Abstract: Provided is a method of fabricating a semiconductor device. The method includes forming an oxide film on a target layer, forming a first mask film on the oxide film, wherein the first mask film contains a semiconductor material and has a first thickness and a first etch selectivity with respect to the oxide film, forming a second mask film on the first mask film, wherein the second mask film contains a metal and has a second thickness smaller than the first thickness and a second etch selectivity larger than the first etch selectivity with respect to the oxide film, forming a second mask film pattern by patterning the second mask film, forming a first mask film pattern by patterning the first mask film, etching some portions of the oxide film by using the second mask film pattern as an etch mask film, and etching the rest of the oxide film by using the first mask film pattern as an etch mask film to form a hole, wherein the target layer is exposed via the hole.

Abstract: Provided is a method of fabricating a semiconductor device. The method includes forming an oxide film on a target layer, forming a first mask film on the oxide film, wherein the first mask film contains a semiconductor material and has a first thickness and a first etch selectivity with respect to the oxide film, forming a second mask film on the first mask film, wherein the second mask film contains a metal and has a second thickness smaller than the first thickness and a second etch selectivity larger than the first etch selectivity with respect to the oxide film, forming a second mask film pattern by patterning the second mask film, forming a first mask film pattern by patterning the first mask film, etching some portions of the oxide film by using the second mask film pattern as an etch mask film, and etching the rest of the oxide film by using the first mask film pattern as an etch mask film to form a hole, wherein the target layer is exposed via the hole.

Abstract: A plasma processing apparatus includes a chamber, a first electrode disposed in the chamber configured to receive a substrate loaded on the first electrode. A second electrode disposed in the chamber is opposed to the first electrode, and an RF power source is configured to switch between an on-state and an off-state. The RF power source supplies a source RF power to the first or the second electrode and supplies a bias RF power to the first electrode in the on-state. A first DC voltage supply alternately supplies a first DC voltage of negative polarity and a second DC voltage of negative polarity to the second electrode depending status of the first RF power source. The second DC voltage supply is turned on between first and second cycles where the first DC voltage is output to supply a third DC voltage of positive polarity to the first electrode.

Abstract: A subject-based ranking determining method and system based on an interaction between a writer and a reader. A subject-based ranking determining method may include evaluating a writer that creates content of a corresponding subject for each subject based on the corresponding subject; and providing a search result in which an evaluation result of the writer on a subject corresponding to an input query is applied to a content ranking in response to input of the query.

Abstract: Provided is a method of fabricating a semiconductor device. The method includes forming an oxide film on a target layer, forming a first mask film on the oxide film, wherein the first mask film contains a semiconductor material and has a first thickness and a first etch selectivity with respect to the oxide film, forming a second mask film on the first mask film, wherein the second mask film contains a metal and has a second thickness smaller than the first thickness and a second etch selectivity larger than the first etch selectivity with respect to the oxide film, forming a second mask film pattern by patterning the second mask film, forming a first mask film pattern by patterning the first mask film, etching some portions of the oxide film by using the second mask film pattern as an etch mask film, and etching the rest of the oxide film by using the first mask film pattern as an etch mask film to form a hole, wherein the target layer is exposed via the hole.

Abstract: A method for fabricating a semiconductor device is disclosed.

Abstract: A method for fabricating a semiconductor device is disclosed.

Abstract: Provided are a system and method for providing a document based on a personal network. The document providing system may include a community searching unit to search for a community associated with a first document prepared by a first user, a document registration unit to register the first document in the searched community, and to receive a second document, associated with the first document, registered by a second user included in the community, and a document providing unit to provide the second document associated with the first document. According to embodiments of the present invention, a response that the first user may desire may be provided by receiving a response, registered by the second user included in the community associated with the first user, with respect to the document prepared by the first user.

