Publication number: 20200328342
Abstract: A method for healing defects in a layer of composition ABO3 where A consists of at least one element selected from: Li, Na, K, H, Ca, Mg, Ba, Sr, Pb, La, Bi, Y, Dy, Gd, Tb, Ce, Pr, Nd, Sm, Eu, Ho, Zr, Sc, Ag, Tl and B consists of at least one element selected from: Nb, Ta, Sb, Ti, Zr, Sn, Ru, Fe, V, Sc, C, Ga, Al, Si, Mn, Zr, Tl, the layer being obtained by a layer transfer method in which ionic species are implanted into a substrate of composition ABO3 so as to form a weakened zone delineating the layer, the substrate then being detached along the weakened zone in order to obtain a layer that is detached from the rest of the donor substrate, wherein the method comprises exposing the layer to a medium containing ions of a constituent element A so as to make the ions penetrate into the transferred layer.
Type:
Application
Filed:
May 24, 2017
Publication date:
October 15, 2020
Inventor:
Bruno Ghyselen
Publication number: 20200259069
Abstract: A method for producing a layer of composition AA?BO3, where A is composed of at least one element selected from: Li, Na, K, Ca, Mg, Ba, Sr, Pb, La, Bi, Y, Dy, Gd, Tb, Ce, Pr, Nd, Sm, Eu, Ho, Zr, Sc, Ag and Tl, and B is composed of at least one element selected from: Nb, Ta, Sb, Ti, Zr, Sn, Ru, Fe, V, Sc, C, Ga, Al, Si, Mn Zr and Tl, wherein the method comprises the steps of: providing a donor substrate of composition ABO3, forming a layer of composition ABO3 by thinning the donor substrate, and, before and/or after the thinning step, exposing the ABO3 layer to a medium containing ions of an element A? belonging to the same list of elements as A, A? being different from A, such that the ions penetrate into the layer to form a layer of composition AA?BO3.
Type:
Application
Filed:
May 24, 2017
Publication date:
August 13, 2020
Applicant:
Soitec
Inventor:
Bruno Ghyselen