Patents by Inventor Bernd W. Gotsmann
Bernd W. Gotsmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20100175156Abstract: A three-dimensional imaging and manipulation tool is provided. Techniques for creating a three-dimensional imaging and manipulation tool include combining high-resolution capability of a probe with three-dimensional imaging capability of a heater sensor. Also, techniques for positioning a nano-manipulation device relative to a surface are provided. The techniques include using a heater sensor for non-contact imaging, linking the heater sensor to the nano-manipulation device, and positioning the nano-manipulation relative device to a surface.Type: ApplicationFiled: January 7, 2009Publication date: July 8, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Rachel Cannara, Bernd W. Gotsmann, Abu Sebastian
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Patent number: 7749915Abstract: A method of protecting a polymeric layer from contamination by a photoresist layer. The method includes: (a) forming a polymeric layer over a substrate; (b) forming a non-photoactive protection layer over the polymeric layer; (c) forming a photoresist layer over the protection layer; (d) exposing the photoresist layer to actinic radiation and developing the photoresist layer to form a patterned photoresist layer, thereby exposing regions of the protection layer; (e) etching through the protection layer and the polymeric layer where the protection layer is not protected by the patterned photoresist layer; (f) removing the patterned photoresist layer in a first removal process; and (g) removing the protection layer in a second removal process different from the first removal process.Type: GrantFiled: March 31, 2008Date of Patent: July 6, 2010Assignee: International Business Machines CorporationInventors: Ute Drechsler, Urs T. Duerig, Jane Elizabeth Frommer, Bernd W. Gotsmann, James Lupton Hedrick, Armin W. Knoll, Tobias Kraus, Robert Dennis Miller
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Publication number: 20100085071Abstract: A system, device and method for electrically addressing an element include providing a thermoelectric layer in proximity with an area to be addressed and positioning a probe in proximity of the thermoelectric layer. Electrical activity is induced in the thermoelectric layer by applying heat from the probe. A response is caused in the area to be addressed.Type: ApplicationFiled: October 3, 2008Publication date: April 8, 2010Inventors: Rachel Cannara, Bernd W. Gotsmann
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Publication number: 20100059383Abstract: The present invention relates to a device for forming topographic features on a surface of a polymer layer comprising: a polymer layer (1); a substrate (2) comprising a conductor, a first surface (1a) of the polymer layer (1) being provided on the substrate (2); and at least one electrode (3) which, when the device is in use, interacts with a second surface (1b) of the polymer layer (1), wherein, when in use, the device is operable to apply a first electrical potential (P1) to the at least one electrode (3) relative to the substrate (2), thereby to cause a protrusion (4) to be formed on the second surface (1b) of the polymer layer (1).Type: ApplicationFiled: July 18, 2007Publication date: March 11, 2010Applicant: International Business Machines CorporationInventors: Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll
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Publication number: 20100026332Abstract: A device for sensing a position of a probe relative to a reference medium, the probe comprising a heater element with a temperature dependent electrical resistance and being adapted to determine probe position by measuring a parameter associated to a thermal relaxation time of the heater element.Type: ApplicationFiled: August 20, 2009Publication date: February 4, 2010Applicant: International Business Machines CorporationInventors: Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll
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Publication number: 20090256275Abstract: A method of repairing worn or blunt probe tips, attaching a desired tip material, or defining the registry of probe tips relative to planar surface, including: pressing a probe tip or an array of probe tips into a substrate pre-patterned with an array of tip-shaped molds, the molds containing a preceramic material that can bond to the worn probe tips by thermal activation, the substrate having a protective layer that prevents the preceramic material and/or thermally-activated ceramic material from bonding to the substrate; pressing the worn probe tips into the molds while heating the worn probe tips causing the preceramic material to bond to the worn probe tips and form a solid ceramic material; forming an array comprising a plurality of reconstructed probe tips that are sharper or consisting of a different material than the original worn or base probe tips; and reading and/or writing, with the array comprising the plurality of reconstructed probe tips, data that was unreadable and/or unwritable with the origType: ApplicationFiled: April 9, 2008Publication date: October 15, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Rachel Cannara, Bernd W. Gotsmann, Urs T. Duerig, Harish Bhaskaran, Armin W. Knoll
