Patents by Inventor Benjamin D. Briggs

Benjamin D. Briggs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10229967
    Abstract: Capacitors and methods of forming the same include forming a gap in a dielectric layer underneath one or more conducting lines, such that the one or more conducting lines are suspended over the gap. A capacitor stack is deposited in the gap and on the conducting lines. Respective contacts are deposited on the conducting lines and on the capacitor stack.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: March 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Bartlet H. Deprospo, Huai Huang, Christopher J. Penny, Michael Rizzolo
  • Patent number: 10229851
    Abstract: An etch back air gap (EBAG) process is provided. The EBAG process includes forming an initial structure that includes a dielectric layer disposed on a substrate and a liner disposed to line a trench defined in the dielectric layer. The process further includes impregnating a metallic interconnect material with dopant materials, filling a remainder of the trench with the impregnated metallic interconnect materials to form an intermediate structure and drive-out annealing of the intermediate structure. The drive-out annealing of the intermediate structure serves to drive the dopant materials out of the impregnated metallic interconnect materials and thereby forms a chemical- and plasma-attack immune material.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: March 12, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Benjamin D. Briggs, Elbert Huang, Takeshi Nogami, Christopher J. Penny
  • Publication number: 20190067087
    Abstract: A method of forming a semiconductor device includes forming a dielectric spacer along sidewalls of a plurality of interconnect openings extending through a sacrificial dielectric layer and a first dielectric layer until a top portion of a first conductive material, the dielectric spacer includes a dielectric material having a dielectric constant higher than a dielectric constant of the sacrificial dielectric layer and higher than a dielectric constant of the first dielectric layer, conformally depositing a barrier liner within the plurality of interconnect openings above and in direct contact with the dielectric spacer, filling the interconnect openings with a second conductive material, removing the sacrificial dielectric layer to expose portions of the dielectric spacer above the first dielectric layer, and reducing a thickness of exposed portions of the dielectric spacer.
    Type: Application
    Filed: August 22, 2017
    Publication date: February 28, 2019
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Huai Huang, Christopher J. Penny, Michael Rizzolo, Hosadurga Shobha
  • Patent number: 10211153
    Abstract: A low aspect ratio interconnect is provided and includes a metallization layer, a liner and a metallic interconnect. The metallization layer includes bottommost and uppermost surfaces. The uppermost surface has a maximum post-deposition height from the bottommost surface at first metallization layer portions. The metallization layer defines a trench at second metallization layer portions. The liner includes is disposed to line the trench and includes liner sidewalls that have terminal edges that extend to the maximum post-deposition height and lie coplanar with the uppermost surface at the first metallization layer portions. The metallic interconnect is disposed on the liner to fill a trench remainder and has an uppermost interconnect surface that extends to the maximum post-deposition height and lies coplanar with the uppermost surface at the first metallization layer portions.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: February 19, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Benjamin D. Briggs, Elbert E. Huang, Raghuveer R. Patlolla, Cornelius Brown Peethala, David L. Rath, Chih-Chao Yang
  • Patent number: 10211138
    Abstract: A multi-level semiconductor device and a method of fabricating a multi-level semiconductor device involve a first interlayer dielectric (ILD) layer with one or more metal lines formed therein. A silicide is formed on a surface of the first ILD layer and is directly adjacent to each of the one or more metal lines on both sides of each of the one or more metal lines. A second ILD is formed above the silicide, and a via is formed through the second ILD above one of the one or more metal lines. One or more second metal lines are formed above the second ILD, one of which is formed in the via. The second metal line in the via contacts the one of the one or more metal lines and the silicide adjacent to the one of the one or more metal lines.
