Abstract: A sense amplifier includes a sense amplifying unit, first and second isolation units, and first and second offset cancellation unit. The sense amplifying unit includes a first P-type metal-oxide-semiconductor (PMOS) transistor, a second PMOS transistor, a first N-type metal-oxide-semiconductor (NMOS) transistor, and a second NMOS transistor. In a layout of the sense amplifier, the first and second PMOS transistors are disposed in a central region of the sense amplifier, the first and second NMOS transistors are disposed at opposite sides of the sense amplifier from each other, the first isolation unit and the first offset cancellation unit are disposed between the first PMOS transistor and the first NMOS transistor, and the second isolation unit and the second offset cancellation unit are disposed between the second PMOS transistor and the second NMOS transistor. In other layouts, the locations of the PMOS transistors and NMOS transistors may be reversed.

Abstract: A sense amplifier includes a sense amplifying unit, first and second isolation units, and first and second offset cancellation unit. The sense amplifying unit includes a first P-type metal-oxide-semiconductor (PMOS) transistor, a second PMOS transistor, a first N-type metal-oxide-semiconductor (NMOS) transistor, and a second NMOS transistor. In a layout of the sense amplifier, the first and second PMOS transistors are disposed in a central region of the sense amplifier, the first and second NMOS transistors are disposed at opposite sides of the sense amplifier from each other, the first isolation unit and the first offset cancellation unit are disposed between the first PMOS transistor and the first NMOS transistor, and the second isolation unit and the second offset cancellation unit are disposed between the second PMOS transistor and the second NMOS transistor. In other layouts, the locations of the PMOS transistors and NMOS transistors may be reversed.

Abstract: A sense amplifier includes a sense amplifying unit, first and second isolation units, and first and second offset cancellation unit. The sense amplifying unit includes a first P-type metal-oxide-semiconductor (PMOS) transistor, a second PMOS transistor, a first N-type metal-oxide-semiconductor (NMOS) transistor, and a second NMOS transistor. In a layout of the sense amplifier, the first and second PMOS transistors are disposed in a central region of the sense amplifier, the first and second NMOS transistors are disposed at opposite sides of the sense amplifier from each other, the first isolation unit and the first offset cancellation unit are disposed between the first PMOS transistor and the first NMOS transistor, and the second isolation unit and the second offset cancellation unit are disposed between the second PMOS transistor and the second NMOS transistor. In other layouts, the locations of the PMOS transistors and NMOS transistors may be reversed.

Abstract: A layout structure of a bit line sense amplifier in a semiconductor memory device includes a first bit line sense amplifier which is connected to a first bit line and a first complementary bit line, and is controlled via a first control line and a second control line. The first control line is connected to a first node of the first bit line sense amplifier and the second control line is connected to a second node of the first bit line sense amplifier, and the first bit line sense amplifier includes at least one pair of transistors configured to share any one of a first active region corresponding to the first node and a second active region corresponding to the second node.

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a first keeper transistor that is connected to a first word line. The semiconductor memory device includes a second keeper transistor that is connected to a second word line. The first keeper transistor and the second keeper transistor have a merged channel. In some embodiments, the first keeper transistor and the second keeper transistor are in a sub-word line driver.

Abstract: A sense amplifier includes a sense amplifying unit, first and second isolation units, and first and second offset cancellation unit. The sense amplifying unit includes a first P-type metal-oxide-semiconductor (PMOS) transistor, a second PMOS transistor, a first N-type metal-oxide-semiconductor (NMOS) transistor, and a second NMOS transistor. In a layout of the sense amplifier, the first and second PMOS transistors are disposed in a central region of the sense amplifier, the first and second NMOS transistors are disposed at opposite sides of the sense amplifier from each other, the first isolation unit and the first offset cancellation unit are disposed between the first PMOS transistor and the first NMOS transistor, and the second isolation unit and the second offset cancellation unit are disposed between the second PMOS transistor and the second NMOS transistor. In other layouts, the locations of the PMOS transistors and NMOS transistors may be reversed.

Abstract: A memory device including a memory cell array region, includes, column selection signal lines formed in a first column conduction layer of the memory cell array region and extending in a column direction, global input-output data lines formed in a second column conduction layer of the memory cell array region different from the first column conduction layer and extending in the column direction and power lines formed in a shield conduction layer of the memory cell array region between the first column conduction layer and the second column conduction layer. The noises in the signal lines and the power lines may be reduced and performance of the memory device may be enhanced by forming the column selection signal lines and the global input-output data lines in different column conduction layers and forming the power lines in the shield conduction layer between the column conduction layers.

Abstract: A sense amplifier includes a sense amplifying unit, first and second isolation units, and first and second offset cancellation unit. The sense amplifying unit includes a first P-type metal-oxide-semiconductor (PMOS) transistor, a second PMOS transistor, a first N-type metal-oxide-semiconductor (NMOS) transistor, and a second NMOS transistor. In a layout of the sense amplifier, the first and second PMOS transistors are disposed in a central region of the sense amplifier, the first and second NMOS transistors are disposed at opposite sides of the sense amplifier from each other, the first isolation unit and the first offset cancellation unit are disposed between the first PMOS transistor and the first NMOS transistor, and the second isolation unit and the second offset cancellation unit are disposed between the second PMOS transistor and the second NMOS transistor. In other layouts, the locations of the PMOS transistors and NMOS transistors may be reversed.

