Patents by Inventor Benjamin T. Voegeli

Benjamin T. Voegeli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8946013
    Abstract: A disposable structure displaced from an edge of a gate electrode and a drain region aligned to the disposable structure is formed. Thus, the drain region is self-aligned to the edge of the gate electrode. The disposable structure may be a disposable spacer, or alternately, the disposable structure may be formed simultaneously with, and comprise the same material as, a gate electrode. After formation of the drain regions, the disposable structure is removed. The self-alignment of the drain region to the edge of the gate electrode provides a substantially constant drift distance that is independent of any overlay variation of lithographic processes.
    Type: Grant
    Filed: February 2, 2012
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Jeffrey P. Gambino, Xuefeng Liu, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Patent number: 8686478
    Abstract: Methods of electrically programming a diffusion resistor by using trapped charge in a trapped charge region adjacent to the resistor to vary the resistance of the resistor, and the resistor, are disclosed. In one embodiment, a method includes forming a diffusion resistor in a substrate; forming a trapped charge region adjacent to the diffusion resistor; and adjusting a resistance of the diffusion resistor by controlling the trapped charge in the trapped charge region.
    Type: Grant
    Filed: November 14, 2011
    Date of Patent: April 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Benjamin T. Voegeli, Kimball M. Watson
  • Patent number: 8525293
    Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.
    Type: Grant
    Filed: May 15, 2012
    Date of Patent: September 3, 2013
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
  • Patent number: 8493250
    Abstract: A successive approximation analog-to-digital converter (ADC) includes an adjustable voltage source that applies an adjustable voltage to an input of a comparator of the ADC to cancel an offset of the ADC. The ADC also includes a control that suspends adjustments of the adjustable voltage when the adjustable voltage converges on the offset. The adjustable voltage source is a digital-to-analog converter.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: July 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Anthony R. Bonaccio, Frank R. Keyser, III, Benjamin T. Voegeli
  • Publication number: 20130057417
    Abstract: A successive approximation analog-to-digital converter (ADC) includes an adjustable voltage source that applies an adjustable voltage to an input of a comparator of the ADC to cancel an offset of the ADC. The ADC also includes a control that suspends adjustments of the adjustable voltage when the adjustable voltage converges on the offset. The adjustable voltage source is a digital-to-analog converter.
    Type: Application
    Filed: September 7, 2011
    Publication date: March 7, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anthony R. BONACCIO, Frank R. KEYSER, III, Benjamin T. VOEGELI
  • Publication number: 20120319233
    Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.
    Type: Application
    Filed: May 15, 2012
    Publication date: December 20, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
  • Patent number: 8302037
    Abstract: A differential system producing differential signals with offset cancellation utilizing a double differential input pair system is disclosed. It uses two parallel differential transistor pairs which are intentionally skewed. Nominally, the differential pairs are skewed in opposite direction from each, but with equal magnitude, so that the combination of the two differential pairs is nominally balanced. The current through each differential pair is then increased or decreased until any offset is sufficiently cancelled, using a selection means for providing an equi-potential value to first and second differential inputs in a calibration mode of the system and a comparison means for comparing first and second differential outputs in a calibration mode to determine the offset of the system.
    Type: Grant
    Filed: June 30, 2009
    Date of Patent: October 30, 2012
    Assignee: International Business Machines Corporation
    Inventors: Igor Arsovski, Anthony R Bonaccio, Hayden (Clay) Cranford, Jr., Joseph A Iadanza, Pradeep Thiagarajan, Sebastian T Ventrone, Benjamin T Voegeli
  • Patent number: 8236662
    Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.
    Type: Grant
    Filed: November 18, 2010
    Date of Patent: August 7, 2012
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
  • Publication number: 20120126319
    Abstract: A disposable structure displaced from an edge of a gate electrode and a drain region aligned to the disposable structure is formed. Thus, the drain region is self-aligned to the edge of the gate electrode. The disposable structure may be a disposable spacer, or alternately, the disposable structure may be formed simultaneously with, and comprise the same material as, a gate electrode. After formation of the drain regions, the disposable structure is removed. The self-alignment of the drain region to the edge of the gate electrode provides a substantially constant drift distance that is independent of any overlay variation of lithographic processes.
    Type: Application
    Filed: February 2, 2012
    Publication date: May 24, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Natalie B. Feilchenfeld, Jeffrey P. Gambino, Xuefeng Liu, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Publication number: 20120058611
    Abstract: Methods of electrically programming a diffusion resistor by using trapped charge in a trapped charge region adjacent to the resistor to vary the resistance of the resistor, and the resistor, are disclosed. In one embodiment, a method includes forming a diffusion resistor in a substrate; forming a trapped charge region adjacent to the diffusion resistor; and adjusting a resistance of the diffusion resistor by controlling the trapped charge in the trapped charge region.
    Type: Application
    Filed: November 14, 2011
    Publication date: March 8, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Benjamin T. Voegeli, Kimball M. Watson
  • Patent number: 8125019
    Abstract: An electrically programmable resistor is presented. In one embodiment, a resistor includes a doped body within a substrate; a trapped charge region adjacent to the resistor, the resistance of the resistor controlled by an amount of trapped charge in the trapped charge region.
