Patents by Inventor Chang-An Chiang

Chang-An Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11903214
    Abstract: A method of forming a ferroelectric random access memory (FeRAM) device includes: forming a layer stack over a substrate, where the layer stack includes alternating layers of a first dielectric material and a word line (WL) material; forming first trenches extending vertically through the layer stack; filling the first trenches, where filling the first trenches includes forming, in the first trenches, a ferroelectric material, a channel material over the ferroelectric material, and a second dielectric material over the channel material; after filling the first trenches, forming second trenches extending vertically through the layer stack, the second trenches being interleaved with the first trenches; and filling the second trenches, where filling the second trenches includes forming, in the second trenches, the ferroelectric material, the channel material over the ferroelectric material, and the second dielectric material over the channel material.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: February 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: TsuChing Yang, Hung-Chang Sun, Kuo Chang Chiang, Sheng-Chih Lai, Yu-Wei Jiang
  • Publication number: 20240032300
    Abstract: In some embodiments, the present disclosure relates to a 3D memory device, including a plurality of gate lines interleaved between a plurality of dielectric layers in a vertical direction, the plurality of gate lines forming recesses between the plurality of dielectric layers; a source/drain line disposed next to the plurality of dielectric layers, spaced from the plurality of gate lines by the recesses in a lateral direction; a ferroelectric film arranged laterally between sidewalls of the plurality of gate lines and the source/drain line and confined within the recesses; and a semiconductor film disposed within the recesses and spacing the ferroelectric film from the source/drain line.
    Type: Application
    Filed: July 19, 2022
    Publication date: January 25, 2024
    Inventors: Song-Fu Liao, Kuo-Chang Chiang, Hai-Ching Chen, Chung-Te Lin
  • Publication number: 20240015980
    Abstract: A memory device includes transistor structures and memory arc wall structures. The memory arc wall structures are embedded in the transistor structures. The transistor structure includes a dielectric column, a source electrode and a drain electrode, a gate electrode layer and a channel wall structure. The source electrode and the drain electrode are located on opposite sides of the dielectric column. The gate electrode layer is around the dielectric column, the source electrode, and the drain electrode. The channel wall structure is extended from the source electrode to the drain electrode and surrounds the dielectric column. The channel wall structure is disposed between the gate electrode layer and the source electrode, between the gate electrode layer, and the drain electrode, and between the gate electrode layer and the dielectric column. The memory arc wall structure is extended on and throughout the channel wall structure.
    Type: Application
    Filed: September 22, 2023
    Publication date: January 11, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Hung-Chang Sun, Sheng-Chih Lai, Kuo-Chang Chiang, TsuChing Yang
  • Patent number: 11862726
    Abstract: A transistor includes an insulating layer, a source region, a drain region, a channel layer, a ferroelectric layer, an interfacial layer, and a gate electrode. The source region and the drain region are respectively disposed on two opposite ends of the insulating layer. The channel layer is disposed on the insulating layer, the source region, and the drain region. The ferroelectric layer is disposed over the channel layer. The interfacial layer is sandwiched between the channel layer and the ferroelectric layer. The gate electrode is disposed on the ferroelectric layer.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Chang Sun, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Tsuching Yang, Feng-Cheng Yang, Chung-Te Lin
  • Patent number: 11856781
    Abstract: A method of forming a three-dimensional (3D) memory device includes: forming, over a substrate, a layer stack having alternating layers of a first conductive material and a first dielectric material; forming trenches extending vertically through the layer stack from an upper surface of the layer stack distal from the substrate to a lower surface of the layer stack facing the substrate; lining sidewalls and bottoms of the trenches with a memory film; forming a channel material over the memory film, the channel material including an amorphous material; filling the trenches with a second dielectric material after forming the channel material; forming memory cell isolation regions in the second dielectric material; forming source lines (SLs) and bit lines (BLs) that extend vertically in the second dielectric material on opposing sides of the memory cell isolation regions; and crystallizing first portions of the channel material after forming the SLs and BLs.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: TsuChing Yang, Hung-Chang Sun, Kuo Chang Chiang, Sheng-Chih Lai, Yu-Wei Jiang
  • Patent number: 11847000
    Abstract: A portable electronic device including a first body, a second body, and a hinge mechanism is provided. The second body is connected to the first body through the hinge mechanism, and the hinge mechanism has a basis axis located at the first body and a rotation axis located at a lower end of the second body. When the second body rotates with respect to the first body, the rotation axis slides along an arc shaped path with respect to the basis axis to increase or decrease a distance between the rotation axis and the basis axis and increase or decrease a distance between the lower end of the second body and a back end of the first body.
