Abstract: In the present chiller apparatus, a refrigerant flow path is branchably attached to a lower electrode serving as a large sample table, which copes with a case where the surface area of a sample is large in a configuration in which a plasma treatment device connected to a refrigerant cycle equipped with a heating device is applied. A control device transmits a heating adjustment control signal generated based on a result of a PID arithmetic operation including proportion, integration, and differentiation on a lower electrode refrigerant pipe refrigerant detection temperature detected from a temperature sensor provided in the vicinity of a refrigerant flow path of a heat insulating portion relative to the lower electrode of a lower electrode refrigerant pipe connected to be linked to the refrigerant cycle to a heating device and performs feedback control such that the lower electrode refrigerant pipe refrigerant detection temperature becomes a setting temperature.

Abstract: Chiller apparatus performs temperature-control operation without placing excessive load on an electric compressor even when temperature difference between set and work temperatures are small; little temperature difference between refrigerant intake side and refrigerant discharge side of an evaporator in freezing-cycle, at time of temperature-control setting with small temperature difference between set and work temperatures; PCB2 performs PID operation on refrigerant detection temperature by sensor near the side of refrigerant inflow of a heating apparatus in a refrigerant-cycle; a PCB1 performs serial communication of a drive control signal for an inverter generated based on a result, and controls the compressor rotational speed according to work temperature within range.

Abstract: A cooled-hydrogen supply station includes: a first coolant passage through which a first coolant circulates; a water-cooled refrigerator unit disposed on a part of the first coolant passage to cool the first coolant; a second coolant passage through which a second coolant flows; a first heat exchanger for cooling the second coolant by the first coolant, between another part of the first coolant passage and a part of the second coolant passage; a hydrogen storage unit; a hydrogen passage for transporting hydrogen stored in the hydrogen storage unit; and a second heat exchanger for cooling the hydrogen by the second coolant, between another part of the second coolant passage and a part of the hydrogen passage. The hydrogen is cooled down to a temperature of ?43° C. to ?20° C. by the second heat exchanger, and a hydrogen cooling power for cooling hydrogen to ?40° C. is between 13.5 kW and 16.5 kW.

Abstract: The present invention relates to a method for forming a TiO2 thin film on a substrate by using an atmospheric pressure CVD method, in which a raw material gas contains titanium tetraisopropoxide (TTIP) and a chloride of a metal M vaporizable in a temperature range of 100 to 400° C. and the amount of the chloride of the metal M is from 0.01 to 0.18 as a concentration ratio to the titanium tetraisopropoxide (TTIP) (chloride of metal M (mol %)/TTIP (mol %)).

Abstract: Chiller apparatus performs temperature-control operation without placing excessive load on an electric compressor even when temperature difference between set and work temperatures are small; little temperature difference between refrigerant intake side and refrigerant discharge side of an evaporator in freezing-cycle, at time of temperature-control setting with small temperature difference between set and work temperatures; PCB2 performs PID operation on refrigerant detection temperature by sensor near the side of refrigerant inflow of a heating apparatus in a refrigerant-cycle; a PCB1 performs serial communication of a drive control signal for an inverter generated based on a result, and controls the compressor rotational speed according to work temperature within range.

Abstract: A cooled-hydrogen supply station includes: a first coolant passage through which a first coolant circulates; a water-cooled refrigerator unit disposed on a part of the first coolant passage to cool the first coolant; a second coolant passage through which a second coolant flows; a first heat exchanger for cooling the second coolant by the first coolant, between another part of the first coolant passage and a part of the second coolant passage; a hydrogen storage unit; a hydrogen passage for transporting hydrogen stored in the hydrogen storage unit; and a second heat exchanger for cooling the hydrogen by the second coolant, between another part of the second coolant passage and a part of the hydrogen passage. The hydrogen is cooled down to a temperature of ?43° C. to ?20° C. by the second heat exchanger, and a hydrogen cooling power for cooling hydrogen to ?40° C. is between 13.5 kW and 16.5 kW.

