Patents by Inventor Anup Bhalla

Anup Bhalla has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10896968
    Abstract: This invention discloses a semiconductor power device. The trenched semiconductor power device includes a trenched gate, opened from a top surface of a semiconductor substrate, surrounded by a source region encompassed in a body region near the top surface above a drain region disposed on a bottom surface of a substrate. The semiconductor power device further includes an implanting-ion block disposed above the top surface on a mesa area next to the body region having a thickness substantially larger than 0.3 micron for blocking body implanting ions and source ions from entering into the substrate under the mesa area whereby masks for manufacturing the semiconductor power device can be reduced.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: January 19, 2021
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Anup Bhalla, François Hébert, Sung-Shan Tai, Sik K. Lui
  • Publication number: 20210005517
    Abstract: Multiple wide bandgap semiconductor wafers, each having active circuitry and an epitaxially formed backside drain contact layer, may be constructed from a single bulk semiconductor substrate by: forming foundational layers on the top of the bulk substrate via epitaxy; forming active circuitry atop the foundational layers; laser treating the backside of the bulk substrate to create a cleave line in one of the foundational layers; and exfoliating a semiconductor wafer from the bulk substrate, where the exfoliated semiconductor wafer contains the active circuits and at least a portion of the foundational layers. Wafers containing the foundational layers without complete active devices may be produced in a similar manner. The foundational layers may comprise a drain contact layer and a drift layer, and may additionally include a buffer layer between the drain contact layer and the drift layer.
    Type: Application
    Filed: September 23, 2020
    Publication date: January 7, 2021
    Inventors: Anup Bhalla, Leonid Fursin
  • Patent number: 10825733
    Abstract: Multiple wide bandgap semiconductor wafers, each having active circuitry and an epitaxially formed backside drain contact layer, may be constructed from a single bulk semiconductor substrate by: forming foundational layers on the top of the bulk substrate via epitaxy; forming active circuitry atop the foundational layers; laser treating the backside of the bulk substrate to create a cleave line in one of the foundational layers; and exfoliating a semiconductor wafer from the bulk substrate, where the exfoliated semiconductor wafer contains the active circuits and at least a portion of the foundational layers. Wafers containing the foundational layers without complete active devices may be produced in a similar manner. The foundational layers may comprise a drain contact layer and a drift layer, and may additionally include a buffer layer between the drain contact layer and the drift layer.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: November 3, 2020
    Assignee: United Silicon Carbide, Inc.
    Inventors: Anup Bhalla, Leonid Fursin
  • Publication number: 20200303513
    Abstract: A lateral super junction JFET is formed from stacked alternating P type and N type semiconductor layers over a P-epi layer supported on an N+ substrate. An N+ drain column extends down through the super junction structure and the P-epi to connect to the N+ substrate to make the device a bottom drain device. N+ source column and P+ gate column extend through the super junction but stop at the P-epi layer. A gate-drain avalanche clamp diode is formed from the bottom the P+ gate column through the P-epi to the N+ drain substrate.
    Type: Application
    Filed: May 31, 2020
    Publication date: September 24, 2020
    Inventors: Madhur Bobde, Lingpeng Guan, Anup Bhalla, Hamza Yilmaz
  • Patent number: 10763351
    Abstract: Fabricating a semiconductor device comprises: forming a gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the gate trench; forming a body in the epitaxial layer; forming a source embedded in the body; forming a contact trench that extends through the source and at least part of the body; disposing an implant at least along a contact trench wall; and disposing an epitaxial enhancement portion below the contact trench and in contact with the implant.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: September 1, 2020
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Ji Pan, Anup Bhalla
  • Patent number: 10686062
    Abstract: This invention discloses an insulated gate bipolar transistor (IGBT) device formed in a semiconductor substrate. The IGBT device has a split-shielded trench gate that includes an upper gate segment and a lower shield segment. The IGBT device may further include a dummy trench filled with a dielectric layer disposed at a distance away from the split-shielded trench gate. The IGBT device further includes a body region extended between the split-shielded trench gate and the dummy trench encompassing a source region surrounding the split-shielded trench gate near a top surface of the semiconductor substrate. The IGBT device further includes a heavily doped N region disposed below the body region and above a source-dopant drift region above a bottom body-dopant collector region at a bottom surface of the semiconductor substrate. In an alternative embodiment, the IGBT may include a planar gate with a trench shield electrode.