Abstract: A sense amplifier includes a sense amplifying unit, first and second isolation units, and first and second offset cancellation unit. The sense amplifying unit includes a first P-type metal-oxide-semiconductor (PMOS) transistor, a second PMOS transistor, a first N-type metal-oxide-semiconductor (NMOS) transistor, and a second NMOS transistor. In a layout of the sense amplifier, the first and second PMOS transistors are disposed in a central region of the sense amplifier, the first and second NMOS transistors are disposed at opposite sides of the sense amplifier from each other, the first isolation unit and the first offset cancellation unit are disposed between the first PMOS transistor and the first NMOS transistor, and the second isolation unit and the second offset cancellation unit are disposed between the second PMOS transistor and the second NMOS transistor. In other layouts, the locations of the PMOS transistors and NMOS transistors may be reversed.

Abstract: A variable resistance memory device including a first electrode line; a cell structure including a variable resistance layer on the first electrode line and a first blocking layer protecting the variable resistance layer; and a second electrode line on the cell structure, wherein the first blocking layer is on at least one of an upper surface, a lower surface, and the upper and lower surfaces of the variable resistance layer, and the first blocking layer includes a metal layer or a carbon-containing conductive layer.

Abstract: A memory device including a memory cell array region, includes, column selection signal lines formed in a first column conduction layer of the memory cell array region and extending in a column direction, global input-output data lines formed in a second column conduction layer of the memory cell array region different from the first column conduction layer and extending in the column direction and power lines formed in a shield conduction layer of the memory cell array region between the first column conduction layer and the second column conduction layer. The noises in the signal lines and the power lines may be reduced and performance of the memory device may be enhanced by forming the column selection signal lines and the global input-output data lines in different column conduction layers and forming the power lines in the shield conduction layer between the column conduction layers.

Abstract: In method of manufacturing a semiconductor memory device, a selection layer and a variable resistance layer may be sequentially formed on a substrate. A preliminary first mask extending in a first direction may be formed on the variable resistance layer. An upper mask extending in a second direction crossing the first direction may be formed on the variable resistance layer and the preliminary first mask. The preliminary first mask may be etched using the upper mask as an etching mask to form a first mask having a pillar shape. The variable resistance layer and the selection layer may be anisotropically etched using the first mask as an etching mask to form a pattern structure including a variable resistance pattern and selection pattern sequentially stacked. The pattern structure may have a pillar shape. Damages to the pattern structure may decrease.

Abstract: A plasma generation apparatus is provided. The plasma generation apparatus includes a chamber defining a reaction space that can be isolated from an external environment, an upper electrode provided in an upper portion of the chamber, a lower electrode provided in a lower portion of the chamber, a sidewall electrode provided at a sidewall of the chamber, a radio frequency (RF) pulse power supplier configured to supply RF pulse power to at least one selected from the upper electrode and the lower electrode, and a direct current (DC) pulse power supplier configured to supply DC pulse power to the sidewall electrode.

Abstract: There is provided a bit line equalizing circuit including: an active region; a first bit line disposed on the active region in a first direction; a second bit line disposed on the active region in the first direction; a gate pattern including a first pattern disposed on the active region in a second direction crossing the first direction, and a second pattern extended from one side of the first pattern to be disposed in the first direction, and formed in a stair shape; a first contact disposed at one side of the first pattern and one side of the second pattern, and configured to connect the active region and the first bit line; a second contact disposed at one side of the first pattern and the other side of the second pattern, and configured to connect the active region and the second bit line; and a third contact disposed at the other side of the first pattern, and configured to provide a predetermined voltage to the active region.

Abstract: There is provided a bit line equalizing circuit including: an active region; a first bit line disposed on the active region in a first direction; a second bit line disposed on the active region in the first direction; a gate pattern including a first pattern disposed on the active region in a second direction crossing the first direction, and a second pattern extended from one side of the first pattern to be disposed in the first direction, and formed in a stair shape; a first contact disposed at one side of the first pattern and one side of the second pattern, and configured to connect the active region and the first bit line; a second contact disposed at one side of the first pattern and the other side of the second pattern, and configured to connect the active region and the second bit line; and a third contact disposed at the other side of the first pattern, and configured to provide a predetermined voltage to the active region.

Abstract: A method of manufacturing a semiconductor device including a plurality of hole patterns is disclosed. The method includes: forming a plurality of first line patterns and a plurality of first space patterns extending in a first direction; forming a plurality of second line patterns and a plurality of second space patterns extending in a second direction, on the plurality of first line patterns and the plurality of first space patterns; forming a plurality of first hole patterns where the plurality of first space patterns and the plurality of second space patterns cross each other; and forming a plurality of second hole patterns where the plurality of first line patterns and the plurality of second line patterns cross each other.

Abstract: A method of manufacturing a semiconductor device including a plurality of hole patterns is disclosed. The method includes: forming a plurality of first line patterns and a plurality of first space patterns extending in a first direction; forming a plurality of second line patterns and a plurality of second space patterns extending in a second direction, on the plurality of first line patterns and the plurality of first space patterns; forming a plurality of first hole patterns where the plurality of first space patterns and the plurality of second space patterns cross each other; and forming a plurality of second hole patterns where the plurality of first line patterns and the plurality of second line patterns cross each other.