Abstract: A system and method for providing a search result based on a personal network are disclosed. The search result providing system may include a search term reception unit, a personal network extraction unit, and a search result providing unit which may receive a search term from a user. The personal network extraction unit may extract at least one of a personal network associated with the search term, and a personal network associated with the user. The search result providing unit may provide documents associated with the personal networks as a search result of the search term. A search result optimized for the user may be provided to the user by searching for information corresponding to the search term from communities joined by another user having similar interests to that of the user, or communities joined by the user, based on personal networks of the user.

Abstract: Provided is a field effect transistor including a drain region, a source region, and a channel region. The field effect transistor may further include a gate electrode on or surrounding at least a portion of the channel region, and a gate dielectric layer between the channel region and the gate electrode. A portion of the channel region adjacent the source region has a sectional area smaller than that of another portion of the channel region adjacent the drain region.

Abstract: Provided are a system and method for providing a document based on a personal network. The document providing system may include a community searching unit to search for a community associated with a first document prepared by a first user, a document registration unit to register the first document in the searched community, and to receive a second document, associated with the first document, registered by a second user included in the community, and a document providing unit to provide the second document associated with the first document. According to embodiments of the present invention, a response that the first user may desire may be provided by receiving a response, registered by the second user included in the community associated with the first user, with respect to the document prepared by the first user.

Abstract: A system and method for providing a search result based on a personal network are disclosed. The search result providing system may include a search term reception unit, a personal network extraction unit, and a search result providing unit which may receive a search term from a user. The personal network extraction unit may extract at least one of a personal network associated with the search term, and a personal network associated with the user. The search result providing unit may provide documents associated with the personal networks as a search result of the search term. A search result optimized for the user may be provided to the user by searching for information corresponding to the search term from communities joined by another user having similar interests to that of the user, or communities joined by the user, based on personal networks of the user.

Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods.

Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods.

Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model, is disclosed. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method.

Abstract: A chemical solution dispensing device adapted for use with photo spinner equipment is disclosed. The device includes a nozzle adapted to spray chemical solution onto a wafer, a pressure sensor associated with the nozzle and adapted to sense a spraying pressure and generate a pressure value corresponding to the sensed spraying pressure, and a controller adapted to receive the pressure value, compare the received pressure value to a predetermined threshold pressure value, and generate an interlock signal when the received pressure value exceeds the predetermined threshold pressure value.

Abstract: Provided are an overlay mark of a semiconductor device and a semiconductor device including the overlay mark. The overlay mark includes: reference marks formed in rectangular shapes comprising sides in which fine patterns are formed; and comparison marks formed as rectangular shapes which are smaller than the rectangular shapes of the reference marks and formed of fine patterns, wherein the number of comparison marks is equal to the number of reference marks, wherein the reference marks and the comparison marks are formed on different thin films formed on a semiconductor substrate to be used to inspect alignment states of the different thin films, and the overlay mark reflects an effect of aberration of patterns of memory cells through the fine patterns during a calculation of MR (mis-registration).

Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods.

Abstract: A front panel operating apparatus and method of a vehicle display device such as a car audio can include a main chassis for accommodating an audio device, a front panel provided in the front side of the main chassis that opens or closes to allow access to a record medium for the audio device. The front panel can have a display part in the front side thereof. A supporting panel can be hinge-coupled to a lower side of the front panel to move a lower end of the front panel forward and backward by sliding from a prescribed location of the main chassis in forward and backward directions of the main chassis. A vertical guide can be formed at the front side of the main chassis, and a protrusion formed on the front panel can be inserted into the vertical guide for controllably moving an upper portion of the front panel up and down.

Abstract: Embodiments of the invention provide an information input system for a terminal and a multifunctional button assembly for use in the information input system and methods for operating the same. The multifunctional button assembly can include a lever control button, a rotary button and a switch that can be mounted on a substrate. The multifunctional button assembly of the invention can provide advantages in that since the number of functions provided by the multifunctional button assembly is relatively increased, more functions can be concurrently employed, and a terminal employing the multifunctional button assembly can be manufactured to be light, thin, short and compact.