    Type: Grant
    Filed: May 11, 2013
    Date of Patent: June 16, 2020
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Madhur Bobde, Anup Bhalla
  • Patent number: 10686035
    Abstract: This invention discloses a semiconductor power device disposed in a semiconductor substrate and the semiconductor substrate has a plurality of trenches. Each of the trenches is filled with a plurality of epitaxial layers of alternating conductivity types constituting nano tubes functioning as conducting channels stacked as layers extending along a sidewall direction with a “Gap Filler” layer filling a merging-gap between the nano tubes disposed substantially at a center of each of the trenches. The “Gap Filler” layer can be very lightly doped Silicon or grown and deposited dielectric layer. In an exemplary embodiment, the plurality of trenches are separated by pillar columns each having a width approximately half to one-third of a width of the trenches.
    Type: Grant
    Filed: October 9, 2018
    Date of Patent: June 16, 2020
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Hamza Yilmaz, Daniel Ng, Lingping Guan, Anup Bhalla, Wilson Ma, Moses Ho, John Chen
  • Patent number: 10680097
    Abstract: A semiconductor device, comprising: a substrate; an active gate trench in the substrate; a source polysilicon pickup trench in the substrate; a polysilicon electrode disposed in the source polysilicon pickup trench; a gate pickup trench in the substrate; a first conductive region and a second conductive region disposed in the gate pickup trench, the first conductive region and the second conductive region being separated by oxide, wherein at least a portion of the oxide surrounding the first conductive region in the gate pickup trench is thicker than at least a portion of the oxide under the second conductive region; and a body region in the substrate.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: June 9, 2020
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: John Chen, Il Kwan Lee, Hong Chang, Wenjun Li, Anup Bhalla, Hamza Yilmaz
  • Publication number: 20200135565
    Abstract: Multiple wide bandgap semiconductor wafers, each having active circuitry and an epitaxially formed backside drain contact layer, may be constructed from a single bulk semiconductor substrate by: forming foundational layers on the top of the bulk substrate via epitaxy; forming active circuitry atop the foundational layers; laser treating the backside of the bulk substrate to create a cleave line in one of the foundational layers; and exfoliating a semiconductor wafer from the bulk substrate, where the exfoliated semiconductor wafer contains the active circuits and at least a portion of the foundational layers. Wafers containing the foundational layers without complete active devices may be produced in a similar manner. The foundational layers may comprise a drain contact layer and a drift layer, and may additionally include a buffer layer between the drain contact layer and the drift layer.
    Type: Application
    Filed: October 25, 2018
    Publication date: April 30, 2020
    Inventors: Anup Bhalla, Leonid Fursin
  • Publication number: 20200119185
    Abstract: A semiconductor device formed on a semiconductor substrate includes: an epitaxial layer overlaying the semiconductor substrate; a drain formed on back of the semiconductor substrate; a drain region that extends into the epitaxial layer; an active region comprising: a body disposed in the epitaxial layer; a source embedded in the body; a gate trench extending into the epitaxial layer; a gate disposed in the gate trench; an active region contact trench extending through the source and the body; and an active region contact electrode disposed within the active region contact trench; and an island region under the active region contact trench and disconnected from the body, the island region having an opposite polarity as the epitaxial layer; wherein the active region contact trench has a non-uniform depth.
