Patents by Inventor Brian Burrows

Brian Burrows has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080072820
    Abstract: The present invention provides methods and apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell to be used in a cluster tool. The modular semiconductor processing cell of the present invention comprises a chamber having an inject cap, a gas panel module configured to supply one or more processing gas to the chamber through the inject cap, wherein the gas panel module is position adjacent the inject cap. The processing cell further comprises a lamp module positioned below the chamber. The lamp module comprises a plurality of vertically oriented lamps.
    Type: Application
    Filed: June 25, 2007
    Publication date: March 27, 2008
    Inventors: Brian Burrows, Craig Metzner, Dennis Demars, Roger Anderson, Juan Chacin, David Carlson, David Ishikawa, Jeffrey Campbell, Richard Collins, Keith Magill, Imran Afzal
  • Patent number: 4092462
    Abstract: An electrode grid for lead accumulators, said grid being formed from a lead alloy free from antimony and consisting of tellurium, arsenic and silver in a total concentration of at most 0.1% by weight, at least 0.1% tin by weight of the alloy, and the balance pure lead.
    Type: Grant
    Filed: April 11, 1977
    Date of Patent: May 30, 1978
    Assignee: Battelle Memorial Institute
    Inventors: Herbert Giess, Brian Burrows, Marie-Michelle Janssoone