Patents by Inventor Chang-An Chiang
Chang-An Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230253464Abstract: A memory cell includes a thin film transistor over a semiconductor substrate. The thin film transistor includes a memory film contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the memory film is disposed between the OS layer and the word line; and a dielectric material separating the source line and the bit line. The dielectric material forms an interface with the OS layer. The dielectric material comprises hydrogen, and a hydrogen concentration at the interface between the dielectric material and the OS layer is no more than 3 atomic percent (at %).Type: ApplicationFiled: April 14, 2023Publication date: August 10, 2023Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
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Patent number: 11723199Abstract: A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.Type: GrantFiled: March 3, 2021Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tsu Ching Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Feng-Cheng Yang, Chung-Te Lin
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Patent number: 11723210Abstract: In some embodiments, the present disclosure relates to a method for forming a memory device, including forming a plurality of word line stacks respectively including a plurality of word lines alternatingly stacked with a plurality of insulating layers over a semiconductor substrate, forming a data storage layer along opposing sidewalls of the word line stacks, forming a channel layer along opposing sidewalls of the data storage layer, forming an inner insulating layer between inner sidewalls of the channel layer and including a first dielectric material, performing an isolation cut process including a first etching process through the inner insulating layer and the channel layer to form an isolation opening, forming an isolation structure filling the isolation opening and including a second dielectric material, performing a second etching process through the inner insulating layer on opposing sides of the isolation structure to form source/drain openings, and forming source/drain contacts in the source/drainType: GrantFiled: May 28, 2021Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tsu Ching Yang, Feng-Cheng Yang, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, Hung-Chang Sun, Chen-Jun Wu, Chung-Te Lin
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Publication number: 20230238462Abstract: A transistor device and method of making the same, the transistor device including: a substrate; a word line disposed on the substrate; a gate insulating layer disposed on the word line; a dual-layer semiconductor channel including: a first channel layer disposed on the gate insulating layer; and a second channel layer disposed on the first channel layer, such that the second channel layer contacts side and top surfaces of the first channel layer; and source and drain electrodes electrically coupled to the second channel layer. When a voltage is applied to the word line, the first channel layer has a first electrical resistance and the second channel layer has a second electrical resistance that is different from the first electrical resistance.Type: ApplicationFiled: March 28, 2023Publication date: July 27, 2023Inventors: Hung Wei LI, Yu-Ming LIN, Mauricio MANFRINI, Kuo-Chang CHIANG, Sai-Hooi YEONG
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Patent number: 11710790Abstract: A memory cell includes a ferroelectric (FE) material contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the FE material is disposed between the OS layer and the word line. The OS layer comprises: a first region adjacent the FE material, the first region having a first concentration of a semiconductor element; a second region adjacent the source line, the second region having a second concentration of the semiconductor element; and a third region between the first region and the second region, the third region having a third concentration of the semiconductor element, the third concentration is greater than the second concentration and less than the first concentration.Type: GrantFiled: January 15, 2021Date of Patent: July 25, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang
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Publication number: 20230213982Abstract: A portable electronic device including a first body, a second body, and a hinge mechanism is provided. The second body is connected to the first body through the hinge mechanism, and the hinge mechanism has a basis axis located at the first body and a rotation axis located at a lower end of the second body. When the second body rotates with respect to the first body, the rotation axis slides along an arc shaped path with respect to the basis axis to increase or decrease a distance between the rotation axis and the basis axis and increase or decrease a distance between the lower end of the second body and a back end of the first body.Type: ApplicationFiled: June 8, 2022Publication date: July 6, 2023Applicants: Acer Incorporated, Sinher Technology Inc.Inventors: Yi-Ta Huang, Cheng-Nan Ling, Chih-Chun Liu, Yung-Chang Chiang
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Patent number: 11696448Abstract: A device includes a dielectric layer, a conductive layer, electrode layers and an oxide semiconductor layer. The dielectric layer has a first surface and a second surface opposite to the first surface. The conductive layer is disposed on the first surface of the dielectric layer. The electrode layers are disposed on the second surface of the dielectric layer. The oxide semiconductor layer is disposed in between the second surface of the dielectric layer and the electrode layers, wherein the oxide semiconductor layer comprises a material represented by formula 1 (InxSnyTizMmOn). In formula 1, 0<x<1, 0?y<1, 0<z<1, 0<m<1, 0<n<1, and M represents at least one metal.Type: GrantFiled: April 20, 2021Date of Patent: July 4, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Chang Sun, Sheng-Chih Lai, TsuChing Yang, Yu-Wei Jiang, Kuo-Chang Chiang