Abstract: A method for forming a SiO2 thin film on a glass substrate by an online atmospheric pressure CVD method, which uses, as a raw material gas supply means, a post mixing type raw material supply means of separately supplying a process gas 1 which contains monosilane (SiH4) as a main raw material gas and a process gas 2 which contains oxygen (O2) as an auxiliary raw material gas and mixing the process gases 1 and 2 on the glass substrate, wherein the flow rate of the monosilane (SiH4) per unit width is at least 1.0 NL/min·m, and the process gas 1 contains ethylene (C2H4) in an amount such that the concentration ratio to the monosilane (SiH4) (C2H4 (mol %)/SiH4 (mol %)) is at most 3.2, whereby the deposition rate for forming a SiO2 thin film is improved.

Abstract: Provided is a molded product including a primary molded layer, a transfer layer that includes at least a decorating layer and a print layer for foil flow prevention including one of polyester, polyurethane, polyimide and cellulose, or a mixture obtained by combining two or more of polyester, polyurethane, polyimide and cellulose as a main component, and is transferred to a surface of the primary molded layer, the decorating layer and the print layer for foil flow prevention being arranged in increasing order of distance from a side of the primary molded layer, and a secondary molded layer formed on the side of the print layer for foil flow prevention of the transfer layer.

Abstract: Provided is a molded product including a primary molded layer, a transfer layer that includes at least a decorating layer and a print layer for foil flow prevention including one of polyester, polyurethane, polyimide and cellulose, or a mixture obtained by combining two or more of polyester, polyurethane, polyimide and cellulose as a main component, and is transferred to a surface of the primary molded layer, the decorating layer and the print layer for foil flow prevention being arranged in increasing order of distance from a side of the primary molded layer, and a secondary molded layer formed on the side of the print layer for foil flow prevention of the transfer layer.

Abstract: Provided is an optical modulator that modulates input light with a high frequency and low half-wave voltage. An optical device comprises a substrate; a dielectric film that is formed on the substrate and includes a first optical waveguide and a second optical waveguide that run parallel to each other; an insulating film formed on the dielectric film; a coplanar line that is formed on the insulating film and includes a signal line arranged between the first optical waveguide and the second optical waveguide, a first ground line arranged in a first region, and a second ground line arranged in a second region; and auxiliary electrodes that are arranged in the first region and the second region, are formed in contact with the dielectric film or within the insulating film, and apply bias voltages to the first optical waveguide and the second optical waveguide.

Abstract: A light control member includes a plate-like member including a first flat surface and a second surface facing the first surface. The second surface has at least three prism line groups, each group including a plurality of substantially parallel linear prisms. Each one of the linear prisms of one prism line group intersects the linear prisms of other prism line groups at one intersection point, and each linear prism is formed into a convex shape having a substantially curved outer edge when viewed along its longitudinal direction.

Abstract: Provided is an optical modulator that modulates input light with a high frequency and low half-wave voltage. An optical device comprises a substrate; a dielectric film that is formed on the substrate and includes a first optical waveguide and a second optical waveguide that run parallel to each other; an insulating film formed on the dielectric film; a coplanar line that is formed on the insulating film and includes a signal line arranged between the first optical waveguide and the second optical waveguide, a first ground line arranged in a first region, and a second ground line arranged in a second region; and auxiliary electrodes that are arranged in the first region and the second region, are formed in contact with the dielectric film or within the insulating film, and apply bias voltages to the first optical waveguide and the second optical waveguide.

Abstract: Provided is a substrate structure and a manufacturing method thereof, the substrate structure including a base substrate of single crystal; and a rhombohedral ferroelectric thin film exhibiting a spontaneous ferroelectric polarization and of a perovskite structure, the ferroelectric thin film being formed on a surface of the base substrate. The substrate structure may further include an optical waveguide formed on the ferroelectric thin film; and an electric field applying section that applies, to the optical waveguide, an electric field parallel to a surface of the base substrate. The electric field applying section generates the electric field so that the electric field direction of the electric field applied to the optical waveguide is parallel to a direction of the spontaneous ferroelectric polarization of the ferroelectric thin film.

