Patents by Inventor Chen-Shien Chen
Chen-Shien Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250014961Abstract: Gap-fill dielectrics for die structures and methods of forming the same are provided. In an embodiment, a device includes: an outer gap-fill dielectric having a first coefficient of thermal expansion; a first integrated circuit die in the outer gap-fill dielectric; a second integrated circuit die in the outer gap-fill dielectric; an inner gap-fill dielectric between the first integrated circuit die and the second integrated circuit die, the inner gap-fill dielectric having a second coefficient of thermal expansion, the second coefficient of thermal expansion being greater than the first coefficient of thermal expansion; and a third integrated circuit die over the inner gap-fill dielectric, the third integrated circuit die bonded to the first integrated circuit die and to the second integrated circuit die.Type: ApplicationFiled: January 4, 2024Publication date: January 9, 2025Inventors: Chih-Hong Wang, Chen-Shien Chen, Ting Hao Kuo, Yu-Chia Lai
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Publication number: 20240404993Abstract: A semiconductor die includes lower dies separated by a dielectric region; a cross die vertically stacked on the lower dies and the dielectric region; a molding structure filling the dielectric region and surrounding side surfaces of the lower dies and the cross die; and a bonding ring connecting the cross die to the lower dies and including: an upper metal ring formed in a bottom surface of the cross die; and a lower metal ring formed in top surfaces of the lower dies and extending through the molding structure in the dielectric region. The lower metal ring is bonded to the upper metal ring.Type: ApplicationFiled: June 5, 2023Publication date: December 5, 2024Inventors: Chen-Shien Chen, Chih-Hong Wang, Ting Hao Kuo, Yu-Chia Lai
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Patent number: 12159812Abstract: A method of forming a semiconductor device includes following steps. A first organic layer is formed to cover a first conductive layer. A first opening is formed in the first organic layer to expose a first surface of the first conductive layer. A first silicon layer is formed on a sidewall of the first opening and the first surface of the first conductive layer. A first dielectric layer is formed on the sidewall of the first opening and the first surface of the first conductive layer over the first silicon layer. By using a first mask, portions of the first silicon layer and the first dielectric layer on the first surface are simultaneously removed to expose the first surface, wherein after removing the portions of the first silicon layer and the first dielectric layer, the first dielectric layer covers a top surface of the first silicon layer.Type: GrantFiled: May 30, 2022Date of Patent: December 3, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Lung Yang, Chih-Hung Su, Chen-Shien Chen, Hon-Lin Huang, Kun-Ming Tsai, Wei-Je Lin
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Publication number: 20240387192Abstract: A chip package structure is provided. The chip package structure includes a wiring substrate having a pad and a conductive adhesive layer over the pad and having a first inner wall, a second inner wall, a first sidewall, and a second sidewall. The first inner wall and the second inner wall face each other, and the first sidewall and the second sidewall are opposite to each other. The chip package structure also includes a nickel layer over the conductive adhesive layer, and the nickel layer covers the first inner wall, the second inner wall, the first sidewall, and the second sidewall of the conductive adhesive layer. The chip package structure further includes a chip over the wiring substrate and a conductive bump connected between the nickel layer and the chip.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Inventors: Kuo-Ching HSU, Yu-Huan CHEN, Chen-Shien CHEN
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Publication number: 20240379475Abstract: A package structure is provided. The package structure includes a substrate and a ground structure laterally surrounded by the substrate. The package structure also includes a chip-containing structure over the substrate and a protective lid attached to the substrate through a first adhesive element and a second adhesive element. The ground structure is electrically connected to the protective lid through the first adhesive element. The second adhesive element is closer to a corner edge of the substrate than the first adhesive element, and a portion of the second adhesive element is between the first adhesive element and the chip-containing structure.Type: ApplicationFiled: July 24, 2024Publication date: November 14, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Yi LIN, Kuang-Chun LEE, Chien-Chen LI, Chen-Shien CHEN
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Publication number: 20240379491Abstract: A manufacturing method of a semiconductor package includes the following steps. A package structure is provided over a substrate, wherein the package structure includes a plurality of device dies and a filling material filling a gap between adjacent two of the plurality of device dies. A thermal spreader layer is provided over the package structure, wherein the thermal spreader layer has a profile that is discontinuous in thickness at a gap region aligned with the gap. A lid structure is provided over the substrate and in contact with the thermal spreader layer.Type: ApplicationFiled: July 23, 2024Publication date: November 14, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chin-Fu Kao, Chen-Shien CHEN
