Patents by Inventor Charles Walter Pearce

Charles Walter Pearce has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing using thermal nitride etch mask
    Patent number: 5711891
    Abstract: A method for forming v-shaped grooves in a substrate such as a channel plate is disclosed. A mask of silicon nitride formed by a thermal nitridation process protects the substrate during KOH etching.
    Type: Grant
    Filed: September 20, 1995
    Date of Patent: January 27, 1998
    Assignee: Lucent Technologies Inc.
    Inventor: Charles Walter Pearce