Abstract: Electronic device processing systems including environmental control of the factory interface are described. One electronic device processing system has a factory interface having a factory interface chamber, a load lock apparatus coupled to the factory interface, one or more substrate carriers coupled to the factory interface, and an environmental control system coupled to the factory interface and operational to monitor or control one of: relative humidity, temperature, an amount of oxygen, or an amount of inert gas within the factory interface chamber. In another aspect, purge of a carrier purge chamber within the factory interface chamber is provided. Methods for processing substrates are described, as are numerous other aspects.

Abstract: Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Abstract: An optical fiber based polymer core sensor includes an optical fiber having a core and an end having a cured polymer core affixed to the core of the optical fiber. The cured polymer core extends outward from the end of the optical fiber and has a diameter approximately equal to the core of the optical fiber. Note the cured polymer core can be substantially cylindrical, tapered or geometrically shaped. The optical fiber based polymer core sensor can be used to measure a temperature, measure a strain, measure a distance, measure a refractive index, detect or measure an analyte, detect a toxin, detect a biological agent, monitor a chemical process, or a combination thereof.

Abstract: An optical fiber based polymer core sensor includes an optical fiber having a core and an end having a cured polymer core affixed to the core of the optical fiber. The cured polymer core extends outward from the end of the optical fiber and has a diameter approximately equal to the core of the optical fiber. Note the cured polymer core can be substantially cylindrical, tapered or geometrically shaped.