Patents by Inventor Bao-Ru Young

Bao-Ru Young has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230367946
    Abstract: A method for forming a pattern layout is provided, including receiving an IC design layout including a layout block, a first line pattern is disposed inside the layout block along the first direction; forming a second line pattern disposed outside the layout block parallel to the first line patterns; forming a mandrel bar pattern oriented along the second direction and overlapping the first line pattern and the second line pattern, the mandrel bar pattern is between the first edge and the third edge of the layout block that are parallel to the first direction, and a first end of the mandrel bar pattern is separated from the first edge and overlaps a first side edge of one of the first line pattern or the second line pattern closest to the first edge; and outputting a pattern layout.
    Type: Application
    Filed: May 13, 2022
    Publication date: November 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Yen LIN, Tung-Heng HSIEH, Bao-Ru YOUNG
  • Publication number: 20230359800
    Abstract: In some embodiments, the present disclosure relates to a method that includes removing portions of a substrate to form a continuous fin protruding from an upper surface of the substrate. A doping process is performed to selectively increase a dopant concentration of a first portion of the continuous fin. A first gate electrode is formed over a second portion of the continuous fin, and a second gate electrode is formed over a third portion of the continuous fin. The first portion of the continuous fin is between the second and third portions of the continuous fin. A dummy gate electrode is formed over the first portion of the continuous fin. Upper portions of the continuous fin that are arranged between the first gate electrode, the second gate electrode, and the dummy gate electrode are removed, and source/drain regions are formed between the first, the second, and the dummy gate electrodes.
    Type: Application
    Filed: July 20, 2023
    Publication date: November 9, 2023
    Inventors: Chun-Yen Lin, Bao-Ru Young, Tung-Heng Hsieh
  • Patent number: 11797743
    Abstract: In some embodiments, the present disclosure relates to a method that includes removing portions of a substrate to form a continuous fin over the substrate. Further, a doping process is performed to selectively increase a dopant concentration of a first portion of the continuous fin. A first gate electrode is formed over a second portion of the continuous fin, and a second gate electrode is formed over a third portion of the continuous fin. The first portion of the continuous fin is between the second portion and the third portion of the continuous fin. A dummy gate electrode is formed over the first portion of the continuous fin. Upper portions of the continuous fin that are arranged between the first gate electrode, the second gate electrode, and the dummy gate electrode are removed, and source/drain regions are formed between the first, the second, and the dummy gate electrodes.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: October 24, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Yen Lin, Bao-Ru Young, Tung-Heng Hsieh
  • Patent number: 11798942
    Abstract: A semiconductor device and method includes: forming a first fin and a second fin on a substrate; forming a dummy gate material over the first fin and the second fin; forming a recess in the dummy gate material between the first fin and the second fin; forming a sacrificial oxide on sidewalls of the dummy gate material in the recess; filling an insulation material between the sacrificial oxide on the sidewalls of the dummy gate material in the recess; removing the dummy gate material and the sacrificial oxide; and forming a first replacement gate over the first fin and a second replacement gate over the second fin.
    Type: Grant
    Filed: April 26, 2021
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Sheng Fan, Bao-Ru Young, Tung-Heng Hsieh
  • Publication number: 20230326804
    Abstract: In an embodiment, a method includes: forming a first fin extending from a substrate; forming a second fin extending from the substrate, the second fin being spaced apart from the first fin by a first distance; forming a metal gate stack over the first fin and the second fin; depositing a first inter-layer dielectric over the metal gate stack; and forming a gate contact extending through the first inter-layer dielectric to physically contact the metal gate stack, the gate contact being laterally disposed between the first fin and the second fin, the gate contact being spaced apart from the first fin by a second distance, where the second distance is less than a second predetermined threshold when the first distance is greater than or equal to a first predetermined threshold.
