Patents by Inventor Armin Tilke

Armin Tilke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160307884
    Abstract: A semiconductor device comprises a semiconductor body having a first surface and a second surface opposite to the first surface. The semiconductor device further comprises a first isolation layer on the first surface of the semiconductor body, and an electrostatic discharge protection structure on the first isolation layer. The electrostatic discharge protection structure includes a first terminal and a second terminal. The semiconductor device further comprises a heat dissipation structure having a first end in direct contact with the electrostatic discharge protection structure and a second end in direct contact with an electrically isolating region.
    Type: Application
    Filed: April 14, 2016
    Publication date: October 20, 2016
    Inventors: Joachim Weyers, Markus Schmitt, Armin Tilke
  • Publication number: 20160190277
    Abstract: According to various embodiments, a bipolar transistor structure may include: a substrate; a collector region in the substrate; a base region disposed over the collector region, an emitter region disposed over the base region; a base terminal laterally electrically contacting the base region, wherein the base terminal includes polysilicon.
    Type: Application
    Filed: March 8, 2016
    Publication date: June 30, 2016
    Inventors: Dmitri Alex Tschumakow, Claus Dahl, Armin Tilke
  • Patent number: 9312369
    Abstract: According to various embodiments, a bipolar transistor structure may include: a substrate; a collector region in the substrate; a base region disposed over the collector region, an emitter region disposed over the base region; a base terminal laterally electrically contacting the base region, wherein the base terminal includes polysilicon.
    Type: Grant
    Filed: June 4, 2014
    Date of Patent: April 12, 2016
    Assignee: INFINEON TECHNOLOGIES DRESDEN GMBH
    Inventors: Dmitri Alex Tschumakow, Claus Dahl, Armin Tilke
  • Publication number: 20160093722
    Abstract: A bipolar transistor comprises a semiconductor body including a collector region and a base region arranged on top of the collector region. The base region has a first crystalline structure and is at least partly doped with dopants of a first doping type. The collector region is laterally enclosed by a trench isolation and is doped with dopants of a second doping type. The transistor further comprises a conductive base contact layer laterally enclosing the base region which is doped with dopants of the first doping type. The base contact layer comprises a part with the first crystalline structure and a part with a second crystalline structure, wherein the part with the second crystalline structure laterally encloses the part with the first crystalline structure. The transistor further comprises an emitter region arranged on the base region.
    Type: Application
    Filed: September 21, 2015
    Publication date: March 31, 2016
    Inventors: Armin Tilke, Claus Dahl, Dmitri A. Tschumakow
  • Publication number: 20150357446
    Abstract: According to various embodiments, a bipolar transistor structure may include: a substrate; a collector region in the substrate; a base region disposed over the collector region, an emitter region disposed over the base region; a base terminal laterally electrically contacting the base region, wherein the base terminal includes polysilicon.
    Type: Application
    Filed: June 4, 2014
    Publication date: December 10, 2015
    Applicant: Infineon Technologies Dresden GmbH
    Inventors: Dmitri Alex Tschumakow, Claus Dahl, Armin Tilke
  • Publication number: 20150294966
    Abstract: A semiconductor device comprises a semiconductor body having a first surface and a second surface opposite to the first surface. The semiconductor device further includes a first isolation layer on the first surface of the semiconductor body and a first electrostatic discharge protection structure on the first isolation layer. The first electrostatic discharge protection structure has a first terminal and a second terminal. A second isolation layer is provided on the electrostatic discharge protection structure. A gate contact area on the second isolation layer is electrically coupled to the first terminal of the first electrostatic discharge protection structure. An electric contact structure is arranged in an overlap area between the gate contact area and the semiconductor body. The electric contact structure is electrically coupled to the second terminal of the first electrostatic discharge protection structure and electrically isolated from the gate contact area.