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Publication number: 20230168760Abstract: The present disclosure provides an electronic device including a first sensing circuit, a second sensing circuit and a power line. The first sensing circuit includes a first sensing unit and a first transistor, and a first end of the first sensing unit is coupled to a control end of the first transistor. The second sensing circuit includes a second sensing unit and a second transistor, and a first end of the second sensing unit is coupled to a control end of the second transistor. A first end of the first transistor and a first end of the second transistor are coupled to the power line.Type: ApplicationFiled: November 1, 2022Publication date: June 1, 2023Applicant: InnoLux CorporationInventors: Shu-Fen LI, Chuan-Chi CHIEN, Hsiao-Feng LIAO, Rui-An YU, Chang-Chiang CHENG, Po-Yang CHEN, I-An YAO
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Patent number: 11646379Abstract: A transistor device and method of making the same, the transistor device including: a substrate; a word line disposed on the substrate; a gate insulating layer disposed on the word line; a dual-layer semiconductor channel including: a first channel layer disposed on the gate insulating layer; and a second channel layer disposed on the first channel layer, such that the second channel layer contacts side and top surfaces of the first channel layer; and source and drain electrodes electrically coupled to the second channel layer. When a voltage is applied to the word line, the first channel layer has a first electrical resistance and the second channel layer has a second electrical resistance that is different from the first electrical resistance.Type: GrantFiled: April 12, 2021Date of Patent: May 9, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Hung Wei Li, Kuo-Chang Chiang, Mauricio Manfrini, Sai-Hooi Yeong, Yu-Ming Lin
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Patent number: 11640974Abstract: A memory cell includes a thin film transistor over a semiconductor substrate. The thin film transistor includes a memory film contacting a word line; and an oxide semiconductor (OS) layer contacting a source line and a bit line, wherein the memory film is disposed between the OS layer and the word line; and a dielectric material separating the source line and the bit line. The dielectric material forms an interface with the OS layer. The dielectric material comprises hydrogen, and a hydrogen concentration at the interface between the dielectric material and the OS layer is no more than 3 atomic percent (at %).Type: GrantFiled: December 11, 2020Date of Patent: May 2, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Chang Chiang, Hung-Chang Sun, Sheng-Chih Lai, Tsuching Yang, Yu-Wei Jiang
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Patent number: 11640188Abstract: A hinge capable of widely expanding includes an arc-shaped guide member, two movable members and two torsion generating members, wherein first guide rails are formed on two sides of the arc-shaped guide member, and a circular displacement track is defined by an arc center of the arc-shaped guide member. Each of the two movable members, respectively positioned on two sides of the arc-shaped guide member, is provided with a working surface contacting one of the first guide rails and an arc-shaped through hole penetrating therethrough. The arc center of the arc-shaped through hole is the same as the arc-shaped guide members'. Each of the two torsion generating members is assembled to the arc-shaped guide member through the arc-shaped through hole to which one of the two movable members belongs. The two movable members are guided by the arc-shaped guide member to move on the circular displacement track.Type: GrantFiled: September 9, 2021Date of Patent: May 2, 2023Assignee: SINHER TECHNOLOGY INC.Inventors: Ting-Hung Su, Yung-Chang Chiang, Sheng-Zhen Wu
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Publication number: 20230120530Abstract: A memory device includes a stacked structure including a plurality of memory cells, and first and second flights of steps. The first flights of steps are disposed at an end of the stacked structure along the first direction. The second flights of steps are adjacent to the first flights of steps disposed at the end of the stacked structure along the first direction. The first flights of steps and the second flights of steps comprise first portions and second portions alternately disposed along the first direction. The second portions are wider than the first portions along the second direction.Type: ApplicationFiled: December 21, 2022Publication date: April 20, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: TsuChing Yang, Hung-Chang Sun, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang
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Publication number: 20230109296Abstract: A memory device includes a substrate, word line layers, insulating layers, and memory cells. The word line layers are stacked above the substrate. The insulating layers are stacked above the substrate respectively alternating with the word line layers. The memory cells are distributed along a stacking direction of the word line layers and the insulating layers perpendicularly to a major surface of the substrate. Each memory cell includes a source line electrode and a bit line electrode, a first oxide semiconductor layer, and a second oxide semiconductor layer. The first oxide semiconductor layer is peripherally surrounded by one of the word line layers, the source line electrode, and the bit line electrode. The second oxide semiconductor layer is disposed between the one of the word line layers and the first oxide semiconductor layer.Type: ApplicationFiled: December 7, 2022Publication date: April 6, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Wei Jiang, Hung-Chang Sun, Kuo-Chang Chiang, Sheng-Chih Lai, TsuChing Yang
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Publication number: 20230060819Abstract: A semiconductor memory structure includes a plurality of gate layers and a plurality of insulating layers alternately stacked over a substrate, and at least an active column disposed over the substrate. The gate layers and the insulating layers are alternately stacked along a first direction. The active column extends along the first direction and penetrates the gate layer and the insulating layer. The active column includes a central portion, a charge-trapping layer surrounding the central portion, and a channel layer between the central portion and the charge-trapping layer. The central portion of the active column includes an isolation structure, a source structure and a drain structure. The source structure and the drain structure are disposed at two sides of the isolation structure.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: YU-WEI JIANG, HUNG-CHANG SUN, SHENG-CHIH LAI, KUO-CHANG CHIANG, TSUCHING YANG