    Type: Grant
    Filed: May 18, 2018
    Date of Patent: February 19, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Benjamin D. Briggs, Jessica Dechene, Elbert Huang, Joe Lee
  • Patent number: 10211155
    Abstract: Methods are provided for fabricating metallic interconnect structures having reduced electrical resistivity that is obtained by applying mechanical strain to the metallic interconnect structures, as well as semiconductor structures having metallic interconnect structures formed with permanent mechanical strain to provide reduced electrical resistivity. For example, a method includes forming a metallic interconnect structure in an interlevel dielectric (ILD) layer of a back-end-of-line (BEOL) structure of a semiconductor structure, and forming a stress layer in contact with the metallic interconnect structure. A thermal anneal process is performed to cause the stress layer to expand and apply compressive strain to the metallic interconnect structure and permanently deform at least a portion of the metallic interconnect structure into a stress memorized state of compressive strain.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: February 19, 2019
    Assignee: International Business Machines Corporation
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Nicholas A. Lanzillo, Michael Rizzolo, Theodorus E. Standaert
  • Patent number: 10211151
    Abstract: A method of forming a self-aligned pattern of vias in a semiconductor device comprises etching a pattern of lines that contain notches that are narrower than other parts of the line. Thereafter, vias are created where the notches are located. The locations of the vias are such that the effect of blown-out areas is minimized. Thereafter, the lines are etched and the vias and line areas are filled. The layers are planarized such that the metal fill is level with a surrounding ultra-low-k dielectric. Additional metal layers, lines, and vias can be created. Other embodiments are also described herein.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: February 19, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Bartlet H. Deprospo, Michael Rizzolo, Nicole A. Saulnier
  • Patent number: 10204828
    Abstract: A method for forming a semiconductor structure using first and second conductive materials, and having first and second trenches with first and second critical dimensions. The second conductive material exhibits a lower resistivity than the first conductive material at a film thickness corresponding to the second critical dimension and the second conductive material exhibits a higher resistivity than the first conductive material at a film thickness corresponding to the first critical dimension. An initial semiconductor structure has the first trench having the first critical dimension and the second trench having the second critical dimension. The second critical dimension is larger than the first critical dimension. A first conductive structure made from one of the first and second conductive materials is formed in the first trench. A second conductive structure made from another of the first and second conductive materials is formed in the second trench.
    Type: Grant
    Filed: February 9, 2018
    Date of Patent: February 12, 2019
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Benjamin D. Briggs, Lawrence A. Clevenger, Koichi Motoyama, Cornelius Brown Peethala, Michael Rizzolo, Gen Tsutsui
  • Patent number: 10195901
    Abstract: Techniques are provided for alerting drivers of hazardous driving conditions using the sensing capabilities of wearable mobile technology. In one aspect, a method for alerting drivers of hazardous driving conditions includes the steps of: collecting real-time data from a driver of a vehicle, wherein the data is collected via a mobile device worn by the driver; determining whether the real-time data indicates that a hazardous driving condition exists; providing feedback to the driver if the real-time data indicates that a hazardous driving condition exists, and continuing to collect data from the driver in real-time if the real-time data indicates that a hazardous driving condition does not exist. The real-time data may also be collected and used to learn characteristics of the driver. These characteristics can be compared with the data being collected to help determine, in real-time, whether the driving behavior is normal and whether a hazardous driving condition exists.
