Abstract: A thin film transistor including a gate electrode, a semiconductor layer, and source and drain electrodes contacting the semiconductor layer. The source and drain electrodes include a metal oxide having a crystal size in a c-axis direction Lc(002) that ranges from 67 ? or more to 144 ? or less.

Abstract: A thin film transistor including a gate electrode, a semiconductor layer, and source and drain electrodes contacting the semiconductor layer. The source and drain electrodes include a metal oxide having a crystal size in a c-axis direction Lc(002) that ranges from 67 ? or more to 144 ? or less.

Abstract: A thin film transistor includes a gate electrode, a semiconductor layer, and source and drain electrodes contacting the semiconductor layer. The source and drain electrodes include a metal oxide having a crystal size in a c-axis direction Lc(002) that ranges from 67 ? or more to 144 ? or less.

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.

Abstract: A thin film transistor includes a gate electrode, a semiconductor layer, and source and drain electrodes contacting the semiconductor layer. The source and drain electrodes include a metal oxide having a crystal size in a c-axis direction Lc(002) that ranges from 67 ? or more to 144 ? or less.

Abstract: A thin film transistor includes a gate electrode, a semiconductor layer, and source and drain electrodes contacting the semiconductor layer. The source and drain electrodes include a metal oxide having a crystal size in a c-axis direction Lc(002) that ranges from 67 ? or more to 144 ? or less.

Abstract: A display device includes a substrate and a wire grid polarizer disposed on the substrate. The wire grid polarizer includes a first wire grid layer, a first middle layer, and a second wire grid layer. The first wire grid layer includes a plurality of first wire grid lines separated from each other. The first middle layer is disposed on the first wire grid layer. The first middle layer includes a first portion having a first middle layer thickness and a second portion having a second middle layer thickness thinner than the first middle layer thickness. The second middle layer thickness is thinner than a thickness of each first wire grid line. The second wire grid layer is disposed on the first middle layer and includes a plurality of second wire grid lines separated from each other. The second wire grid lines overlap the second portion of the first middle layer.

Abstract: Provided is a metal wire. The metal wire includes a copper layer, and at least one barrier layer. The barrier layer is disposed on at least one of an upper part and a lower part of the copper layer. The barrier layer includes an alloy including copper, nickel, and zinc.

Abstract: A display device and a method of manufacturing the display device are disclosed. In one aspect, the method includes forming a sacrificial layer over a carrier substrate, forming a passivation barrier layer to cover upper and lateral sides of the sacrificial layer and forming a thin film transistor layer over the passivation barrier layer. The method also includes placing a mask over the thin film transistor layer so as to expose an edge portion of the passivation barrier layer, wherein the edge portion does not overlap the mask in the depth dimension of the display device. The method further includes removing the edge portion of the passivation barrier layer so as to form a barrier layer and separating the carrier substrate from the barrier layer via the sacrificial layer.

Abstract: A display device including a substrate and a wire grid polarizer disposed on the substrate, wherein the wire grid polarizer includes a first wire grid layer having a first wire thickness and including a plurality of first wire grids separated from each other, a first middle layer disposed on the first wire grid layer, the first middle layer including a first portion having a first middle layer thickness and a second portion having a second middle layer thickness thinner than the first middle layer thickness, the second middle layer thickness being thinner than the first wire thickness, and a second wire grid layer disposed on the first middle layer and including a plurality of second wire grids separated from each other, the plurality of second wire grids overlapping the second portion of the first middle layer.

Abstract: A sputtering device includes a plurality of sputtering targets provided in a process chamber, a substrate holder facing the plurality of sputtering targets and configured to support a substrate, and a deposition mask disposed between the plurality of sputtering targets and the substrate, the deposition mask covering an end portion of the substrate. At least one of the plurality of sputtering targets has an arc shape that is convex toward the substrate and a remainder of the plurality of sputtering targets are flat facing toward the substrate.

