Abstract: Disclosed herein is a computer-implemented defect prediction method for a device manufacturing process involving processing a portion of a design layout onto a substrate, the method comprising: identifying a hot spot from the portion of the design layout; determining a range of values of a processing parameter of the device manufacturing process for the hot spot, wherein when the processing parameter has a value outside the range, a defect is produced from the hot spot with the device manufacturing process; determining an actual value of the processing parameter; determining or predicting, using the actual value, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the hot spot with the device manufacturing process.

Abstract: An iterative method of producing optimized setpoint data for controlling the actuation of elements of an array of individually controllable elements in a maskless system and systems therefore. The optimization is based on estimation of a device structure that can utilizes one or more of the following factors: the low-pass characteristics of the projection system, the configuration of the illumination system, and the process window properties.

Abstract: A method to determine an improved configuration for a lithography apparatus, a computer-readable medium for use in carrying out the method, and a lithography apparatus are disclosed. In an example, the method involves intelligent selection of one or more device features to measure and use in a routine to optimize the configuration of the lithography apparatus. According to an example, the method comprises imposing a target error profile to one or more device features for which measurement data is not sufficient, for example in a regions where a selected device feature is sparsely distributed.

Abstract: A system for generating and displaying images includes: (a) a plurality of active display modules; (b) a global controller; and (c) a global communication facility. Each active display module algorithmically generates and displays images depending on a respective local set of states. Each active display module updates its respective local set of states depending on a global state transition rule broadcasted by the global controller through the global communication facility. In an embodiment, the global controller broadcasts different global state transition rules over time. In another embodiment, the global controller has its own set of control states and determines a global state transition rule by applying a machine learning algorithm to control states of its own set of control states.

Abstract: A building element apparatus includes a display having physical pixels for displaying visual content; an embedded processing system for generating the visual content according to an image generation algorithm stored in a local or remote memory for execution by a processor of the processing system; and communication ports for communicating with adjacent building elements. The display is divided into display segments. The image generation algorithm, when executed by the processor, generates visual content depending on display segment data associated to display segments. The communication ports communicate display segment data associated to display segments with adjacent building elements. The image generation algorithm generates visual content in a way that takes into account display segment data associated to display segments of adjacent building elements.

Abstract: A method generates frame segments of an image frame depending on values of data elements included in a set of data elements. The method includes the acts of: (a) partitioning a plurality of tuples of values of data elements included in the set of data elements into a plurality of clusters of tuples; (b) classifying a reference tuple into a cluster of the plurality of clusters of tuples depending on a similarity metric; and (c) generating a new data value depending on classification data related to the classification of the reference tuple into a cluster of the plurality of clusters of tuples. The value of a reference data element is updated with the new data value. A frame segment can be generated depending on the new data value and then displayed in a display segment of a display.

Abstract: An iterative method of producing optimized setpoint data for controlling the actuation of elements of an array of individually controllable elements in a maskless system and systems therefore. The optimization is based on estimation of a device structure that can utilizes one or more of the following factors: the low-pass characteristics of the projection system, the configuration of the illumination system, and the process window properties.