    Type: Application
    Filed: December 5, 2019
    Publication date: April 16, 2020
    Inventors: Anup Bhalla, Xiaobin Wang, Ji Pan, Sung-Po Wei
  • Patent number: 10593759
    Abstract: Semiconductor devices includes a thin epitaxial layer (nanotube) formed on sidewalls of mesas formed in a semiconductor layer. In one embodiment, a semiconductor device includes a first epitaxial layer and a second epitaxial layer formed on mesas of the semiconductor layer. The thicknesses and doping concentrations of the first and second epitaxial layers and the mesa are selected to achieve charge balance in operation. In another embodiment, the semiconductor body is lightly doped and the thicknesses and doping concentrations of the first and second epitaxial layers are selected to achieve charge balance in operation.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: March 17, 2020
    Assignee: Alpha & Omega Semiconductor, Inc.
    Inventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
  • Patent number: 10573762
    Abstract: A nitride-based Schottky diode includes a nitride-based semiconductor body, a first metal layer forming the anode electrode, a cathode electrode in electrical contact with the nitride-based semiconductor body, and a termination structure including a guard ring and a dielectric field plate. In one embodiment, the cathode electrode is formed on the front side of the nitride-based semiconductor body, in an area away from the anode electrode and the termination structure. In another embodiment, the dielectric field plate includes a first dielectric layer and a recessed second dielectric layer. In another embodiment, the dielectric field plate and the nitride-based epitaxial layer are formed with a slant profile at a side facing the Schottky junction of the Schottky diode. In another embodiment, the dielectric field plate is formed on a top surface of the nitride-based epitaxial layer and recessed from an end of the nitride-based epitaxial layer near the Schottky junction.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: February 25, 2020
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: TingGang Zhu, Anup Bhalla, Ping Huang, Yueh-Se Ho
  • Patent number: 10535764
    Abstract: Fabricating a semiconductor device includes: forming a first gate trench and a second gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the first gate trench to form a first gate and depositing gate material in the second gate trench to form a second gate; forming a body; forming a source; forming an active region contact trench that extends through the source and the body, and a gate contact trench within the second gate; forming an island region under the active region contact trench and disconnected from the body, the island region having an opposite polarity as the epitaxial layer; and disposing a first electrode within the active region contact trench and a second electrode within the gate contact trench.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: January 14, 2020
    Assignee: Alpha and Omega Semiconductor Limited
    Inventors: Anup Bhalla, Xiaobin Wang, Ji Pan, Sung-Po Wei
  • Patent number: 10522666
    Abstract: A method for fabricating an anode-shorted field stop insulated gate bipolar transistor (IGBT) comprises selectively forming first and second semiconductor implant regions of opposite conductivity types. A field stop layer of a second conductivity type can be grown onto or implanted into the substrate. An epitaxial layer can be grown on the substrate or on the field stop layer. One or more insulated gate bipolar transistors (IGBT) component cells are formed within the epitaxial layer.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: December 31, 2019
    Assignee: ALPHA AND OMEGA SEMICONDUCTOR INCORPORATED
    Inventors: Anup Bhalla, Madhur Bobde, Yongping Ding, Xiaotian Zhang, Yueh-Se Ho
  • Patent number: 10468526
    Abstract: This invention discloses a semiconductor power device disposed in a semiconductor substrate. The semiconductor power device includes trenched gates each having a stick-up gate segment extended above a top surface of the semiconductor substrate surrounded by sidewall spacers. The semiconductor power device further includes slots opened aligned with the sidewall spacers substantially parallel to the trenched gates. The stick-up gate segment further includes a cap composed of an insulation material surrounded by the sidewall spacers. A layer of barrier metal covers a top surface of the cap and over the sidewall spacers and extends above a top surface of the slots. The slots are filled with a gate material same as the gate segment for functioning as additional gate electrodes for providing a depletion layer extends toward the trenched gates whereby a drift region between the slots and the trenched gate is fully depleted at a gate-to-drain voltage Vgs=0 volt.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: November 5, 2019
    Assignee: Alpha and Omega Semiconductor, Inc.