Abstract: A sputtering apparatus includes a chamber, a target section disposed in the chamber, and a stage facing the target section. The target section includes a first target having a first diameter and a second target having a second diameter different from the first diameter. The first target and the second target each extend in a longitudinal direction and have a cylindrical shape, and the first and second diameters are respectively measured along a cross-section of corresponding first and second targets taken along a direction perpendicular to the longitudinal direction.

Abstract: A polarizer and a liquid crystal display including the polarizer, the polarizer including a plurality of metal lines extending in one direction and being arranged at regular intervals; and a plurality of low reflection layers on the plurality of metal lines, the plurality of low reflection layers contacting respective upper parts of the plurality of metal lines and having an interval and a width about equal to an interval and a width of the plurality of metal lines, wherein the interval of the plurality of metal lines is smaller than a wavelength of a visible ray, and light incident from an upper side of the plurality of low reflection layers is reflected with reflectivity equal to or smaller than 10%.

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.

Abstract: Exemplary embodiments of the present invention relate to a panel and a display device including the same, the panel including a substrate, a signal line arranged on the substrate, the signal line configured to transmit a driving signal, an insulating layer arranged on the signal line, and a pixel electrode and a contact assistant arranged on the insulating layer. The contact assistant is electrically connected to a portion of the signal line, the contact assistant includes indium zinc oxide doped with a metal oxide not including indium or zinc, and the metal oxide has a smaller Gibbs free energy than zinc oxide.

Abstract: An organic light emitting display device includes a thin film transistor including a semiconductor layer, a gate electrode, and source and drain electrodes, a pixel electrode connected to the thin film transistor, the pixel electrode including a first layer, a second layer disposed on the first layer and including silver, and a third layer including a carbon-based material and covering an upper portion and lateral surface of the second layer, an organic emission layer including an organic light emitting member and disposed on the pixel electrode, and a common electrode disposed on the organic emission layer.

Abstract: A liquid crystal display includes a substrate; a first electrode on the substrate; a second electrode on the first electrode and separated from the first electrode; a cavity defined between the first electrode and the second electrode; a first protection layer on the second electrode; a cover layer on the first protection layer; and a liquid crystal layer including liquid crystal molecules in the cavity. The second electrode includes metal oxide and zinc oxide.

Abstract: The present invention relates to a display device and a manufacturing method thereof, wherein a spoilage layer generated in a manufacturing process is removed, and a manufacturing method of a display device according to an exemplary embodiment of the present invention includes: forming a thin film transistor on a substrate including a plurality of pixel areas; forming a pixel electrode connected to the thin film transistor in the pixel area; forming a sacrificial layer on the pixel electrode; forming a barrier layer on the sacrificial layer; forming a common electrode on the barrier layer; forming a roof layer on the common electrode; patterning the barrier layer, the common electrode, and the roof layer to exposed a portion of the sacrificial layer thereby forming an injection hole; removing the sacrificial layer to form a microcavity for a plurality of pixel areas; removing the barrier layer.

Abstract: A display device and a method of manufacturing the display device are disclosed. In one aspect, the method includes forming a sacrificial layer over a carrier substrate, forming a passivation barrier layer to cover upper and lateral sides of the sacrificial layer and forming a thin film transistor layer over the passivation barrier layer. The method also includes placing a mask over the thin film transistor layer so as to expose an edge portion of the passivation barrier layer, wherein the edge portion does not overlap the mask in the depth dimension of the display device. The method further includes removing the edge portion of the passivation barrier layer so as to form a barrier layer and separating the carrier substrate from the barrier layer via the sacrificial layer.

Abstract: A display device includes a gate line, a data line crossing the gate line, and a first transistor including a gate electrode electrically coupled to the gate line and a first electrode electrically coupled to the data line. At least one of the gate electrode of the first transistor, the first electrode of the first transistor, and a second electrode of the first transistor includes at least one of a first conductor layer and a second conductor layer. The first conductor layer includes a first metal layer and a second metal layer disposed on the first metal layer. The second conductor layer includes a third metal layer and a fourth metal layer disposed on the third metal layer. The second metal layer has a lower reflectivity than the first metal layer. The fourth metal layer has a lower reflectivity lower than the third metal layer.