Abstract: A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The substrates are secured relative to one another to form the spectrally tunable optical detector.

Abstract: A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The substrates are secured relative to one another to form the spectrally tunable optical detector.

Abstract: An analyzer for depicting a characteristic of a fluid with the alignment and nonalignment of transmission peaks of a light source and absorption lines of the fluid. A radiation source may emit light through broad band and narrow band filters, respectively. An output the narrow band filter having transmission peaks goes through a cell having the fluid to be examined. The fluid has absorption lines. The optical path of the narrow band filter varies so as to affect the alignment of the transmission peaks and the absorption lines which results in different magnitudes of the light from the cell which may imply a quantity or characteristic of the fluid. The analyzer may be made with MEMS techniques.

Abstract: A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.

Abstract: An actuator having a hot-arm and a cold-arm wherein the hot-arm and cold-arm are vertically offset from one another. The hot-arm is heated to cause the actuator to move both vertically and horizontally. When used as a relay, an electrostatic force latches the actuator when the electrodes are brought in close proximity to one another.

Abstract: A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.

Abstract: A microelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state. The relay includes a substrate having a trench formed therein, a first pair of contacts located in the trench and an actuator for controllably establishing electrical contact between the first pair of contacts. The actuator includes spaced apart supports on the substrate and a movable beam extending between the supports. A contact cross bar is located on the movable beam facing the first pair of contacts. A first electrode is located on the movable beam and a second electrode is located on the substrate. Electromagnetic force is used to deflect the movable beam towards the substrate and then electrostatic force is used to bring the contact cross bar in physical contact with the first pair of contacts.

Abstract: A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The substrates are secured relative to one another to form the spectrally tunable optical detector.

Abstract: A microrelay device is described including a substrate with a first pair of contacts, a ferromagnetic material and a conductive coil surrounding the ferromagnetic material. The microrelay also includes an actuator having a permanent magnet and a contact area. The actuator is fixed at a first end and movable between a first position and a second position. The contact area of the actuator is spaced from the pair of contacts on the substrate in the first position and in contact with the first pair of contacts on the substrate in the second position. A method of fabricating a microrelay device is also described including forming a conductive coil embedded in an insulating material.

Abstract: A micorelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state.