    Type: Grant
    Filed: June 8, 2022
    Date of Patent: December 19, 2023
    Assignees: Acer Incorporated, Sinher Technology Inc.
    Inventors: Yi-Ta Huang, Cheng-Nan Ling, Chih-Chun Liu, Yung-Chang Chiang
  • Publication number: 20230369438
    Abstract: A transistor includes a gate electrode, a gate dielectric layer, a short range order layer, a channel layer, and source/drain regions. The gate dielectric layer is disposed over the gate electrode. The short range order layer is disposed between the gate electrode and the gate dielectric layer. The short ranger order layer has slanted sidewalls. The channel layer is disposed on the gate dielectric layer. The source/drain regions are disposed on the channel layer.
    Type: Application
    Filed: May 10, 2022
    Publication date: November 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Neil Quinn Murray, Kuo-Chang Chiang, Mauricio MANFRINI, Tsann Lin
  • Publication number: 20230371258
    Abstract: A memory device includes a multi-layer stack disposed on a substrate and including conductive layers and dielectric layers stacked alternately, a channel layer penetrating through the conductive layers and the dielectric layers, a charge storage layer disposed between the conductive layers and the channel layer, an insulating layer penetrating through the conductive layers and the dielectric layers and disposed between the charge storage layer and the multi-layer stack, and a first conductive pillar and a second conductive pillar enclosed by the channel layer.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Chang Sun, Yu-Wei Jiang, TsuChing Yang, Kuo-Chang Chiang, Sheng-Chih Lai
  • Publication number: 20230363173
    Abstract: Provided is a method of forming a ferroelectric memory device including: forming a ferroelectric layer between a gate electrode and a channel layer by a first atomic layer deposition (ALD) process. The first ALD process includes: providing a first precursor during a first section; and providing a first mixed precursor during a second section, wherein the first mixed precursor includes a hafnium-containing precursor and a zirconium-containing precursor. In this case, the ferroelectric layer is directly formed as Hf0.5Zr0.5O2 with an orthorhombic phase (O-phase) to enhance the ferroelectric polarization and property.
    Type: Application
    Filed: May 9, 2022
    Publication date: November 9, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Rainer Yen-Chieh Huang, Han-Ting Tsai, Tsann Lin, Kuo-Chang Chiang, Min-Kun Dai, Chung-Te Lin
  • Publication number: 20230339957
    Abstract: The invention relates generally crystalline mesylate salts, crystalline chloride salts and crystalline sulfate salts of the compound (S)-2-(3?-(hydroxymethyl)-1-methyl-5-((5-(2-methyl-4-(oxetan-3-yl)piperazin-1-yl)pyridin-2-yl)amino)-6-oxo-1,6-dihydro- [3,4?-bipyridin]-2?-yl)-7,7-dimethyl-2,3,4,6,7,8-hexahydro-1H-cyclopenta[4,5]pyrrolo[1,2-a]pyrazin-1-one that is an inhibitor of Bruton’s tyrosine kinase. In some aspects, the crystalline salts are single polymorphs.
    Type: Application
    Filed: June 14, 2023
    Publication date: October 26, 2023
    Applicant: Genentech, Inc.
    Inventors: Chen MAO, Dawen KOU, Po-Chang CHIANG
  • Publication number: 20230345731
    Abstract: A memory device includes a multi-layer stack, a channel layer, a memory material layer and a memory material layer. The multi-layer stack includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately along a first direction. The memory material layer is disposed between the channel layer and each of the conductive layers and the dielectric layers. The conductive pillars extend in the first direction, wherein the at least three conductive pillars are aligned along a second direction substantially perpendicular to the first direction.
    Type: Application
    Filed: June 27, 2023
    Publication date: October 26, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, TsuChing Yang, Hung-Chang Sun, Kuo-Chang Chiang
  • Publication number: 20230337437
    Abstract: A memory cell includes a thin film transistor over a semiconductor substrate, the thin film transistor including: a memory film contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the memory film is disposed between the OS layer and the word line, wherein the source line and the bit line each comprise a first conductive material touching the OS layer, and wherein the first conductive material has a work function less than 4.6. The memory cell further includes a dielectric material separating the source line and the bit line.
    Type: Application
    Filed: June 26, 2023
    Publication date: October 19, 2023
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
  • Publication number: 20230327024
    Abstract: A transistor including a channel layer including an oxide semiconductor material and methods of making the same. The transistor includes a channel layer having a first oxide semiconductor layer having a first oxygen concentration, a second oxide semiconductor layer having a second oxygen concentration and a third oxide semiconductor layer having a third oxygen concentration. The second oxide semiconductor layer is located between the first semiconductor oxide layer and the third oxide semiconductor layer. The second oxygen concentration is lower than the first oxygen concentration and the third oxygen concentration.
