Patents by Inventor Chaw Che

Chaw Che has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESSING METHOD
    Publication number: 20140342473
    Abstract: A method for detecting metal contamination from a film-forming process causing interface traps is described. The film-forming process is performed to form a dielectric film on a wafer. An annealing treatment is performed to reduce the interface traps between the wafer and the dielectric film. Thereafter, the bulk recombination lifetime (BRLT) of the wafer is measured to estimate the amount of the metal contamination.
    Type: Application
    Filed: May 14, 2013
    Publication date: November 20, 2014
    Applicant: United Microelectronics Corp.
    Inventors: Sheng Zhang, Guang-You Yu, Ying-Jie Xu, Chaw Che
  • SEMICONDUCTOR FABRICATING APPARATUS
    Publication number: 20140196251
    Abstract: A semiconductor fabricating apparatus includes a reaction chamber, a first gas pipeline, and a second gas pipeline. The first gas pipeline includes a first cleaning gas pipeline for providing a first cleansing gas to the reaction chamber in a cleansing process, and a second cleansing gas pipeline for providing a second cleansing gas to the reaction chamber in the cleansing process. The first cleansing gas pipeline and the second cleansing gas pipeline are connected in parallel. The second gas pipeline provides a reactive gas to the reaction chamber in a fabricating process. The first gas pipeline and the second gas pipeline are connected in parallel.
    Type: Application
    Filed: January 13, 2013
    Publication date: July 17, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: YINGJIE XU, Chaw Che, Yu-Yang Chen, Liang-Yong Tan, HAI YUAN, XIANYU MENG