for a fabrication process. A linear system of corresponding light sources and photo receivers is used instead of a scanning beam, which requires a high outlay for generation. The optical path length between the receiving unit and the optical imaging arrangement is varied for the resolution of height values, wherein a light intensity maximum is detected by a peak detector.

Abstract: A high resolution with at the same time high testing speed is required of scanning objectives for the linewise or pointwise three-dimensional scanning of object surfaces. In order to be able to image as many image points as possible with high resolution, the scanning objective must exhibit a correspondingly large numerical aperture with, at the same time, a large image field. For this purpose, it is constructed of three lens groups (1; 2; 3). The first and second lens groups (1; 2) effect both a scan angle reduction and a pupil enlargement. The entrance pupil (61) is imaged into the entrance pupil (63) of the third lens group (3). The third lens group (3) has a large numerical aperture of, for example, 0.6. Furthermore, the real intermediate image (5) is imaged by the second lens group (2) with positive refractive power and greater focal length (f) than the first lens group (1), at infinity. With a beam diameter (D) at the entrance of the scanning objective of 7.5 mm, a scan angle (.theta.) of +/-16.degree.

Abstract: In order to set up a height raster image for the inspection of complex units, for example of equipped printed circuit boards, optical distance sensors are employed. In this case, the known triangulation method or the likewise known confocal principle is employed. A sensor which permits a complete inspection in an acceptable time must cope with an appropriately high data rate. To this end, a distance sensor is described, which at the same time exhibits a high resolution and a low sensitivity in relation to secondary light reflexes.