Patents by Inventor Artur Högele

Artur Högele has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
    Publication number: 20100128367
    Abstract: A projection objective for a microlithography apparatus with improved imaging properties is provided. A manipulator for a projection objective is provided. A microlithography apparatus including a projection objective of this type and/or a manipulator of this type is provided. A method for improving the imaging properties of a projection objective is provided.
    Type: Application
    Filed: March 13, 2009
    Publication date: May 27, 2010
    Applicant: CARL ZEISS SMT AG
    Inventors: Mariella Beckenbach, Klaus Rief, Andreas Bertele, Benjamin Sigel, Sascha Bleidistel, Wolfgang Hummel, Andreas Frommeyer, Toralf Gruner, Jochen Schwaer, Baerbel Schwaer, Thomas Schletterer, Artur Hoegele, Armin Schoeppach