    Inventors: François Hébert, Madhur Bobde, Anup Bhalla
  • Publication number: 20190333994
    Abstract: Semiconductor devices includes a thin epitaxial layer (nanotube) formed on sidewalls of mesas formed in a semiconductor layer. In one embodiment, a semiconductor device includes a first epitaxial layer and a second epitaxial layer formed on mesas of the semiconductor layer. The thicknesses and doping concentrations of the first and second epitaxial layers and the mesa are selected to achieve charge balance in operation. In another embodiment, the semiconductor body is lightly doped and the thicknesses and doping concentrations of the first and second epitaxial layers are selected to achieve charge balance in operation.
    Type: Application
    Filed: July 12, 2019
    Publication date: October 31, 2019
    Inventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
  • Patent number: 10446695
    Abstract: A JFET having vertical and horizontal channel elements may be made from a semiconductor material such as silicon carbide using a first mask for multiple implantations to form a horizontal planar JFET region comprising a lower gate, a horizontal channel, and an upper gate, all above a drift region resting on a drain substrate region, such that the gates and horizontal channel are self-aligned with the same outer size and outer shape in plan view. A second mask may be used to create a vertical channel region abutting the horizontal channel region. The horizontal channel and vertical channel may each have multiple layers with varying doping concentrations. Angled implantations may use through the first mask to implant portions of the vertical channel regions. The window of the second mask may partially overlap the horizontal JFET region to insure abutment of the vertical and horizontal channel regions.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: October 15, 2019
    Assignee: United Silicone Carbide, Inc.
    Inventors: Anup Bhalla, Zhongda Li
  • Patent number: 10439058
    Abstract: A heterostructure field effect transistor (HFET) gallium nitride (GaN) semiconductor power device comprises a hetero junction structure comprises a first semiconductor layer interfacing a second semiconductor layer of two different band gaps thus generating an interface layer as a two-dimensional electron gas (2DEG) layer. The power device further comprises a source electrode and a drain electrode disposed on two opposite sides of a gate electrode disposed on top of the hetero junction structure for controlling a current flow between the source and drain electrodes in the 2DEG layer.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: October 8, 2019
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Anup Bhalla, Tinggang Zhu
  • Publication number: 20190296157
    Abstract: A nitride-based Schottky diode includes a nitride-based semiconductor body, a first metal layer forming the anode electrode, a cathode electrode in electrical contact with the nitride-based semiconductor body, and a termination structure including a guard ring and a dielectric field plate. In one embodiment, the cathode electrode is formed on the front side of the nitride-based semiconductor body, in an area away from the anode electrode and the termination structure. In another embodiment, the dielectric field plate includes a first dielectric layer and a recessed second dielectric layer. In another embodiment, the dielectric field plate and the nitride-based epitaxial layer are formed with a slant profile at a side facing the Schottky junction of the Schottky diode. In another embodiment, the dielectric field plate is formed on a top surface of the nitride-based epitaxial layer and recessed from an end of the nitride-based epitaxial layer near the Schottky junction.
    Type: Application
    Filed: April 29, 2019
    Publication date: September 26, 2019
    Inventors: TingGang Zhu, Anup Bhalla, Ping Huang, Yueh-Se Ho
  • Patent number: 10396215
    Abstract: Trench JFETs may be created by etching trenches into the topside of a substrate of a first doping type to form mesas. The substrate is made up of a backside drain layer, a middle drift layer, and topside source layer. The etching goes through the source layer and partly into the drift layer. Gate regions are formed on the sides and bottoms of the trenches using doping of a second type. Vertical channel regions are formed behind the vertical gate segments via angled implantation using a doping of the first kind, providing improved threshold voltage control. Optionally the substrate may include a lightly doped channel layer between the drift and source layers, such that the mesas include a lightly doped channel region that more strongly contrasts with the implanted vertical channel regions.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: August 27, 2019
    Assignee: United Silicon Carbide, Inc.
    Inventors: Anup Bhalla, Peter Alexandrov