Patents by Inventor BRIJ DATTA

BRIJ DATTA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9991101
    Abstract: Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and rotatable about the central axis, a closed loop magnetic pole coupled to a first surface of the shunt plate and disposed 360 degrees along a peripheral edge of the shunt plate, and an open loop magnetic pole coupled at a the first surface of the shunt plate wherein the open loop magnetic pole comprises two rows of magnets disposed about the central axis.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: June 5, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: William Johanson, Brij Datta, Fuhong Zhang, Adolph Miller Allen, Yu Y. Liu, Prashanth Kothnur
  • Publication number: 20160035547
    Abstract: Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and rotatable about the central axis, a closed loop magnetic pole coupled to a first surface of the shunt plate and disposed 360 degrees along a peripheral edge of the shunt plate, and an open loop magnetic pole coupled at a the first surface of the shunt plate wherein the open loop magnetic pole comprises two rows of magnets disposed about the central axis.
    Type: Application
    Filed: May 29, 2015
    Publication date: February 4, 2016
    Inventors: WILLIAM JOHANSON, BRIJ DATTA, FUHONG ZHANG, ADOLPH MILLER ALLEN, YU Y. LIU, PRASHANTH KOTHNUR
  • Patent number: D797067
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: September 12, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Fuhong Zhang, William Johanson, Yu Liu, Adolph Miller Allen, Brij Datta, Keith A. Miller
  • Patent number: D825504
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: August 14, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Fuhong Zhang, William Johanson, Yu Liu, Adolph Miller Allen, Brij Datta, Keith A. Miller