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Publication number: 20090255462Abstract: Device having features formed utilizing probe-based lithography, including: depositing a preceramic polymer on a substrate; writing nanoscale features in the polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into hardened, ceramic material, the chemical reaction activated with a prescribed activation energy supplied by heat and/or pressure applied by a probe tip; depositing new layers and continuing according to a desired three-dimensional pattern; by cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure mechanically and/or electrically; and where the ceramic pattern is made electrically conductive by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the write step in a chemically-active environment that supplies dopant atoms during the chemical reaction.Type: ApplicationFiled: November 17, 2008Publication date: October 15, 2009Applicant: International Business Machines CorporationInventors: Rachel Cannara, Bernd W. Gotsmann, Urs T. Duerig, Harish Bhaskaran, Armin W. Knoll
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Publication number: 20090185474Abstract: A method of storing data using data storage system having a positioning system for a micro-electromechanical system (“MEMS”) based data storage is provided. The method includes a moving MEMS-based scanner that interacts with a polymer medium to read, write and erase data. A first positioning system is coupled to the MEMS scanner to allow the storage of data over a defined area. A second positioning system is coupled to the first positioning system and the MEMS scanner to allow the use of a larger polymer medium. A plurality of storage modules is also provided to allow scalability of data storage.Type: ApplicationFiled: June 4, 2008Publication date: July 23, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll
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Publication number: 20090120172Abstract: The present invention provides a novel method for determining the mechanical properties of the surfaces of materials including thin films. Generally, the method is comprised of laterally scanning the surface of the film with an array of cantilever tips varying temperature, load and time to obtain a measurement of mechanical properties, such as hardness and glass transition temperature. The method can be used to obtain mechanical properties of films that would otherwise be unobtainable using standard methods.Type: ApplicationFiled: October 14, 2008Publication date: May 14, 2009Applicant: IBM CorporationInventors: Richard L. Bradshaw, Urs T. Duerig, Bernd W. Gotsmann
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Patent number: 7522511Abstract: The present invention provides data storage devices, systems and methods. An example device includes: a storage medium for storing data in the form of marks; and at least one probe. The probe(s) and storage medium are operable to move relative to each other, with each probe comprising a tip facing the storage medium and having a force creating unit associated thereto. The force creating units are operable to create a force acting between the tip and said storage medium. The data storage device is operable to erase an indentation mark in the storage medium by way of controlling the force creating unit for creating at least one erase force pulse with a force rise time being less than or equal to the order of 1 microsecond.Type: GrantFiled: June 22, 2005Date of Patent: April 21, 2009Assignee: International Business Machines CorporationInventors: Bernd W. Gotsmann, Urs T. Duerig, Charalamoos Pozidie, Hugo E. Rothuizen, Gerd K. Binnig
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Patent number: 7522512Abstract: Storing data by forming permanent indents in a preceramic polymer, on a substrate, via a chemical reaction transforming the polymer through permanent phase change into hardened, ceramic material, where the chemical reaction activation energy is supplied by heat and pressure applied by a nanoscale probe tip; reading data with the tip by obtaining a topographical signal during readout of the bits; reading data with the tip, where the substrate and ceramic material are conducting, while recording varying electrical resistance measured through the tip-sample contact as the tip slides along the surface; where a separate surface layer formed over the ceramic material including a polymeric thin film with cross-linking protects the tip during writing and readout; and where the substrate is a rigid wall material that can aid indentation by preventing the precursor polymer from accommodating stress applied by the tip with plastic deformation.Type: GrantFiled: April 9, 2008Date of Patent: April 21, 2009Assignee: International Business Machines CorporationInventors: Rachel Cannara, Bernd W. Gotsmann, Urs T. Duerig, Harish Bhaskaran, Armin W. Knoll
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Publication number: 20090100553Abstract: A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.Type: ApplicationFiled: December 17, 2008Publication date: April 16, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Michel Despont, Urs T. Duerig, Jane E. Frommer, Bernd W. Gotsmann, James L. Hedrick, Craig Jon Hawker, Robert D. Miller
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Patent number: 7491425Abstract: A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed is a method that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.Type: GrantFiled: October 29, 2004Date of Patent: February 17, 2009Assignee: International Business Machines CorporationInventors: Michel Despont, Urs T. Duerig, Jane E. Frommer, Bernd W. Gotsmann, James L. Hedrick, Craig Jon Hawker, Robert D. Miller
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Publication number: 20090011253Abstract: The present invention relates a method of producing a data storage medium comprising the steps of: a) coating a layer comprising a polymer material onto at least a part of a template surface thereby to obtain a modified template surface; b) clamping the modified template surface produced in step (a) with a target surface thereby to obtain an assembly; and c) introducing a liquid to an environment of the assembly obtained in step (b) thereby to transfer the layer comprising the polymer material of the modified template surface onto at least an adjacent region on the target surface.Type: ApplicationFiled: September 18, 2008Publication date: January 8, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll
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Patent number: 7474602Abstract: A data storage device is introduced. The data storage device comprises a write head. The write head comprises a heating element and a tip. The write head scans a data storage medium, wherein in an operation mode of the data storage device the tip is in contact with a surface of the data storage medium and heat is applied to the tip by means of the heating element. In order to achieve a good thermal contact between the tip and the data storage medium, the tip comprises a carbon element that is at least partially in contact with the surface in that operation mode. Such a write head can also be applied in the field of scanning probe lithography.Type: GrantFiled: May 24, 2004Date of Patent: January 6, 2009Assignee: International Business Machines CorporationInventors: Urs T. Duerig, Bernd W. Gotsmann, Mark A. Lantz, Peter Vettiger
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Patent number: 7471614Abstract: A method reading, writing, and erasing data includes bringing a thermal-mechanical probe into proximity with a layer of cross-linked polymeric material to induce a deformed region at a point in the film, thereby writing information; bringing a thermal-mechanical probe into proximity with the deformed region, thereby reading information; and bringing a thermal-mechanical probe into proximity with the deformed region, further deforming it in such a way to eliminate the deformed region, thereby erasing the information; and repeating the storing, reading, and erasing steps at points in the film.Type: GrantFiled: August 29, 2003Date of Patent: December 30, 2008Assignee: International Business Machines CorporationInventors: Jane Frommer, Robert D. Miller, Craig Hawker, Urs T. Duerig, Bernd W Gotsmann, Peter Vettiger, Gerd K. Binnig, Victor Yee-Way Lee
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Publication number: 20080316904Abstract: The present invention relates to a method of reducing the wear of a tip of a probe when the tip is in contact with a surface of a substrate and when the probe is mounted on a support structure. A method is provided where a load force is applied to the probe, thereby causing the tip to be maintained substantially in contact with the substrate surface and a modulation step where the e magnitude of the load force is modulated at a modulation frequency. The modulation frequency is selected to be greater than a fundamental vibration frequency of the support structure on which the probe is mounted.Type: ApplicationFiled: May 7, 2008Publication date: December 25, 2008Inventors: Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll, Mark Alfred Lantz
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Publication number: 20080292850Abstract: The present invention relates to a data storage device comprising: a polymer layer for storing data in the form of topographic features; a substrate comprising a conductor, a first surface of the polymer layer being provided on the substrate; and at least one probe which, when the device is in use, interacts with a second surface of the polymer layer, wherein, when in use, the data storage device is operable to apply a first electrical potential to the at least one probe relative to the substrate, thereby to cause a protrusion to be formed on the second surface of the polymer layer.Type: ApplicationFiled: May 30, 2008Publication date: November 27, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Bernd W. Gotsmann, Armin W. Knoll, Urs T. Duerig
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Patent number: 7452570Abstract: Probe-based lithography, including: depositing a preceramic polymer on a substrate; writing nanoscale features in the polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into hardened, ceramic material, the chemical reaction activated with a prescribed activation energy supplied by heat and/or pressure applied by a probe tip; then depositing new layers and continuing according to a desired three-dimensional pattern; either by (a) removing unactivated preceramic polymer utilizing a removal solvent, or (b) cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure mechanically and/or electrically; and where the ceramic pattern is made electrically conductive by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the write step in a chemically-active environment that supplies dopant atoms during the chemical reaction.Type: GrantFiled: April 9, 2008Date of Patent: November 18, 2008Assignee: International Business Machines CorporationInventors: Rachel Cannara, Bernd W. Gotsmann, Urs T. Duerig, Harish Bhaskaran, Armin W. Knoll
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Patent number: 7451636Abstract: The present invention provides a novel method for determining the mechanical properties of the surfaces of materials including thin films. Generally, the method is comprised of laterally scanning the surface of the film with an array of cantilever tips varying temperature, load and time to obtain a measurement of mechanical properties, such as hardness and glass transition temperature. The method can be used to obtain mechanical properties of films that would otherwise be unobtainable using standard methods.Type: GrantFiled: February 21, 2006Date of Patent: November 18, 2008Assignee: International Business Machines CorporationInventors: Richard L. Bradshaw, Urs T. Duerig, Bernd W. Gotsmann