    Type: Grant
    Filed: August 21, 2017
    Date of Patent: February 5, 2019
    Assignee: International Business Machines Corporation
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Leigh Anne H. Clevenger, Jonathan H. Connell, II, Nalini K. Ratha, Michael Rizzolo
  • Patent number: 10192829
    Abstract: Low-temperature techniques for doping of Cu interconnects based on interfacially-assisted thermal diffusion are provided. In one aspect, a method of forming doped copper interconnects includes the steps of: patterning at least one trench in a dielectric material; forming a barrier layer lining the trench; forming a metal liner on the barrier layer; depositing a seed layer on the metal liner; plating a Cu fill into the trench to form Cu interconnects; removing a portion of a Cu overburden to access an interface between the metal liner and the Cu fill; depositing a dopant layer; and diffusing a dopant(s) from the dopant layer along the interface to form a Cu interconnect doping layer between the metal liner and the Cu fill. Alternatively, the overburden and the barrier layer/metal liner can be completely removed, and the dopant layer deposited selectively on the Cu fill. An interconnect structure is also provided.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: January 29, 2019
    Assignee: International Business Machines Corporation
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Chao-Kun Hu, Takeshi Nogami, Deepika Priyadarshini, Michael Rizzolo
  • Publication number: 20190013278
    Abstract: A semiconductor device is provided and includes first and second dielectrics, first and second conductive elements, a self-formed-barrier (SFB) and a liner. The first and second dielectrics are disposed with one of first-over-second dielectric layering and second-over-first dielectric layering. The first and second conductive elements are respectively suspended at least partially within a lower one of the first and second dielectrics and at least partially within the other one of the first and second dielectrics. The self-formed-barrier (SFB) is formed about a portion of one of the first and second conductive elements which is suspended in the second dielectric. The liner is deposited about a portion of the other one of the first and second conductive elements which is partially suspended in the first dielectric.
    Type: Application
    Filed: September 14, 2018
    Publication date: January 10, 2019
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Nicholas A. Lanzillo, Takeshi Nogami, Christopher J. Penny, Michael Rizzolo
  • Patent number: 10170416
    Abstract: A method is presented for forming a semiconductor structure. The method includes depositing an insulating layer over a semiconductor substrate, etching the insulating layer to form trenches for receiving copper (Cu), selectively recessing the Cu at one or more of the trenches corresponding to circuit locations requiring electromigration (EM) short-length, and forming self-aligned conducting caps over the one or more trenches where the Cu has been selectively recessed. The conducting caps can be tantalum nitride (TaN) caps. The method further includes forming a via extending into each of the trenches for receiving Cu. Additionally, the via for trenches including recessed Cu extends to the self-aligned conducting cap, whereas the via for trenches including non-recessed Cu extends to a top surface of the Cu.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventors: Benjamin D. Briggs, Elbert Huang, Joe Lee, Christopher J. Penny
  • Patent number: 10170411
    Abstract: A method for via alignment includes forming first airgaps between interconnect structures and depositing a pinch off layer to close off openings to the first airgaps. A protection layer is formed in divots in the pinch off layer. The protection layer and the pinch off layer are planarized to form a surface where the protection layer remains in the divots. An interlevel dielectric layer (ILD) is deposited on the surface. The ILD and the pinch off layer are etched using the protection layer as an etch stop to align a via and expose the interconnect structure through the via.
    Type: Grant
    Filed: January 24, 2018
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Christopher J. Penny, Michael Rizzolo
  • Publication number: 20180366142
    Abstract: Embodiments of the present invention are directed to a computer program product for generating a personality shift determination. The computer program product can include a computer readable storage medium having program instructions embodied therewith, wherein the instructions are executable by a processor to cause the processor to perform a method. The method can include receiving a real-time audio input. The method can also include generating a real-time personality trait identification. The method can also include generating a current trait classification for the real-time personality trait identification. The method can also include comparing the current trait classification to a historic rate classification. The method can also include generating a personality shift determination.
    Type: Application
    Filed: November 6, 2017
    Publication date: December 20, 2018
    Inventors: Maryam ASHOORI, Benjamin D. BRIGGS, Lawrence A. CLEVENGER, Leigh Anne H. CLEVENGER, Michael RIZZOLO
  • Publication number: 20180366141
    Abstract: Embodiments of the present invention are directed to a computer program product for generating a personality shift determination. The computer program product can include a computer readable storage medium having program instructions embodied therewith, wherein the instructions are executable by a processor to cause the processor to perform a method. The method can include receiving a real-time audio input. The method can also include generating a real-time personality trait identification. The method can also include generating a current trait classification for the real-time personality trait identification. The method can also include comparing the current trait classification to a historic rate classification. The method can also include generating a personality shift determination.