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Publication number: 20240371656Abstract: A method is provided, including bonding a semiconductor device to a surface of a package substrate; placing a lid over the semiconductor device and the package substrate with a metal thermal interface material (TIM) provided between the lid and the top surface of the semiconductor device; heating the metal TIM to melt the metal TIM; pressing the lid downward so that the molten metal TIM laterally flows beyond the boundary of the semiconductor device, and the shape of the lateral sidewall of the molten metal TIM in a longitudinal section is a convex arc; lifting the lid upward so that the molten metal TIM laterally flows back, and the shape of the lateral sidewall of the molten metal TIM in the longitudinal section is a concave arc; and bonding the lid to the semiconductor device through the metal TIM by cooling the molten metal TIM.Type: ApplicationFiled: July 17, 2024Publication date: November 7, 2024Inventors: Chien-Li KUO, Chin-Fu KAO, Chen-Shien CHEN
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Publication number: 20240363676Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a magnetic element over the substrate. The magnetic element has multiple sub-layers, and each sub-layer is wider than another sub-layer above it. The semiconductor device structure also includes an isolation layer extending exceeding edges the magnetic element, and the isolation layer contains a polymer material. The semiconductor device structure further includes a conductive line over the isolation layer and extending exceeding the edges of the magnetic element.Type: ApplicationFiled: July 9, 2024Publication date: October 31, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chi-Cheng CHEN, Wei-Li HUANG, Chun-Yi WU, Kuang-Yi WU, Hon-Lin HUANG, Chih-Hung SU, Chin-Yu KU, Chen-Shien CHEN
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Patent number: 12131974Abstract: A semiconductor package includes a substrate, a package structure, a lid structure, and a thermal spreader layer. The package structure is disposed on the substrate, wherein the package structure includes a plurality of device dies and a filling material filling a gap between adjacent two of the plurality of device dies. The lid structure is disposed over substrate and covering the package structure. The thermal spreader layer is disposed between the lid structure and the package structure, wherein the thermal spreader layer has a profile that is discontinuous in thickness at a gap region corresponding to the gap.Type: GrantFiled: June 21, 2021Date of Patent: October 29, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chin-Fu Kao, Chen-Shien Chen
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Publication number: 20240355795Abstract: A package on package structure includes a first package, a plurality of conductive bumps, a second package and an underfill. The conductive bumps are disposed on a second surface of the first package and electrically connected to the first package. The second package is disposed on the second surface of the first package through the conductive bumps, and includes a semiconductor device and an encapsulating material encapsulating the semiconductor device. A shortest distance from an upper surface of the encapsulating material to an upper surface of the semiconductor device is greater than or substantially equal to twice a thickness of the semiconductor device. The underfill is filled between the first package and the second package.Type: ApplicationFiled: May 9, 2024Publication date: October 24, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Dong-Han Shen, Chen-Shien Chen, Kuo-Chio Liu, Hsi-Kuei Cheng, Yi-Jen Lai
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Patent number: 12125715Abstract: A chip package structure is provided. The chip package structure includes a wiring substrate including a substrate, a first pad, and a second pad. The first pad and the second pad are respectively over a first surface and a second surface of the substrate, and the first pad is narrower than the second pad. The chip package structure includes a nickel layer over the first pad. The nickel layer has a T-shape in a cross-sectional view of the nickel layer. The chip package structure includes a chip over the wiring substrate. The chip package structure includes a conductive bump between the nickel layer and the chip.Type: GrantFiled: June 26, 2023Date of Patent: October 22, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Ching Hsu, Yu-Huan Chen, Chen-Shien Chen
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Patent number: 12119276Abstract: A package structure is provided. The package structure includes a substrate and a chip-containing structure over the substrate. The package structure also includes a protective lid attached to the substrate through a first adhesive element and a second adhesive element. The first adhesive element has a first electrical resistivity, and the second adhesive element has a second electrical resistivity. The second electrical resistivity is greater than the first electrical resistivity. The second adhesive element is closer to a corner edge of the substrate than the first adhesive element, and a portion of the second adhesive element is between the first adhesive element and the chip-containing structure.Type: GrantFiled: July 27, 2023Date of Patent: October 15, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Yi Lin, Kuang-Chun Lee, Chien-Chen Li, Chen-Shien Chen
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Patent number: 12119237Abstract: A semiconductor device package is provided, including a package substrate, a semiconductor device, a metal lid, and a metal thermal interface material (TIM). The package substrate has a first surface. The semiconductor device is disposed over the first surface of the package substrate. The metal lid is disposed over the semiconductor device and the package substrate. The metal TIM is interposed between the metal lid and the top surface of the semiconductor device for bonding the metal lid and the semiconductor device. A shape of the lateral sidewall of the metal TIM in a longitudinal section is concave arc, and the outermost point of the lateral sidewall is within the boundary of the semiconductor device.Type: GrantFiled: July 10, 2023Date of Patent: October 15, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Li Kuo, Chin-Fu Kao, Chen-Shien Chen
