Patents by Inventor Bo H. Vanderberg

Bo H. Vanderberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Power supply hardening for ion beam systems
    Patent number: 6452196
    Abstract: An improved ion implantation system is provided by the present invention. The system includes at least one power supply for providing voltage to at least one electrode and, a switching system operatively coupled between the at least one power supply and the at least one electrode. The switching system decouples the at least one power supply and the at least one electrode at a predetermined threshold to mitigate overload of the at least one power supply.
    Type: Grant
    Filed: December 20, 1999
    Date of Patent: September 17, 2002
    Assignee: Axcelis Technologies, Inc.
    Inventor: Bo H. Vanderberg