Abstract: A method for manufacturing a cell capacitor includes a step of forming an upper electrode and a trench for the lower electrode simultaneously in a single mask step. Further steps for manufacturing a cell capacitor includes forming a storage node contact by employing a predefined plate silicon layer and forming a capacitor dielectric using the storage contact node, as a result, it becomes possible to resolve “lift-off” problems, twin-bit failures, and misalignment.

Abstract: A method of manufacturing a DRAM device comprises forming a bit line interlayer insulating layer over a substrate over which a bit line pattern is formed; planarizing the bit line interlayer insulating layer; forming enlarged grooves exposing a conductive layer of the bit line pattern; forming bit lines; forming a silicon nitride layer over the substrate; forming a silicon nitride pattern having silicon nitride spacers formed on side walls of the enlarged grooves positioned on the conductive layer; forming the bit lines at the enlarged width portions of the bit line pattern; forming storage node contacts, storage nodes, a dielectric layer, and plate electrodes at a cell area; forming a wiring interlayer insulating layer on the substrate; forming metal contact holes; and forming plugs filling the metal contact holes.

Abstract: A method of manufacturing a DRAM device comprises forming a bit line interlayer insulating layer over a substrate over which a bit line pattern is formed; planarizing the bit line interlayer insulating layer; forming enlarged grooves exposing a conductive layer of the bit line pattern; forming bit lines; forming a silicon nitride layer over the substrate; forming a silicon nitride pattern having silicon nitride spacers formed on side walls of the enlarged grooves positioned on the conductive layer; forming the bit lines at the enlarged width portions of the bit line pattern; forming storage node contacts, storage nodes, a dielectric layer, and plate electrodes at a cell area; forming a wiring interlayer insulating layer on the substrate; forming metal contact holes; and forming plugs filling the metal contact holes.

Abstract: The substrate according to the present invention is comprised of a silver/gold/grain element alloy layer, wherein the alloy forms an outside layer of the product. The grain element is selected from a group consisting of selenium, antimony, bismuth, nickel, cobalt, indium and combination thereof. The present invention has a particular application in forming the outside layer of various items, including a lead frame, a ball grid array, a header, a printed circuit board, a reed switch and a connector.

Abstract: The substrate according to the present invention is comprised of a silver/gold/grain element alloy layer, wherein the alloy forms an outside layer of the product. The grain element is selected from a group consisting of selenium, antimony, bismuth, nickel, cobalt, indium and combination thereof. The present invention has a particular application in forming the outside layer of various items, including a lead frame, a ball grid array, a header, a printed circuit board, a reed switch and a connector.

Abstract: A capacitor in a semiconductor substrate with a first insulating layer deposited thereon. The capacitor is formed by etching the first insulating layer to simultaneously form first and second self-aligned contact pads to be electrically connected to the substrate. A second insulating layer is deposited over the first insulating layer. Next, a storage node landing pad is formed in the second insulating layer between bit lines to be electrically connected to the first self-align contact pad. Following the formation of the landing pad, a third insulating layer is formed over the second insulating layer with a thickness large enough to provide a desired capacitance. Then, the third insulating layer is etched until the upper surface of the landing pad is exposed so as to form a storage node contact hole. A first conductive layer is deposited on the surfaces of the storage node contact hole and etched to form capacitor lower electrodes.

Abstract: A method for forming a self-aligned contact includes forming a second insulating layer, on a first insulating layer including a first self-aligned contact pad formed on a semiconductor substrate, forming a conductive architecture on the second insulating layer, and forming a second self-aligned contact pad on both sides of the conductive architecture. The conductive architecture is covered with a material layer having an etch selectivity with respect to the second insulating layer and the second self-aligned contact pad is electrically connected to the first self-aligned contact pad. Thus, a self-aligned contact pad is formed with two layers. Accordingly, the contact is self-aligned to a gate electrode and a bit line, thereby preventing shorts generated by misalignment. Further, the etching thickness is reduced while etching an oxide layer to form a storage node contact hole, thereby suppressing shorts and reducing the critical dimension of a storage node contact.

Abstract: A method for forming a fine pattern in a semiconductor device removes roughness from a pattern produced in a fine pattern fabrication process using a silylation process as being one kind of a TSI process, eliminates smoothly a photosensitive film residue caused by a residue silylation layer remained on a-non-pattern area, and increases a margin of a lithography process. To achieve the foregoing, the method performs an etching process with a fluorine/oxygen mixture gas so as to remove a thin oxide film being formed on the non-pattern area after a silylation process, enables an edge portion of a silylation region to be planarized so as to prevent the pattern from becoming rough, and forms a photosensitive film pattern by developing the photosensitive film with oxygen plasma. Thereafter, the photosensitive film residue is etched again with a mixture gas of fluorine/oxygen, thereby increasing a fabrication margin of the fine pattern.