    Type: Application
    Filed: June 15, 2023
    Publication date: October 12, 2023
    Inventors: Shih-Chieh Wu, Pang-Chi Wu, Kuo-Yi Chao, Mei-Yun Wang, Hsien-Huang Liao, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11742244
    Abstract: A method and structure for mitigating leakage current in devices that include a continuous active region. In some embodiments, a threshold voltage at the cell boundary is increased by changing a photomask logic operation (LOP) to reverse a threshold voltage type at the cell boundary. Alternatively, in some cases, the threshold voltage at the cell boundary is increased by performing a threshold voltage implant (e.g., an ion implant) at the cell boundary, and into a dummy gate disposed at the cell boundary. Further, in some embodiments, the threshold voltage at the cell boundary is increased by use of a silicon germanium (SiGe) channel at the cell boundary. In some cases, the SiGe may be disposed within the substrate at the cell boundary and/or the SiGe may be part of the dummy gate disposed at the cell boundary.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Sheng Fan, Chun-Yen Lin, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11721687
    Abstract: A semiconductor structure includes a substrate having a first well of a first conductivity type and a second well of a second conductivity type. From a top view, the first well includes first and seconds edges extending along a first direction. The second edge has multiple turns, resulting in the first well having a protruding section and a recessed section. The semiconductor structure further includes a first source/drain feature over the protruding section and a second source/drain feature over a main body of the first well. The first source/drain feature is of the first conductivity type. The second source/drain feature is of the second conductivity type. The first and the second source/drain features are generally aligned along a second direction perpendicular to the first direction from the top view.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung Feng Chang, Chun-Chia Hsu, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11721590
    Abstract: In an embodiment, a method includes: forming a first fin extending from a substrate; forming a second fin extending from the substrate, the second fin being spaced apart from the first fin by a first distance; forming a metal gate stack over the first fin and the second fin; depositing a first inter-layer dielectric over the metal gate stack; and forming a gate contact extending through the first inter-layer dielectric to physically contact the metal gate stack, the gate contact being laterally disposed between the first fin and the second fin, the gate contact being spaced apart from the first fin by a second distance, where the second distance is less than a second predetermined threshold when the first distance is greater than or equal to a first predetermined threshold.
    Type: Grant
    Filed: July 12, 2022
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Chieh Wu, Pang-Chi Wu, Kuo-Yi Chao, Mei-Yun Wang, Hsien-Huang Liao, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11688654
    Abstract: Test line structures are provided. A test line structure includes a semiconductor substrate, a plurality of diagnosis units and a plurality of first micro pad units. The diagnosis units are formed over the semiconductor substrate. Each of the diagnosis units includes a first interconnect structure having a first routing pattern. The first interconnect structures of the diagnosis units are connected in series to form a first test chain through the first micro pad units, and each of the first micro pad units is configured to connect the first interconnect structures of two adjacent diagnosis units in the first test chain. The first routing patterns of the first interconnect structures in the diagnosis units are different.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Chun Lin, Chung-Yi Lin, Yen-Sen Wang, Bao-Ru Young
  • Publication number: 20230187277
    Abstract: The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC layout having a first pattern layer that includes first source/drain (S/D) contacts and second S/D contacts, the first and second S/D contacts are spaced away from each other by a spacing along a first direction, and each of the first and second S/D contacts have elongated shapes extending lengthwise in a second direction perpendicular to the first direction. The method includes constructing a conductive feature on a second pattern layer of the IC layout, the conductive feature having an initial rectangular shape with a length and a width, the length extending along the first direction. And the method includes modifying the conductive feature to form a modified conductive feature that is overlapped with the first S/D contacts and distanced away from the second S/D contacts.
    Type: Application
    Filed: February 1, 2023
    Publication date: June 15, 2023
    Inventors: Sheng-Hsiung WANG, Bao-Ru YOUNG, Tung-Heng HSIEH
  • Publication number: 20230138711
    Abstract: An IC includes a first standard cell (SC1) having a first circuit area (CA1) and a first transition area (TA1) placed on an edge of the CA1; and a SC2 having a CA2 and a TA2 placed on an edge of CA2?. CA1 includes a first and a second active region (AR1 and AR2) longitudinally oriented along a first direction (D1), and a first gate stack (G1) along a D2?D1 and extending over AR1 and AR2. G1 includes a first gate segment (GS1) contacting AR1 and a GS2 contacting AR2. GS1 and GS2 are different in composition. GS1 and GS2 are associated with a pFET and a nFET, respectively. TA1 includes a G2 longitudinally oriented along D2 and spans between opposite cell edges of the SC1. G2 is a lengthwise uniform gate stack. SC2 is placed in abutment with the SC1 such that TA1 and TA2 share a common edge.
    Type: Application
    Filed: April 1, 2022
    Publication date: May 4, 2023
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230137766
    Abstract: Semiconductor structures and methods are provided. A semiconductor structure according to an embodiment includes a substrate having an n well abutting a p well along a boundary. The semiconductor structure also includes a continuous active region over the n well and the p well, a plurality of gate structures over channel regions of the continuous active region, and one gate structure of the plurality of gate structures is disposed directly over the boundary. A portion of the channel region directly under the one gate structure is in direct contact with both an n-type source/drain feature over the p well and a p-type source/drain feature over the n well.
