Patents by Inventor Birol Kuyel

Birol Kuyel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for improving an RF excited reactive gas plasma
    Patent number: 4333814
    Abstract: The quality of a plasma etching process is improved by applying a DC potential (28') to one of the energizing electrodes (12') in the reaction chamber (11').The DC potential withdraws a small current from the plasma which causes the reaction to produce a uniform, controllable self-bias on the workpiece placed on the opposite (or second) electrode.
    Type: Grant
    Filed: December 26, 1979
    Date of Patent: June 8, 1982
    Assignee: Western Electric Company, Inc.
    Inventor: Birol Kuyel
  • Methods and apparatus for generating plasmas
    Patent number: 4282267
    Abstract: An RF-excited radial-flow, cylindrical plasma reactor (10) includes a toroidal waveguide (17) of rectangular cross-section connected to a microwave source (21). One of the reactive species (37) is flowed through the waveguide and pre-ionized, thus, permitting independent control over the activation of both reactive species.
    Type: Grant
    Filed: March 5, 1980
    Date of Patent: August 4, 1981
    Assignee: Western Electric Co., Inc.
    Inventor: Birol Kuyel