Abstract: Provided is a substrate structure and a manufacturing method thereof, the substrate structure including a base substrate of single crystal; and a rhombohedral ferroelectric thin film exhibiting a spontaneous ferroelectric polarization and of a perovskite structure, the ferroelectric thin film being formed on a surface of the base substrate. The substrate structure may further include an optical waveguide formed on the ferroelectric thin film; and an electric field applying section that applies, to the optical waveguide, an electric field parallel to a surface of the base substrate. The electric field applying section generates the electric field so that the electric field direction of the electric field applied to the optical waveguide is parallel to a direction of the spontaneous ferroelectric polarization of the ferroelectric thin film.

Abstract: There is provided a light control member including a plate-like member including a first surface formed flat and a second surface facing the first surface and having at least three prism line groups constituted of a plurality of linear prisms arranged in substantially parallel. In the prism line group, each one of the linear prisms constituting each of the prism line groups intersect at one intersection, and the linear prism is formed into a convex shape having a substantially curved outer edge as viewed from the longitudinal direction.

Abstract: A planar light source device configured to illuminate a transmissive liquid crystal device having a display region configured of pixels arrayed in a two-dimensional matrix from the rear side, includes: planar light source units corresponding to hypothetical display region units into which the liquid crystal display device is divided; a light source provided to each planar light source unit has jC×jR (jC?2, jR?2) light-emitting device units which are classified into first and second light-emitting device units; each light-emitting device unit being configured of i (i?1) red, 2i green, and i blue light-emitting devices. At each planar light source unit, the light-emitting devices of each color are classified into first and second luminance values. The classification categories differ between first and second light-emitting device units. The first light-emitting device unit and the second light-emitting device unit are placed in at least twofold rotational symmetry.

Abstract: A flat-panel type display is provided, in which a marginal portion of a cathode panel provided with a plurality of electron emission regions and a marginal portion of an anode panel provided with luminescent layers and an anode are bonded to each other, spacers are disposed between the cathode panel and the anode panel, and a space sandwiched between the cathode panel and the anode panel is maintained under vacuum. The spacer includes a substrate of spacer and an antistatic coating disposed on the side surface of the spacer material, wherein the antistatic coating is formed from germanium nitride containing no transition metal, the thickness of the antistatic coating is within the range of 2 nm to 20 nm, and the volume resistivity of the substrate of spacer is within the range of 5×106 ?·m to 2×108 ?·m.

Abstract: An optical amplifier apparatus capable of dealing with different wavelength bands and capable of outputting an amplified light with reduced noise for any one of the wavelength bands. In a case of amplifying a light of C-band, terminals (51,52) of an optical switch (50) are connected to each other. An incident light is amplified by a first front-end optical fiber amplifier (12) and a first back-end optical fiber amplifier (18). The amplified light passes via the terminals (51,52) and through a back-end WDM coupler (36) and goes out of the optical amplifier apparatus (1). In a case of amplifying a light of L-band, terminals (51,54) of the optical switch (50) are connected to each other, while terminals (52,53) thereof are connected to each other.

Abstract: A flat-panel display includes a cathode panel including a plurality of electron emission regions, and an anode panel including a fluorescent layer and an anode electrode, both panels being bonded together in a peripheral region and holding a vacuum space therebetween; a plurality of spacers disposed between the cathode panel and the anode panel; a high-resistance layer provided between the anode panel and each of the spacers; and a conductor layer provided on a portion of each of the spacers which contacts the cathode panel.

Abstract: A planar light source device configured to illuminate a transmissive liquid crystal device having a display region configured of pixels arrayed in a two-dimensional matrix from the rear side, includes: planar light source units corresponding to hypothetical display region units into which the liquid crystal display device is divided; a light source provided to each planar light source unit has jC×jR (jC?2, jR?2) light-emitting device units which are classified into first and second light-emitting device units; each light-emitting device unit being configured of i (i?1) red, 2i green, and i blue light-emitting devices. At each planar light source unit, the light-emitting devices of each color are classified into first and second luminance values. The classification categories differ between first and second light-emitting device units. The first light-emitting device unit and the second light-emitting device unit are placed in at least twofold rotational symmetry.