    Type: Application
    Filed: July 29, 2022
    Publication date: May 4, 2023
    Inventors: Ming-Yang Huang, Yung Feng Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230082104
    Abstract: Provided is a tap cell including a substrate, a first well, a second well, a first doped region, and the second doped region. The substrate has a first region and a second region. The first well has a first dopant type and includes a first portion disposed in the first region and a second portion extending into the second region. The second well has a second dopant type and includes a third portion disposed in the second region and a fourth portion extending into the first region. The first doped region having the first dopant type is disposed in the second portion of the first well and the third portion of the second well along the second region. The second doped region having the second dopant type is disposed in the first portion of the first well and the fourth portion of the second well along the first region.
    Type: Application
    Filed: November 18, 2022
    Publication date: March 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yung-Feng Chang, Bao-Ru Young, Tung-Heng Hsieh, Chun-Chia Hsu
  • Publication number: 20230078700
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed.
    Type: Application
    Filed: November 21, 2022
    Publication date: March 16, 2023
    Inventors: Jhe-Ching Lu, Bao-Ru Young, Yen-Sen Wang, Tsung-Chieh Tsai
  • Publication number: 20230055943
    Abstract: A fuse structure includes first and second transistors where each of the first and the second transistors has a source terminal, a drain terminal, and a gate terminal; a first source/drain contact disposed on the source terminal of the first transistor; a second source/drain contact disposed on the drain terminal of the second transistor; an insulator disposed laterally between the first and the second source/drain contacts; a source/drain contact via disposed on the first source/drain contact; and a program line connected to the source/drain contact via, wherein a width of the insulator is configured such that a programming potential applied across the source/drain contact via and the drain terminal of the second transistor causes the insulator to break down.
    Type: Application
    Filed: August 20, 2021
    Publication date: February 23, 2023
    Inventors: Tun Jen Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230057293
    Abstract: A method includes receiving an integrated circuit (IC) design layout including a layout block, where the layout block including first line patterns disposed along a first direction, extending lengths of the first line patterns, connecting portions of the first line patterns disposed within a distance less than a preset value, forming second line patterns disposed outside the layout block parallel to the first line patterns, forming mandrel bar patterns overlapping edges of the layout block, where the mandrel bar patterns oriented along a second direction perpendicular to the first direction, and outputting a pattern layout for mask fabricating, where the pattern layout includes the layout block, the first and second line patterns, and the mandrel bar patterns.
    Type: Application
    Filed: August 19, 2021
    Publication date: February 23, 2023
    Inventors: Chun-Yen Lin, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230056694
    Abstract: An integrated circuit (IC) layout design is received that includes a first circuit cell and a second circuit cell abutted to one another. The first circuit cell contains a first IC component, and the second circuit cell contains a second IC component. A determination is made that a distance between the first IC component and the second IC component is less than a predefined threshold when the first circuit cell and the second circuit cell are abutted together. The IC layout design is revised such that the distance between the first IC component and the second IC component is eliminated in the revised IC layout design.
    Type: Application
    Filed: August 20, 2021
    Publication date: February 23, 2023
    Inventors: Tun Jen Chang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230052954
    Abstract: The integrated circuit (IC) structure includes a semiconductor substrate, a first active region, a dummy fill region, a second active region, first metal gate structures, and second metal gate structures. The first active region is on the semiconductor substrate. The dummy fill region is on the semiconductor substrate. The second active region is on the semiconductor substrate and spaced apart from the first active region by the dummy fill region. The first metal gate structures extend in the first active region and have a first gate pitch and a first gate width. The second metal gate structures extend in the second active region and have a second gate width greater than the first gate width and a second gate pitch being an integer times the first gate pitch, and the integer being two or more.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 16, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yung Feng CHANG, Tung-Heng HSIEH, Bao-Ru YOUNG, Pi-Yun SUN
  • Patent number: 11581221
    Abstract: The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC layout having active regions, conductive contact features landing on the active regions, and a conductive via feature to be landing on a first subset of the conductive contact features and to be spaced from a second subset of the conductive contact features; evaluating a spatial parameter of the conductive via feature to the conductive contact features; and modifying the IC layout according to the spatial parameter such that the conductive via feature has a S-curved shape.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Sheng-Hsiung Wang, Tung-Heng Hsieh, Bao-Ru Young
  • Publication number: 20230029158
    Abstract: Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of first semiconductor layers and a plurality of second semiconductor layers. The first and second semiconductor layers are alternatingly stacked over the semiconductor substrate and between the first and second epitaxy regions. A first conductive feature is formed over the first epitaxy region and outside an oxide diffusion region. A second conductive feature is formed over the second epitaxy region and outside the oxide diffusion region. The oxide diffusion region is disposed between the first and second conductive features.
    Type: Application
    Filed: September 30, 2022
    Publication date: January 26, 2023
    Inventors: Chun-Chia HSU, Tung-Heng HSIEH, Yung-Feng CHANG, Bao-Ru YOUNG, Jam-Wem LEE, Chih-Hung WANG