    Type: Application
    Filed: April 14, 2014
    Publication date: October 15, 2015
    Inventors: Joachim Weyers, Franz Hirler, Anton Mauder, Markus Schmitt, Armin Tilke, Thomas Bertrams
  • Patent number: 9041084
    Abstract: Embodiments relate to a method of forming a memory array, comprising: forming a collector layer; forming a plurality of collector regions in the collector layer; forming a plurality of base regions over the collector region; forming a plurality of emitter regions over the base regions; forming a plurality of memory elements over the emitter regions, wherein the collector regions, base regions and emitter regions form heterojunction bipolar transistors.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: May 26, 2015
    Assignee: Infineon Technologies AG
    Inventor: Armin Tilke
  • Publication number: 20150137309
    Abstract: Methods of fabricating isolation regions of semiconductor devices and structures thereof are disclosed. In a preferred embodiment, a semiconductor device includes a workpiece and at least one trench formed in the workpiece. The at least one trench includes sidewalls, a bottom surface, a lower portion, and an upper portion. A first liner is disposed over the sidewalls and the bottom surface of the at least one trench. A second liner is disposed over the first liner in the lower portion of the at least one trench. A first insulating material is disposed over the second liner in the lower portion of the at least one trench. A second insulating material is disposed over the first insulating material in the upper portion of the at least one trench. The first liner, the second liner, the first insulating material, and the second insulating material comprise an isolation region of the semiconductor device.
    Type: Application
    Filed: December 3, 2014
    Publication date: May 21, 2015
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Armin Tilke, Marcus Culmsee, Chris Stapelmann, Bee Kim Hong, Roland Hampp
  • Patent number: 8936995
    Abstract: Methods of fabricating isolation regions of semiconductor devices and structures thereof are disclosed. In a preferred embodiment, a semiconductor device includes a workpiece and at least one trench formed in the workpiece. The at least one trench includes sidewalls, a bottom surface, a lower portion, and an upper portion. A first liner is disposed over the sidewalls and the bottom surface of the at least one trench. A second liner is disposed over the first liner in the lower portion of the at least one trench. A first insulating material is disposed over the second liner in the lower portion of the at least one trench. A second insulating material is disposed over the first insulating material in the upper portion of the at least one trench. The first liner, the second liner, the first insulating material, and the second insulating material comprise an isolation region of the semiconductor device.
    Type: Grant
    Filed: March 1, 2006
    Date of Patent: January 20, 2015
    Assignee: Infineon Technologies AG
    Inventors: Armin Tilke, Marcus Culmsee, Chris Stapelmann, Bee Kim Hong, Roland Hampp
  • Patent number: 8916453
    Abstract: A semiconductor wafer includes a first main face and a second main face opposite to the first main face and a number of semiconductor chip regions. The wafer is diced along dicing streets to separate the semiconductor chip regions from each other. At least one metal layer is formed on the first main face of each one of the semiconductor chip regions.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: December 23, 2014
    Assignee: Infineon Technologies AG
    Inventors: Gopalakrishnan Trichy Rengarajan, Armin Tilke
  • Publication number: 20140154857
    Abstract: Embodiments relate to a method of forming a memory array,comprising: forming a collector layer; forming a plurality of collector regions in the collector layer; forming a plurality of base regions over the collector region; forming a plurality of emitter regions over the base regions; forming a plurality of memory elements over the emitter regions, wherein the collector regions, base regions and emitter regions form heterojunction bipolar transistors.
    Type: Application
    Filed: June 24, 2013
    Publication date: June 5, 2014
    Inventor: Armin TILKE
  • Publication number: 20140138813
    Abstract: A semiconductor wafer includes a first main face and a second main face opposite to the first main face and a number of semiconductor chip regions. The wafer is diced along dicing streets to separate the semiconductor chip regions from each other. At least one metal layer is formed on the first main face of each one of the semiconductor chip regions.
    Type: Application
    Filed: November 21, 2012
    Publication date: May 22, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Gopalakrishnan Trichy Rengarajan, Armin Tilke
  • Publication number: 20130320401
    Abstract: A method of making a semiconductor device begins with a semiconductor wafer that includes a first semiconductor layer overlying a second semiconductor layer. A first trench is etched in the semiconductor wafer. The first trench is filled with insulating material. A second trench is etched within the first trench and through the insulating material, such that insulating material remains along sidewalls of the first trench. The second trench exposes a portion of the second insulating layer. A semiconductor layer can then be grown within the second trench using the second semiconductor layer as a seed layer.
    Type: Application
    Filed: August 8, 2013
    Publication date: December 5, 2013
    Applicant: Infineon Technologies AG
    Inventors: Jiang Yan, Danny Pak-Chum Shum, Armin Tilke
  • Patent number: 8530355
    Abstract: A method of making a semiconductor device begins with a semiconductor wafer that includes a first semiconductor layer overlying a second semiconductor layer. A first trench is etched in the semiconductor wafer. The first trench is filled with insulating material. A second trench is etched within the first trench and through the insulating material, such that insulating material remains along sidewalls of the first trench. The second trench exposes a portion of the second insulating layer. A semiconductor layer can then be grown within the second trench using the second semiconductor layer as a seed layer.
    Type: Grant
    Filed: December 23, 2005
    Date of Patent: September 10, 2013
    Assignee: Infineon Technologies AG
    Inventors: Jiang Yan, Danny Pak-Chum Shum, Armin Tilke
  • Patent number: 8501632
    Abstract: Methods of fabricating isolation regions of semiconductor devices and structures thereof are disclosed. A preferred embodiment includes forming at least one trench in a workpiece, and forming a thin nitride liner over sidewalls and a bottom surface of the at least one trench and over a top surface of the workpiece using atomic layer deposition (ALD). An insulating material is deposited over the top surface of the workpiece, filling the at least one trench. At least a portion of the insulating material is removed from over the top surface of the workpiece. After removing the at least a portion of insulating material from over the top surface of the workpiece, the thin nitride liner in the at least one trench is at least coplanar with the top surface of the workpiece. The thin nitride liner and the insulating material form an isolation region of the semiconductor device.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: August 6, 2013
    Assignee: Infineon Technologies AG
    Inventors: Chris Stapelmann, Armin Tilke
  • Patent number: 8476686
    Abstract: An embodiment relates to a memory cell comprising a programmable resistance memory element electrically coupled to a heterojunction bipolar transistor.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: July 2, 2013
    Assignee: Infineon Technologies AG
    Inventor: Armin Tilke
  • Patent number: 8319285
    Abstract: A silicon-on-insulator device having multiple crystal orientations is disclosed. In one embodiment, the silicon-on-insulator device includes a substrate layer, an insulating layer disposed on the substrate layer, a first silicon layer, and a strained silicon layer. The first silicon layer has a first crystal orientation and is disposed on a portion of the insulating layer, and the strained silicon layer is disposed on another portion of the insulating layer and has a crystal orientation different from the first crystal orientation.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: November 27, 2012
    Assignee: Infineon Technologies AG
    Inventors: Armin Tilke, Jiang Yan, Matthias Hierlemann
  • Patent number: 8258028
    Abstract: Deep trench isolation structures and methods of formation thereof are disclosed. Several methods of and structures for increasing the threshold voltage of a parasitic transistor formed proximate deep trench isolation structures are described, including implanting a channel stop region into the bottom surface of the deep trench isolation structures, partially filling a bottom portion of the deep trench isolation structures with an insulating material, and/or filling at least a portion of the deep trench isolation structures with a doped polysilicon material.
    Type: Grant
    Filed: February 9, 2010
    Date of Patent: September 4, 2012
    Assignee: Infineon Technologies AG
    Inventors: Armin Tilke, Danny Pak-Chum Shum, Laura Pescini, Ronald Kakoschke, Karl Robert Strenz, Martin Stiftinger
  • Patent number: 8115279
    Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a semiconductor device includes a workpiece having a buried layer disposed beneath a top portion of the workpiece. An isolation ring structure is disposed within the top portion of the workpiece extending completely through at least a portion of the buried layer, the isolation ring structure comprising a ring having an interior region. A diffusion confining structure is disposed within the interior region of the isolation ring structure. A conductive region is disposed within the top portion of the workpiece within a portion of the interior of the isolation ring structure, the conductive region comprising at least one dopant element implanted and diffused into the top portion of the workpiece. The diffusion confining structure defines at least one edge of the conductive region, and the conductive region is coupled to the buried layer.
    Type: Grant
    Filed: April 28, 2010
    Date of Patent: February 14, 2012
    Assignee: Infineon Technologies AG
    Inventors: Armin Tilke, Cajetan Wagner, Lincoln O'Riain
  • Patent number: 8031532
    Abstract: Flash memory device structures and methods of manufacture thereof are disclosed. The flash memory devices are manufactured on silicon-on-insulator (SOI) substrates. Shallow trench isolation (STI) regions and the buried oxide layer of the SOI substrate are used to isolate adjacent devices from one another. The methods of manufacture require fewer lithography masks and may be implemented in stand-alone flash memory devices, embedded flash memory devices, and system on a chip (SoC) flash memory devices.
    Type: Grant
    Filed: February 22, 2010
    Date of Patent: October 4, 2011
    Assignee: Infineon Technologies AG
    Inventors: Danny Pak-Chum Shum, Armin Tilke, Jiang Yan