    Type: Application
    Filed: June 14, 2017
    Publication date: December 20, 2018
    Inventors: Maryam ASHOORI, Benjamin D. BRIGGS, Lawrence A. CLEVENGER, Leigh Anne H. CLEVENGER, Michael RIZZOLO
  • Publication number: 20180361225
    Abstract: Embodiments are directed to a support apparatus. The support apparatus might comprise a body configured to support an entity. The body might comprise a material that has a physical property. The support apparatus might further comprise a coupler system configured to couple electric current from a power source to the material. The material is arranged such that coupling an electric current to the material changes the physical property of the material. Embodiments are further directed to a method. The method might comprise forming one or more cavities in a support apparatus. The method might further comprise providing one or more couplers in electrical contact with each of the one or more channels. The method further comprises filling each of the one or more cavities with a fluid that has electrically changeable rigidity. Finally, the method might comprise connecting a power source to each of the one or more couplers.
    Type: Application
    Filed: August 23, 2018
    Publication date: December 20, 2018
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Bartlet H. DeProspo, Michael Rizzolo
  • Publication number: 20180366144
    Abstract: Monitoring and analysis of a user's speech to detect symptoms of a mental health disorder by continuously monitoring a user's speech in real-time to generate audio data based, transcribing the audio data to text and analyzing the text of the audio data to determine a sentiment of the audio data is disclosed. A trained machine learning model may be applied to correlate the text and the determined sentiment to clinical information associated with symptoms of a mental health disorder to determine whether the symptoms are a symptom event. The initial determination may be transmitted to a second device to determine (and/or verify) whether or not the symptom event was falsely recognized.
    Type: Application
    Filed: November 27, 2017
    Publication date: December 20, 2018
    Inventors: Maryam Ashoori, Benjamin D. Briggs, Lawrence A. Clevenger, Leigh Anne H. Clevenger
  • Publication number: 20180366143
    Abstract: Monitoring and analysis of a user's speech to detect symptoms of a mental health disorder by continuously monitoring a user's speech in real-time to generate audio data based, transcribing the audio data to text and analyzing the text of the audio data to determine a sentiment of the audio data is disclosed. A trained machine learning model may be applied to correlate the text and the determined sentiment to clinical information associated with symptoms of a mental health disorder to determine whether the symptoms are a symptom event. The initial determination may be transmitted to a second device to determine (and/or verify) whether or not the symptom event was falsely recognized.
    Type: Application
    Filed: June 19, 2017
    Publication date: December 20, 2018
    Inventors: Maryam Ashoori, Benjamin D. Briggs, Lawrence A. Clevenger, Leigh Anne H. Clevenger
  • Patent number: 10153202
    Abstract: A method of forming an interconnect that in one embodiment includes forming an opening in a dielectric layer, and treating a dielectric surface of the opening in the dielectric layer with a nitridation treatment to convert the dielectric surface to a nitrided surface. The method may further include depositing a tantalum containing layer on the nitrided surface. In some embodiments, the method further includes depositing a metal fill material on the tantalum containing layer. The interconnect formed may include a nitrided dielectric surface, a tantalum and nitrogen alloyed interface that is present on the nitrided dielectric surface, a tantalum layer on the tantalum and nitrogen alloy interface, and a copper fill.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: December 11, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Michael Rizzolo, Chih-Chao Yang
  • Publication number: 20180349220
    Abstract: Methods and systems for printing accurate three-dimensional structures include printing a three-dimensional structure according to an original three-dimensional model. The original three-dimensional model is adjusted to reduce measured differences between the printed three-dimensional structure and the original three-dimensional model. A three-dimensional structure is printed according to the adjusted three-dimensional model.
    Type: Application
    Filed: June 5, 2017
    Publication date: December 6, 2018
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Leigh Anne H. Clevenger, Christopher J. Penny, Michael Rizzolo, Aldis G. Sipolins