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Publication number: 20230066393Abstract: A method includes forming a plurality of memory cells, which includes a plurality of first conductive lines over a substrate, charge-trapping layers coupled to the conductive lines, channel layers arranged adjacent to the charge-trapping layers, and a plurality of first filling regions arranged between the channel layers; etching the first filling regions to form first trenches; depositing a liner over upper surfaces of the charge-trapping layers and the channel layers and sidewalls of the first trenches; forming second filling regions in the first trenches; patterning the second filling regions to form second trenches; depositing a partition region in each of the second trenches; and removing the liner to expose the charge-trapping layers and the channel layers.Type: ApplicationFiled: August 27, 2021Publication date: March 2, 2023Inventors: YU-WEI JIANG, SHENG-CHIH LAI, KUO-CHANG CHIANG, HUNG-CHANG SUN, TSUCHING YANG, FENG-CHENG YANG, CHUNG-TE LIN
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Publication number: 20230049651Abstract: A transistor includes an insulating layer, a source region, a drain region, a channel layer, a ferroelectric layer, an interfacial layer, and a gate electrode. The source region and the drain region are respectively disposed on two opposite ends of the insulating layer. The channel layer is disposed on the insulating layer, the source region, and the drain region. The ferroelectric layer is disposed over the channel layer. The interfacial layer is sandwiched between the channel layer and the ferroelectric layer. The gate electrode is disposed on the ferroelectric layer.Type: ApplicationFiled: August 13, 2021Publication date: February 16, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Chang Sun, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang, TsuChing Yang, Feng-Cheng Yang, Chung-Te Lin
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Publication number: 20230036606Abstract: A method of forming a semiconductor structure includes following operations. A memory layer is formed over the first gate electrode. A channel layer is formed over the memory layer. A first SUT treatment is performed. A second dielectric layer is formed over the memory layer and the channel layer. A source electrode and a drain electrode are formed in the second dielectric layer. A temperature of the first SUT treatment is less than approximately 400° C.Type: ApplicationFiled: January 31, 2022Publication date: February 2, 2023Inventors: MIN-KUN DAI, YEN-CHIEH HUANG, KUO-CHANG CHIANG, HAN-TING TSAI, TSANN LIN, CHUNG-TE LIN
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Publication number: 20230036433Abstract: An electronic device includes a substrate including an active area and a peripheral area adjacent to the active area; a plurality of spacers disposed in the active area and including a first spacer and a second spacer; a plurality of signal lines disposed on the substrate and extending along a first direction; a plurality of gate lines disposed on the substrate and extending along a second direction; and a gate driving unit disposed in the active area and including a receiving switch element and a buffer switch element, wherein the receiving switch element is disposed corresponding to the first spacer and receives an input signal through one of the signal lines, and the buffer switch element is disposed corresponding to the second spacer and is electrically connected to the receiving switch element, wherein the buffer switch element outputs a scan signal to one of the gate lines.Type: ApplicationFiled: July 22, 2022Publication date: February 2, 2023Inventors: Huai-Ping HUANG, Rui-An YU, Chang-Chiang CHENG, Chia-Hao TSAI, Chih-Lung LIN, Jian-Min LEU
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Patent number: 11569165Abstract: A tridimensional memory cell array includes vertically stacked first conductive lines, vertically stacked second conductive lines, and first and second flights of steps. First and second conductive lines extend along a first direction. The second conductive lines are disposed at a distance along a second direction from the first conductive lines. First and second directions are orthogonal. Along the first direction, the first flights are disposed at opposite ends of the first conductive lines and the second flights are disposed at opposite ends of the second conductive lines. The first and second flights include landing pads and connective lines alternately disposed along the first direction. The landing pads are wider than the connective lines along the second direction. Along the second direction, landing pads of the first flights face connective lines of the second flights and landing pads of the second flights face connective lines of the first flights.Type: GrantFiled: February 26, 2021Date of Patent: January 31, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: TsuChing Yang, Hung-Chang Sun, Sheng-Chih Lai, Yu-Wei Jiang, Kuo-Chang Chiang
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Patent number: 11545507Abstract: A memory device includes a substrate, word line layers, insulating layers, and memory cells. The word line layers are stacked above the substrate. The insulating layers are stacked above the substrate respectively alternating with the word line layers. The memory cells are distributed along a stacking direction of the word line layers and the insulating layers perpendicularly to a major surface of the substrate. Each memory cell includes a source line electrode and a bit line electrode, a first oxide semiconductor layer, and a second oxide semiconductor layer. The first oxide semiconductor layer is peripherally surrounded by one of the word line layers, the source line electrode, and the bit line electrode. The second oxide semiconductor layer is disposed between the one of the word line layers and the first oxide semiconductor layer.Type: GrantFiled: March 12, 2021Date of Patent: January 3, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Wei Jiang, Hung-Chang Sun, Kuo-Chang Chiang, Sheng-Chih Lai, TsuChing Yang