Patents by Inventor Arnaud Tournier

Arnaud Tournier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11923465
    Abstract: The present disclosure concerns a photodiode including at least one memory area, each memory area including at least two charge storage regions.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: March 5, 2024
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Arnaud Tournier, Boris Rodrigues Goncalves, Frederic Lalanne
  • Publication number: 20220320359
    Abstract: An electronic device is provided that includes a photodiode. The photodiode includes a semiconductor region coupled to a node of application of a first voltage, and at least one semiconductor wall. The at least one semiconductor wall extends along at least a height of the photodiode and partially surrounds the semiconductor region.
    Type: Application
    Filed: June 23, 2022
    Publication date: October 6, 2022
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Arnaud TOURNIER, Boris RODRIGUES GONCALVES, Francois ROY
  • Patent number: 11417789
    Abstract: An electronic device is provided that includes a photodiode. The photodiode includes a semiconductor region coupled to a node of application of a first voltage, and at least one semiconductor wall. The at least one semiconductor wall extends along at least a height of the photodiode and partially surrounds the semiconductor region.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: August 16, 2022
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Arnaud Tournier, Boris Rodrigues Goncalves, Francois Roy
  • Patent number: 11107938
    Abstract: A photodiode include a first substrate layer of a first dopant type and a second substrate layer of a second dopant type on top of the first substrate layer. Semiconductor walls are provided in a semiconductor substrate which includes the first and second substrate layers. The semiconductor walls include: two outer semiconductor walls and at least one inside semiconductor wall positioned between the two outer semiconductor walls. Each inside semiconductor wall is located between two semiconductor walls having longer length.
    Type: Grant
    Filed: February 13, 2020
    Date of Patent: August 31, 2021
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Boris Rodrigues Goncalves, Arnaud Tournier
  • Publication number: 20210193849
    Abstract: The present disclosure concerns a photodiode including at least one memory area, each memory area including at least two charge storage regions.
    Type: Application
    Filed: December 17, 2020
    Publication date: June 24, 2021
    Inventors: Arnaud TOURNIER, Boris RODRIGUES GONCALVES, Frederic LALANNE, Pascal FONTENEAU
  • Publication number: 20200313023
    Abstract: An electronic device is provided that includes a photodiode. The photodiode includes a semiconductor region coupled to a node of application of a first voltage, and at least one semiconductor wall. The at least one semiconductor wall extends along at least a height of the photodiode and partially surrounds the semiconductor region.
    Type: Application
    Filed: March 20, 2020
    Publication date: October 1, 2020
    Inventors: Arnaud TOURNIER, Boris RODRIGUES GONCALVES, Francois ROY
  • Publication number: 20200266310
    Abstract: A photodiode include a first substrate layer of a first dopant type and a second substrate layer of a second dopant type on top of the first substrate layer. Semiconductor walls are provided in a semiconductor substrate which includes the first and second substrate layers. The semiconductor walls include: two outer semiconductor walls and at least one inside semiconductor wall positioned between the two outer semiconductor walls. Each inside semiconductor wall is located between two semiconductor walls having longer length.
    Type: Application
    Filed: February 13, 2020
    Publication date: August 20, 2020
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Boris RODRIGUES GONCALVES, Arnaud TOURNIER
  • Patent number: 9087872
    Abstract: A structure comprising at least one DTI-type insulating trench in a substrate, the trench being at the periphery of at least one active area of the substrate forming a pixel, the insulating trench including a cavity filled with a dielectric material, the internal walls of the cavity being covered with a layer made of a boron-doped material.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: July 21, 2015
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Laurent Favennec, Arnaud Tournier, François Roy
  • Patent number: 8828882
    Abstract: A trench is formed in a semiconductor substrate by depositing an etch mask on the substrate having an opening, etching of the trench through the opening, and doping the walls of the trench. The etching step includes a first phase having an etch power set to etch the substrate under the etch mask, and a second phase having an etch power set smaller than the power of the first phase. Further, the doping of the walls of the trench is applied through the opening of the etch mask.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: September 9, 2014
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Arnaud Tournier, Françcois Leverd
  • Patent number: 8796148
    Abstract: A method for producing a deep trench in a substrate includes a series of elementary etch cycles each etching a portion of the trench. Each elementary cycle includes deposition of a passivation layer on the sidewalls and the bottom of the trench portion etched during previous cycles; followed by pulsed plasma anisotropic ion etching of the trench portion etched during previous cycles, the etching; being implemented in an atmosphere comprising a passivating species; and including a first etch sequence followed by a second etch sequence of less power than the power of the first etch sequence. The first etch sequence etches the passivation layer deposited in the bottom of the portion so as to access the substrate and etches the free substrate at the bottom of the portion while leaving a passivation layer on sidewalls of the portion.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: August 5, 2014
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: François Leverd, Laurent Favennec, Arnaud Tournier
  • Patent number: 8754456
    Abstract: An image sensor including at least one photodiode and at least one transistor formed in and on a silicon substrate, the assembly of the photodiode and of the transistor being surrounded with a heavily-doped insulating wall, wherein the silicon substrate has a crystal orientation (110).
    Type: Grant
    Filed: August 3, 2009
    Date of Patent: June 17, 2014
    Assignees: STMicroelectronics (Crolles 2) SAS, STMicrolectronics SA
    Inventors: François Roy, Arnaud Tournier
  • Publication number: 20140145251
    Abstract: A structure comprising at least one DTI-type insulating trench in a substrate, the trench being at the periphery of at least one active area of the substrate forming a pixel, the insulating trench including a cavity filled with a dielectric material, the internal walls of the cavity being covered with a layer made of a boron-doped material.
    Type: Application
    Filed: January 30, 2014
    Publication date: May 29, 2014
    Applicant: STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Laurent Favennec, Arnaud Tournier, François Roy
  • Publication number: 20130052829
    Abstract: A method for producing a deep trench in a substrate includes a series of elementary etch cycles each etching a portion of the trench. Each elementary cycle includes deposition of a passivation layer on the sidewalls and the bottom of the trench portion etched during previous cycles; followed by pulsed plasma anisotropic ion etching of the trench portion etched during previous cycles, the etching; being implemented in an atmosphere comprising a passivating species; and including a first etch sequence followed by a second etch sequence of less power than the power of the first etch sequence. The first etch sequence etches the passivation layer deposited in the bottom of the portion so as to access the substrate and etches the free substrate at the bottom of the portion while leaving a passivation layer on sidewalls of the portion.
    Type: Application
    Filed: August 30, 2012
    Publication date: February 28, 2013
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Francois Leverd, Laurent Favennec, Arnaud Tournier
  • Publication number: 20130026546
    Abstract: An integrated circuit including at least one isolating trench that delimits an active area made of a monocrystalline semiconductor material, the or each trench including an upper portion including an insulating layer that encapsulates a lower portion of the trench, the lower portion being at least partly buried in the active area and the encapsulation layer including nitrogen or carbon.
    Type: Application
    Filed: July 27, 2012
    Publication date: January 31, 2013
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Laurent Favennec, Arnaud Tournier, François Roy
  • Patent number: 7875915
    Abstract: An integrated circuit includes at least one photodiode associated with a read transistor. The photodiode is formed from a stack of three semiconductor layers comprising a buried layer, an floating substrate layer and an upper layer. The drain region and/or the source region of the transistor are incorporated within the upper layer. The buried layer is electrically isolated from the upper layer so as to allow the buried layer to be biased independently of the upper layer.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: January 25, 2011
    Assignee: STMicroelectronics S.A.
    Inventors: François Roy, Arnaud Tournier
  • Patent number: 7777168
    Abstract: A pixel is formed in a semiconductor substrate of a first doping type, a first layer of the second doping type covering the substrate, a second layer of the first doping type covering the first layer. A MOS-type transistor is formed in the second layer and has a drain area and a source area of the second doping type. The pixel includes a first area of the second doping type, more heavily doped than the first layer, crossing the second layer and extending into the first layer and connected to the drain area. The pixel further includes a second area of the first doping type, more heavily doped than the second layer and bordering the source area.
    Type: Grant
    Filed: December 28, 2007
    Date of Patent: August 17, 2010
    Assignee: STMicroelectronics, SA
    Inventors: Arnaud Tournier, Francois Roy
  • Patent number: 7777289
    Abstract: An integrated circuit includes at least one photodiode of the floating substrate type which is associated with a read transistor. The photodiode is formed from a buried layer lying beneath the floating substrate and an upper layer lying on the floating substrate. The upper layer incorporates the source and drain regions of the read transistor. The source and drain regions are produced on either side of the gate of the read transistor. An isolating trench is located alongside the source region and extends from the upper surface of the upper layer down to below the buried layer, so as to isolate the source region from said buried layer.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: August 17, 2010
    Assignee: STMicroelectronics S.A.
    Inventors: François Roy, Arnaud Tournier
  • Publication number: 20100032734
    Abstract: An image sensor including at least one photodiode and at least one transistor formed in and on a silicon substrate, the assembly of the photodiode and of the transistor being surrounded with a heavily-doped insulating wall, wherein the silicon substrate has a crystal orientation (110).
    Type: Application
    Filed: August 3, 2009
    Publication date: February 11, 2010
    Applicants: STMICROELECTRONICS (CROLLES 2) SAS, STMICROELECTRONICS S.A.
    Inventors: François ROY, ARNAUD TOURNIER
  • Patent number: 7642579
    Abstract: A pixel having a MOS-type transistor formed in and above a semiconductor substrate of a first doping type, a buried semiconductor layer of a second doping type being placed in the substrate under the MOS transistor and separated therefrom by a substrate portion forming a well. The buried semiconductor layer comprises a thin portion forming a pinch area placed under the transistor channel area and a thick portion placed under all or part of the source/drain areas of the transistor.
    Type: Grant
    Filed: March 5, 2007
    Date of Patent: January 5, 2010
    Assignee: STMicroelectronics S.A.
    Inventors: Arnaud Tournier, François Roy
  • Publication number: 20080179494
    Abstract: A pixel is formed in a semiconductor substrate of a first doping type, a first layer of the second doping type covering the substrate, a second layer of the first doping type covering the first layer. A MOS-type transistor is formed in the second layer and has a drain area and a source area of the second doping type. The pixel includes a first area of the second doping type, more heavily doped than the first layer, crossing the second layer and extending into the first layer and connected to the drain area. The pixel further includes a second area of the first doping type, more heavily doped than the second layer and bordering the source area.
    Type: Application
    Filed: December 28, 2007
    Publication date: July 31, 2008
    Applicant: STMicroelectronics SA
    Inventors: Arnaud Tournier, Francois Roy