Abstract: A method of reducing the quantity of fish being pumped by a fish pump whilst maintaining a sufficient flow rate such that fish cannot swim back upstream into the pump includes providing an apparatus having: a primary communication channel for delivery of water and fish therethrough; a fish pump having an inlet and an outlet and arranged on the primary communication channel and configured to pump water and fish along the primary communication channel; and an upstream bypass chamber arranged on the primary communication channel upstream of the fish pump inlet; wherein the upstream bypass chamber is configured to mix a flow of water into the primary communication channel; providing fish and water to the primary communication channel; operating the fish pump to pump the fish and water along the primary communication channel; and mixing a flow of water into the primary communication channel at the upstream bypass chamber.

Abstract: A speed-based system for controlling a pump displacement to control a pump flow rate of a hydraulic pump in a vehicle, such as a hybrid. The system includes a plurality of sensors, a controller, and a hydraulic pump. The controller is configured to receive data from the sensors, ascertain a speed of the vehicle, determine a target pump displacement, and transmit the target pump displacement. The target pump displacement is less than a predetermined maximum value when the speed of the vehicle is greater than a first predefined threshold, and equal to the predetermined maximum value when the speed of the vehicle is less than or equal to the first predefined threshold. The hydraulic pump is configured to ascertain an actual pump displacement, receive the target pump displacement from the controller, and alter the actual pump displacement to the target pump displacement.

Abstract: A speed-based system for controlling a pump displacement to control a pump flow rate of a hydraulic pump in a vehicle, such as a hybrid. The system includes a plurality of sensors, a controller, and a hydraulic pump. The controller is configured to receive data from the sensors, ascertain a speed of the vehicle, determine a target pump displacement, and transmit the target pump displacement. The target pump displacement is less than a predetermined maximum value when the speed of the vehicle is greater than a first predefined threshold, and equal to the predetermined maximum value when the speed of the vehicle is less than or equal to the first predefined threshold. The hydraulic pump is configured to ascertain an actual pump displacement, receive the target pump displacement from the controller, and alter the actual pump displacement to the target pump displacement.

Abstract: Various methods, carrier media, and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data are provided. One computer-implemented method includes combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system. The method also includes detecting defects on the specimen by applying a two-dimensional threshold to the combined data. The two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.

Abstract: Various methods, carrier media, and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data are provided. One computer-implemented method includes combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system. The method also includes detecting defects on the specimen by applying a two-dimensional threshold to the combined data. The two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.

Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.

Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.

Abstract: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.

Abstract: An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity/autoposition channel, an alignment/registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line.

Abstract: An inspection apparatus for a light diffracting surface employs a planar array of individually addressable light valves for use as a spatial filter in an imaged Fourier plane of a diffraction pattern, with valves having a stripe geometry corresponding to positions of members of the diffraction pattern, blocking light from those members. The remaining valve stripes, i.e. those not blocking light from diffraction order members, are open for transmission of light. Light directed onto the surface, such as a semiconductor wafer, forms elongated curved diffraction orders from repetitive patterns of circuit features. The curved diffraction orders are transformed to linear orders by a Fourier transform lens. The linear diffraction orders from repetitive patterns of circuit features are blocked, while light from non-repetitive features, such as dirt particles or defects is allowed to pass through the light valves to a detector.

Abstract: A particle imager and method for imaging particles on surfaces of substrates. A surface is raster scanned by a collimated light beam and particles on the surface are detected by the scattered light caused by the particles. During a scan path the intensity of the scattered light is measured forming intensity traces and location addresses for the detected particles. Data from each scan path is stored in memory. The imager is pre-calibrated with a test wafer having light scattering marker points spaced at known positions thereon. Scanning the test wafer, a clock measures time elapsed from a start position to each marker point. The corresponding elapsed times and known address locations are stored in memory for reference during data collection.

Abstract: Disclosed is a test probe [10] for testing a test device [not shown], also known as a device under test, while precisely controlling the force exerted by the test probe [10] on the test device. Included is a translation ring [18] as well as a carrier [12] formed to have at least a first side and a second side. The support means [12] is coupled to the translation ring [18]. Also included is at least one flexure pivot [14] for delivering a force to a test device; the flexure pivot [14] is coupled to the first side of the carrier. A membrane [16] is coupled to the second side of the carrier. Finally, at least one signal contact bump [24] is mounted on the membrane [16] for communicating an electric current between the test probe [10] and the test device [not shown].