    Type: Grant
    Filed: October 18, 2006
    Date of Patent: February 28, 2012
    Assignee: International Business Machines Corporation
    Inventors: Benjamin T. Voegeli, Kimball M. Watson
  • Patent number: 8114750
    Abstract: A disposable structure displaced from an edge of a gate electrode and a drain region aligned to the disposable structure is formed. Thus, the drain region is self-aligned to the edge of the gate electrode. The disposable structure may be a disposable spacer, or alternately, the disposable structure may be formed simultaneously with, and comprise the same material as, a gate electrode. After formation of the drain regions, the disposable structure is removed. The self-alignment of the drain region to the edge of the gate electrode provides a substantially constant drift distance that is independent of any overlay variation of lithographic processes.
    Type: Grant
    Filed: April 17, 2008
    Date of Patent: February 14, 2012
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Jeffrey P. Gambino, Xuefeng Liu, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Patent number: 7972919
    Abstract: The present invention relates to a device structure located in a semiconductor substrate and containing high performance vertical NPN and PNP transistors. Specifically, the vertical PNP transistor has an emitter region, and the vertical NPN transistor has an intrinsic base region. The emitter region of the vertical PNP transistor and the intrinsic base region of the vertical NPN transistor are located in a single silicon germanium-containing layer, and they both contain single crystal silicon germanium. The present invention also relates to a method for fabricating such a device structure based on collateral modification of conventional fabrication processes for CMOS and bipolar devices, with few or no additional processing steps.
    Type: Grant
    Filed: July 18, 2005
    Date of Patent: July 5, 2011
    Assignee: International Business Machines Corporation
    Inventors: Peter B. Gray, Benjamin T. Voegeli
  • Patent number: 7956412
    Abstract: A dielectric material layer is formed on a bottom surface and sidewalls of a trench in a semiconductor substrate. The silicon oxide layer forms a drift region dielectric on which a field plate is formed. Shallow trench isolation may be formed prior to formation of the drift region dielectric, or may be formed utilizing the same processing steps as the formation of the drift region dielectric. A gate dielectric layer is formed on exposed semiconductor surfaces and a gate conductor layer is formed on the gate dielectric layer and the drift region dielectric. The field plate may be electrically tied to the gate electrode, may be an independent electrode having an external bias, or may be a floating electrode. The field plate biases the drift region to enhance performance and extend allowable operating voltage of a lateral diffusion field effect transistor during operation.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: June 7, 2011
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Jeffrey P. Gambino, Louis D. Lanzerotti, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Publication number: 20110062548
    Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.
    Type: Application
    Filed: November 18, 2010
    Publication date: March 17, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
  • Patent number: 7892910
    Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: February 22, 2011
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
  • Patent number: 7886240
    Abstract: Modifying a layout of an integrated circuit (IC) based on a function of an interconnect therein and a related circuit and design structure are disclosed. In one embodiment, a method includes identifying a function of an interconnect in the layout from data of the layout embodied in a computer readable medium; and modifying the layout to form another layout that accommodates the function of the interconnect. A design structure embodied in a machine readable medium used in a design process, according to one embodiment, may include a circuit including a high voltage interconnect positioned in a dielectric layer, the high voltage interconnect positioned such that no fill is above or below the high voltage interconnect.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: February 8, 2011
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Natalie B. Feilchenfeld, Jeffrey P. Gambino, Howard S. Landis, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Patent number: 7868809
    Abstract: A resistor-based digital to analog converter (DAC) having mux fastpaths, which selectively connect a subset (or an entirety) of voltage divider nodes in a DAC to either a higher level of multiplexor hierarchy, or a DAC output node, effectively bypassing one or more levels of multiplexor devices. In addition, the fastpaths may selectively connect lower levels of multiplexor hierarchy to higher levels of multiplexor hierarchy and/or a DAC output node.
    Type: Grant
    Filed: February 20, 2009
    Date of Patent: January 11, 2011
    Assignee: International Business Machines Corporation
    Inventors: Joseph A. Iadanza, Benjamin T Voegeli
  • Patent number: 7829945
    Abstract: A gate stack comprising a uniform thickness gate dielectric, a gate electrode, and an oxygen-diffusion-resistant gate cap is formed on a semiconductor substrate. Thermal oxidation is performed only on the drain side of the gate electrode, while the source side is protected from thermal oxidation. A thermal oxide on the drain side sidewall of the gate electrode is integrally formed with a graded thickness silicon oxide containing gate dielectric, of which the thickness monotonically increases from the source side to the drain side. The thickness profile may be self-aligned to the drain side edge of the gate electrode, or may have a portion with a self-limiting thickness. The graded thickness profile may be advantageously used to form a lateral diffusion metal oxide semiconductor field effect transistor providing an enhanced performance.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: November 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Natalie B. Feilchenfeld, Jeffrey P. Gambino, Benjamin T. Voegeli, Michael J. Zierak
  • Patent number: 7732835
    Abstract: A P-N junction device and method of forming the same are disclosed. The P-N junction device may include a P-N diode, a PiN diode or a thyristor. The P-N junction device may have a monocrystalline or polycrystalline raised anode. In one embodiment, the P-N junction device results in a raised polycrystalline silicon germanium (SiGe) anode. In another embodiment, the P-N junction device includes a first terminal (anode) including a conductor layer positioned above an upper surface of a substrate and a remaining structure positioned in the substrate, the first terminal positioned over an opening in an isolation region; and a second terminal (cathode contact) positioned over the opening in the isolation region adjacent the first terminal. This latter embodiment reduces parasitic resistance and capacitance, and decreases the required size of a cathode implant area since the cathode contact is within the same STI opening as the anode.
    Type: Grant
    Filed: June 25, 2008
    Date of Patent: June 8, 2010
    Assignee: International Business Machines Corporation
    Inventors: Benjamin T. Voegeli, Steven H. Voldman