Abstract: A film forming apparatus includes a gas injection unit having a shower plate provided with gas injection holes, and a plurality of partition regions through which gases are separately injected and which are defined by dividing an arrangement region of the gas injection holes into a plurality of concentric regions in a diametrical direction of the substrate. A supply amount of a raw material gas per unit time in a raw material gas supply period in a cycle of forming a monomolecular layer by supplying the raw material gas and a reactant gas multiple times, and per unit area of the shower plate, and/or a supply amount of the reactant gas per unit time in a reaction period of the raw material gas and the reactant gas in the cycle, and per unit area of the shower plate becomes different in at least two of the partition regions.

Abstract: A laminate is formed by laminating a substrate and a support plate through an adhesive layer and a release layer. The release layer is formed by applying a composition containing a reactive polysilsesquioxane and a crosslinkable group-containing siloxane onto the surface of the support plate or the surface of the substrate and heating the composition to polymerize the reactive polysilsesquioxane and the crosslinkable group-containing siloxane.

Abstract: An adhesive composition for temporarily attaching a substrate to a support plate which supports the substrate, including a thermoplastic resin and a release agent.

Abstract: A production method of a laminate including a substrate and a light-transmitting support plate that are laminated each other via an adhesive layer and a release layer that is altered through absorption of light, the method including a release layer forming step of coating a reactive polysilsesquioxane on a surface of the support plate, the surface being opposed to the substrate, and heating the reactive polysilsesquioxane to perform polymerization, thereby forming the release layer.

Abstract: An in-vehicle apparatus and a map data management system are provided that can appropriately update a map. The in-vehicle apparatus 3 includes a storage unit 16 that stores parcel data PD constituted by a plurality of files in accordance with meshes of the map, and a control unit 10 that, when a vehicle 2 enters a single mesh of the map, updates the version of lower-level parcel files DPF corresponding to meshes at the periphery of the single mesh.

Abstract: A wafer has a plurality of projected dicing lines on a face side thereof, a plurality of devices formed in respective areas demarcated on the face side of the wafer by the projected dicing lines, a plurality of grooves defined in the projected dicing lines, and a molding resin laid on the devices and embedded in the grooves. An outer circumferential portion of the molding resin is removed, exposing the molding resin embedded in the grooves. The molding resin embedded in the grooves exposed on an outer circumferential portion of the wafer is detected, and a laser beam is focused at a transversely central point on the molding resin embedded in the grooves. The laser beam is applied to the molding resin along the grooves, thereby forming dividing grooves in the wafer to allow the wafer to be divided into individual devices.

Abstract: A bonding method which includes a pressing step of bonding a substrate and a support plate for supporting the substrate to each other through an adhesive layer and pressing the bonded substrate and support plate using a plate member; and, after the pressing step, a pressure adjusting step of placing the substrate and the support plate bonded to each other through the adhesive layer in an environment having higher pressure than pressure of an environment in which the pressing step is performed.

Abstract: A laminate including a supporting member which is light transmissive; a supported substrate which is supported by the supporting member; an adhesive layer which is provided on a surface of the supported substrate on which surface the supported substrate is supported by the supporting member; and a release layer, which (i) is provided between the supporting member and the supported substrate and (ii) contains a polymer including, in a repeating unit, a structure having a light absorption property, a property of the polymer being changed when the polymer absorbs light irradiated via the supporting member.

Abstract: An adhesive composition for temporarily attaching a substrate to a support plate which supports the substrate, including a thermoplastic resin and a release agent.

Abstract: A vibration control device that can achieve the best vibration control effect within an allowable stroke range of a movable mass includes a controller that calculates at least one of a displacement deviation between a target displacement of a movable mass and a displacement of the movable mass detected by a mass displacement sensor and a velocity deviation between a target velocity of the movable mass and a velocity of the movable mass detected by a mass velocity sensor, and generates a control command for making a motor drive the movable mass on the basis of at least one of the displacement deviation and the velocity deviation. The target displacement and the target velocity are set in a manner that the amplitude of the movable mass becomes constant and that phases thereof are delayed 90 degrees with respect to the vibration of a building.

Abstract: An adhesive composition for temporarily attaching a substrate to a support plate which supports the substrate, and includes a thermoplastic resin and a release agent.

Abstract: The present invention provides cell populations that are enriched for mesendoderm and mesoderm, and cell populations that are enriched for endoderm. In accordance with the present invention, a selectable marker gene has been recombinantly targeted to the brachyury locus to allow the isolation and characterization of cell populations that comprise brachyury positive mesendoderm and mesoderm cells. The cell populations of the invention are useful for generating cells for cell replacement therapy.

Abstract: A laminate is formed by laminating a substrate and a support plate through an adhesive layer and a release layer. The release layer is formed by applying a composition containing a reactive polysilsesquioxane and a crosslinkable group-containing siloxane onto the surface of the support plate or the surface of the substrate and heating the composition to polymerize the reactive polysilsesquioxane and the crosslinkable group-containing siloxane.

Abstract: A laminate including a supporting member which is light transmissive; a supported substrate supported by the supporting member; an adhesive layer provided on a surface of the supported substrate which surface faces toward the supporting member; and a release layer which is made of an inorganic material and is provided between the supporting member and the supported substrate, the release layer having a property that changes when the release layer absorbs light coming through the supporting layer, and the release layer having a flat surface which faces the adhesive layer.

Abstract: A laminate including a supporter which transmits infrared; a substrate supported by the supporter; an adhesive layer via which the supporter and the substrate are attached to each other; and a separation layer positioned on a surface of the supporter to which surface the substrate is attached, and which is made of a compound having an infrared-absorbing structure. A target is tightly attached and supported in the laminate while securing easy separation of a supporter from the target.

Abstract: A vibration control device that can achieve the best vibration control effect within an allowable stroke range of a movable mass includes a controller that calculates at least one of a displacement deviation between a target displacement of a movable mass and a displacement of the movable mass detected by a mass displacement sensor and a velocity deviation between a target velocity of the movable mass and a velocity of the movable mass detected by a mass velocity sensor, and generates a control command for making a motor drive the movable mass on the basis of at least one of the displacement deviation and the velocity deviation. The target displacement and the target velocity are set in a manner that the amplitude of the movable mass becomes constant and that phases thereof are delayed 90 degrees with respect to the vibration of a building.

Abstract: An adhesive composition for temporarily attaching a substrate to a support plate which supports the substrate, and includes a thermoplastic resin and a release agent.

Abstract: The present invention provides cell populations that are enriched for mesendoderm and mesoderm, and cell populations that are enriched for endoderm. In accordance with the present invention, a selectable marker gene has been recombinantly targeted to the brachyury locus to allow the isolation and characterization of cell populations that comprise brachyury positive mesendoderm and mesoderm cells. The cell populations of the invention are useful for generating cells for cell replacement therapy.

Abstract: An adhesive composition of this invention includes a hydrocarbon resin and a solvent for dissolving the hydrocarbon resin, the solvent containing a condensed polycyclic hydrocarbon. Thus, an adhesive composition having excellent product stability is provided.

Abstract: The present invention provides cell populations that are enriched for mesendoderm and mesoderm, and cell populations that are enriched for endoderm. The cell populations of the invention are useful for generating cells for cell replacement therapy.