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Patent number: 12113055Abstract: A method comprises depositing a protection layer over a first substrate, wherein the first substrate is part of a first semiconductor die, forming an under bump metallization structure over the protection layer, forming a connector over the under bump metallization structure, forming a first dummy plane along a first edge of a top surface of the first semiconductor die and forming a second dummy plane along a second edge of the top surface of the first semiconductor die, wherein the first dummy plane and the second dummy plane form an L-shaped region.Type: GrantFiled: June 22, 2020Date of Patent: October 8, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yao-Chun Chuang, Yu-Chen Hsu, Hao Chun Liu, Chita Chuang, Chen-Cheng Kuo, Chen-Shien Chen
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Publication number: 20240332220Abstract: An organic interposer includes interconnect-level dielectric material layers embedding redistribution interconnect structures, package-side bump structures located on a first side of the interconnect-level dielectric material layers, at least one dielectric capping layer located on a second side of the interconnect-level dielectric material layers, a bonding-level dielectric layer located on the at least one dielectric capping layer, metallic pad structures including pad via portions embedded in the at least one dielectric capping layer and pad plate portions embedded in the bonding-level dielectric layer, and an edge seal ring structure vertically extending from a first horizontal plane including bonding surfaces of the package-side bump structures to a second horizontal plane including distal planar surfaces of the metallic pad structures.Type: ApplicationFiled: June 13, 2024Publication date: October 3, 2024Inventors: Hong-Seng Shue, Yao-Chun Chuang, Yu-Tse Su, Chen-Shien Chen, Ching-Wen Hsiao, Ming-Da Cheng
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Publication number: 20240321661Abstract: A method includes forming a reconstructed package substrate, which includes placing a plurality of substrate blocks over a carrier, encapsulating the plurality of substrate blocks in an encapsulant, planarizing the encapsulant and the plurality of substrate blocks to reveal redistribution lines in the plurality of substrate blocks, and forming a redistribution structure overlapping both of the plurality of substrate blocks and encapsulant. A package component is bonded over the reconstructed package substrate.Type: ApplicationFiled: May 30, 2024Publication date: September 26, 2024Inventors: Chen-Shien Chen, Kuo-Ching Hsu, Wei-Hung Lin, Hui-Min Huang, Ming-Da Cheng, Mirng-Ji Lii
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Publication number: 20240312900Abstract: A chip package structure is provided. The chip package structure includes a first wiring substrate comprising a substrate, a first pad, a second pad, and an insulating layer. The first pad and the second pad are respectively over a first surface and a second surface of the substrate, the first surface is opposite to the second surface, the insulating layer is over the first surface and partially covers the first pad, and the first pad is wider than the second pad. The chip package structure includes a nickel-containing layer over the first pad. The chip package structure includes a conductive protection layer over the nickel-containing layer. The conductive protection layer has a curved surface, and a recess is surrounded by the curved surface and an inner wall of the insulating layer over the first pad.Type: ApplicationFiled: May 28, 2024Publication date: September 19, 2024Inventors: Yu-Huan CHEN, Kuo-Ching HSU, Chen-Shien CHEN
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Publication number: 20240304535Abstract: A device includes: a first integrated circuit (IC) die; a first dielectric material around first sidewalls of the first IC die; a second IC die over and electrically coupled to the first IC die; and a second dielectric material over the first dielectric material and around second sidewalls of the second IC die, where in a top view, the second sidewalls of the second IC die are disposed within, and are spaced apart from, the first sidewalls of the first IC die.Type: ApplicationFiled: June 14, 2023Publication date: September 12, 2024Inventors: Chen-Shien Chen, Ting Hao Kuo, Hui-Chun Chiang, Yu-Chia Lai
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Publication number: 20240302410Abstract: A probe head structure is provided. The probe head structure includes a flexible substrate having a top surface and a bottom surface. The probe head structure includes a first probe pillar passing through the flexible substrate. The probe head structure includes a redistribution structure on the top surface of the flexible substrate and the first probe pillar. The probe head structure includes a wiring substrate over the redistribution structure. The probe head structure includes a first conductive bump connected between the wiring substrate and the redistribution structure.Type: ApplicationFiled: May 21, 2024Publication date: September 12, 2024Inventors: Wen-Yi LIN, Hao CHEN, Chuan-Hsiang SUN, Mill-Jer WANG, Chien-Chen LI, Chen-Shien CHEN
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Patent number: 12087718Abstract: The present disclosure relates to an integrated chip structure having a first substrate including a plurality of transistor devices disposed within a semiconductor material. An interposer substrate includes vias extending through a silicon layer. A copper bump is disposed between the first substrate and the interposer substrate. The copper bump has a sidewall defining a recess. Solder is disposed over the copper bump and continuously extending from over the copper bump to within the recess. A conductive layer is disposed between the first substrate and the interposer substrate and is separated from the copper bump by the solder.Type: GrantFiled: April 14, 2023Date of Patent: September 10, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Horng Chang, Tin-Hao Kuo, Chen-Shien Chen, Yen-Liang Lin