Patents by Inventor Balamurugan Subramanian

Balamurugan Subramanian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for determining the center of a wafer on a wafer table
    Patent number: 6374149
    Abstract: A method for determining the center (62) of a silicon wafer (54) on a wafer table (14) is provided. The method includes measuring silicon wafer data with a sensor (22). The silicon wafer data is received at a wafer center computing system (38). The coordinates of the wafer center (Xw,Yw) in a wafer table Cartesian coordinate system (72) are computed. The coordinates of the edge of the silicon wafer (54) are then determined from the wafer center coordinates (Xw,Yw).
    Type: Grant
    Filed: May 18, 1998
    Date of Patent: April 16, 2002
    Assignee: Texas Instruments Incorporated
    Inventor: Balamurugan Subramanian