    Type: Application
    Filed: June 14, 2023
    Publication date: October 12, 2023
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang, Feng-Cheng Yang, Neil Quinn Murray
  • Publication number: 20230328980
    Abstract: A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.
    Type: Application
    Filed: June 16, 2023
    Publication date: October 12, 2023
    Inventors: Tsu Ching Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Feng-Cheng Yang, Chung-Te Lin
  • Publication number: 20230328996
    Abstract: In some embodiments, the present disclosure relates to a method for forming a memory device, including forming a plurality of word line stacks respectively including a plurality of word lines alternatingly stacked with a plurality of insulating layers over a semiconductor substrate, forming a data storage layer along opposing sidewalls of the word line stacks, forming a channel layer along opposing sidewalls of the data storage layer, forming an inner insulating layer between inner sidewalls of the channel layer and including a first dielectric material, performing an isolation cut process including a first etching process through the inner insulating layer and the channel layer to form an isolation opening, forming an isolation structure filling the isolation opening and including a second dielectric material, performing a second etching process through the inner insulating layer on opposing sides of the isolation structure to form source/drain openings, and forming source/drain contacts in the source/drain
    Type: Application
    Filed: June 14, 2023
    Publication date: October 12, 2023
    Inventors: Tsu Ching Yang, Feng-Cheng Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Chung-Te Lin
  • Publication number: 20230314807
    Abstract: An electronic device includes a light modulation module. The light modulation module includes multiple first signal lines and multiple second signal lines. The first signal lines extend along a first direction. The second signal lines extend along a second direction. The second direction is different from the first direction. The first signal lines and the second signal lines are curves. Each of the first signal lines and each of the second signal lines respectively include multiple first patterns, and each of the first patterns has an inflection point.
    Type: Application
    Filed: February 8, 2023
    Publication date: October 5, 2023
    Applicant: Innolux Corporation
    Inventors: Huai-Ping Huang, Chih-Lung Lin, Chang-Chiang Cheng
  • Publication number: 20230317848
    Abstract: A memory cell includes a ferroelectric (FE) material contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the FE material is disposed between the OS layer and the word line. The OS layer comprises: a first region adjacent the FE material, the first region having a first concentration of a semiconductor element; a second region adjacent the source line, the second region having a second concentration of the semiconductor element; and a third region between the first region and the second region, the third region having a third concentration of the semiconductor element, the third concentration is greater than the second concentration and less than the first concentration.
    Type: Application
    Filed: June 7, 2023
    Publication date: October 5, 2023
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
  • Patent number: 11733847
    Abstract: Certain aspects of the present disclosure provide techniques for generating a user experience for a software program product based on a knowledge engine. Techniques for generating the user experience include a UI builder tool providing a set of tabular UI views and receiving in each tabular UI view corresponding input data for generating a calculation graph, a completeness graph, and a client UI view. Based on the input data, the UI builder tool and knowledge engine can generate a set of artifact files. The knowledge engine can generate and/or execute the calculation and completeness graphs as defined in the corresponding artifact files. The UI builder tool can generate an instance of the client UI view. With the generated calculation graph(s), completeness graph(s), and an instance of the client UI view, the user experience can be provided to a computing device.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: August 22, 2023
    Assignee: INTUIT, INC.
    Inventors: Justin Rui Chang Chiang, Maria Regina Villanueva Garcia, Kevin M. McCluskey, Nankun Huang
  • Patent number: 11729988
    Abstract: A memory device includes a multi-layer stack, a channel layer, a memory material layer and at least three conductive pillars. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers. The memory material layer is disposed between the channel layer and each of the plurality of conductive layers and the plurality of dielectric layers. The conductive pillars are surrounded by the channel layer and the memory material layer, wherein the at least three conductive pillars are electrically connected to conductive lines respectively.
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: August 15, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, Tsuching Yang, Hung-Chang Sun, Kuo-Chang Chiang
  • Patent number: 11729987
    Abstract: A memory cell includes a thin film transistor over a semiconductor substrate, the thin film transistor including: a memory film contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the memory film is disposed between the OS layer and the word line, wherein the source line and the bit line each comprise a first conductive material touching the OS layer, and wherein the first conductive material has a work function less than 4.6. The memory cell further includes a dielectric material separating the source line and the bit line.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang