Patents by Inventor Cheng-Han Lee

Cheng-Han Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230253254
    Abstract: A semiconductor device and method includes: forming a gate stack over a substrate; growing a source/drain region adjacent the gate stack, the source/drain region being n-type doped Si; growing a semiconductor cap layer over the source/drain region, the semiconductor cap layer having Ge impurities, the source/drain region free of the Ge impurities; depositing a metal layer over the semiconductor cap layer; annealing the metal layer and the semiconductor cap layer to form a silicide layer over the source/drain region, the silicide layer having the Ge impurities; and forming a metal contact electrically coupled to the silicide layer.
    Type: Application
    Filed: April 17, 2023
    Publication date: August 10, 2023
    Inventors: Shahaji B. More, Zheng-Yang Pan, Cheng-Han Lee, Shih-Chieh Chang
  • Patent number: 11721760
    Abstract: A dopant boost in the source/drain regions of a semiconductor device, such as a transistor can be provided. A semiconductor device can include a doped epitaxy of a first material having a plurality of boosting layers embedded within. The boosting layers can be of a second material different from the first material. Another device can include a source/drain feature of a transistor. The source/drain feature includes a doped source/drain material and one or more embedded distinct boosting layers. A method includes growing a boosting layer in a recess of a substrate, where the boosting layer is substantially free of dopant. The method also includes growing a layer of doped epitaxy in the recess on the boosting layer.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Yu Ma, Zheng-Yang Pan, Shih-Chieh Chang, Cheng-Han Lee
  • Publication number: 20230229273
    Abstract: A touch sensitive structure, comprising: a first electrode layer, further comprises multiple first electrodes in parallel to a first axis in a touch area; a second electrode layer, further comprises multiple second electrodes in parallel to a second axis in the touch area; a touch button outside of the touch area, the touch button further comprises a first button electrode in the first electrode layer and a second button electrode in the second electrode layer, wherein a shape and a position of the first button electrode are corresponding to the second button electrode; a first wire, in the first electrode layer and outside the touch area, for connecting the first button electrode; a second wire, in the second electrode layer and outside the touch area; and a conductive layer being arranged in between an external conductive object on top of the touch sensitive structure and at least one of following: the first wire; and the second wire.
    Type: Application
    Filed: December 28, 2022
    Publication date: July 20, 2023
    Inventor: CHENG-HAN LEE
  • Publication number: 20230223477
    Abstract: A semiconductor device includes a substrate; a fin protruding above the substrate, the fin including a compound semiconductor material that includes a semiconductor material and a first dopant, the first dopant having a different lattice constant than the semiconductor material, where a concentration of the first dopant in the fin changes along a first direction from an upper surface of the fin toward the substrate; a gate structure over the fin; a channel region in the fin and directly under the gate structure; and source/drain regions on opposing sides of the gate structure, the source/drain regions including a second dopant, where a concentration of the second dopant at a first location within the channel region is higher than that at a second location within the channel region, where the concentration of the first dopant at the first location is lower than that at the second location.
    Type: Application
    Filed: March 17, 2023
    Publication date: July 13, 2023
    Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang
  • Publication number: 20230207634
    Abstract: The present disclosure describes a semiconductor device includes a substrate, a buffer layer on the substrate, and a stacked fin structure on the buffer layer. The buffer layer can include germanium, and the stacked fin structure can include a semiconductor layer with germanium and tin. The semiconductor device further includes a gate structure wrapped around a portion of the semiconductor layer and an epitaxial structure on the buffer layer and in contact with the semiconductor layer. The epitaxial structure includes germanium and tin.
    Type: Application
    Filed: March 6, 2023
    Publication date: June 29, 2023
    Applicant: Taiwan Semiconductor Manufacturing co., Ltd.
    Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang, Shih-Ya Lin, Chung-En Tsai, Chee-Wee Liu
  • Publication number: 20230195269
    Abstract: A touch screen which is provided comprising: a display; multiple first electrodes in parallel to a first axis and multiple second electrodes in parallel to a second axis, wherein the first and the second electrodes are overlapped with the display; and an opaque and non-conductive frame which surrounds and overlaps on top of edges of the display, wherein the first axis is perpendicular to the second axis, the first electrodes intersect with the second electrodes, a distance between center lines of any two adjacent second electrodes is a second pitch, a distance in the first axis between a center line of the first one of the second electrodes and a second edge of the frame in parallel to the second axis is less than or equals to a quarter of the second pitch, a distance in the first axis between a center line of the last one of the second electrodes and a fourth edge of the frame in parallel to the second axis is less than or equals to a quarter of the second pitch.
    Type: Application
    Filed: December 1, 2022
    Publication date: June 22, 2023
    Inventor: CHENG-HAN LEE
  • Publication number: 20230197805
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a first source/drain epitaxial feature disposed in an NMOS region, a second source/drain epitaxial feature disposed in the NMOS region, a first dielectric feature disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature, a third source/drain epitaxial feature disposed in a PMOS region, a second dielectric feature disposed between the second source/drain epitaxial feature and the third source/drain epitaxial feature, and a conductive feature disposed over the first, second, and third source/drain epitaxial features and the first and second dielectric features.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 22, 2023
    Inventors: Shahaji B. MORE, Jia-Ying MA, Cheng-Han LEE
  • Publication number: 20230176681
    Abstract: The invention provides a hovering touch panel/hovering touch device, which includes a plurality of driving lines extending along a first axis, a plurality of sensing lines extending along a second axis and intersecting the driving lines respectively, the intersections of the driving lines and the sensing lines each forming a respective intersected point, and a plurality of hovering units respectively set on the driving lines or the sensing lines between adjacent intersected points, each hovering unit having an even number of linear hovering sections connected to the same point of each driving line or sensing line.
    Type: Application
    Filed: February 8, 2022
    Publication date: June 8, 2023
    Inventor: Cheng-Han LEE
  • Patent number: 11670681
    Abstract: A method includes forming an N well and a P well in a substrate; depositing a first layer having silicon over the N well and the P well; depositing a first dielectric layer over the first layer; forming a resist pattern over the first dielectric layer, the resist pattern providing an opening directly above the N well; etching the first dielectric layer and the first layer through the opening, leaving a first portion of the first layer over the N well; removing the resist pattern; and epitaxially growing a second layer having silicon germanium (SiGe) over the first portion of the first layer. The epitaxially growing the second layer includes steps of (a) performing a baking process, (b) depositing a silicon seed layer, and (c) depositing a SiGe layer over the silicon seed layer, wherein the steps (a), (b), and (c) are performed under about a same temperature.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shahaji B. More, Shu Kuan, Cheng-Han Lee
  • Patent number: 11662844
    Abstract: A touch sensitive processing apparatus is used to detect at least one object approximating or touching a touch screen and is configured for iteratively executing the following steps: having a driving circuit simultaneously sending a driving signal to two or more first electrodes, wherein at least one of the two or more first electrodes intersects with multiple second electrodes to form multiple intersection areas, the other of the two or more first electrodes intersects with multiple third electrodes to form multiple intersection areas; and having a sensing circuit simultaneously sensing the driving signal via the second electrodes to generate a one-dimensional sensing information and having the sensing circuit simultaneously sensing the driving signal via the third electrodes to generate another one-dimensional sensing information.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: May 30, 2023
    Assignee: EGALAX_EMPIA TECHNOLOGY INC.
    Inventors: Shang-Tai Yeh, Cheng-Han Lee
  • Publication number: 20230154802
    Abstract: A structure includes a stepped crystalline substrate that includes an upper step, a lower step, and a step rise. A first fin includes a crystalline structure having a first lattice constant. The first fin is formed over the lower step. A second fin includes a crystalline structure having a second lattice constant, the second lattice constant being different than the first lattice constant. The second fin can be formed over the upper step apart from the first fin. A second crystalline structure can be formed over the first crystalline structure and the tops of the fins aligned. The first and second fins can be made of the same material, but with different heights and different channel strain values. The first fin can be used as an NMOS fin and the second fin can be used as a PMOS fin of a CMOS FinFET.
    Type: Application
    Filed: January 3, 2023
    Publication date: May 18, 2023
    Inventors: Cheng-Han Lee, Chih-Yu Ma, Shih-Chieh Chang
  • Patent number: 11646231
    Abstract: A semiconductor device and method includes: forming a gate stack over a substrate; growing a source/drain region adjacent the gate stack, the source/drain region being n-type doped Si; growing a semiconductor cap layer over the source/drain region, the semiconductor cap layer having Ge impurities, the source/drain region free of the Ge impurities; depositing a metal layer over the semiconductor cap layer; annealing the metal layer and the semiconductor cap layer to form a silicide layer over the source/drain region, the silicide layer having the Ge impurities; and forming a metal contact electrically coupled to the silicide layer.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: May 9, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    Inventors: Shahaji B. More, Zheng-Yang Pan, Cheng-Han Lee, Shih-Chieh Chang
  • Publication number: 20230114789
    Abstract: Methods and semiconductor structures are provided. A method according to the present disclosure includes forming, over a substrate, a fin-shaped structure that includes a plurality of channel layers interleaved by a plurality of sacrificial layers, recessing a source/drain region of the fin-shaped structure to form a source/drain recess that extends into the substrate and exposes a portion of the substrate, selectively and partially recessing sidewalls of the plurality of sacrificial layers to form inner spacer recesses, forming inner spacers in the inner spacer recesses, selectively forming a buffer semiconductor layer on the exposed portion of the substrate, selectively depositing a first epitaxial layer on sidewalls of the plurality of channel layer and the buffer semiconductor layer such that a top surface of the buffer semiconductor layer is completely covered by the first epitaxial layer, and depositing a second epitaxial layer over the first epitaxial layer and the inner spacers.
    Type: Application
    Filed: January 21, 2022
    Publication date: April 13, 2023
    Inventors: Shahaji B. More, Cheng-Han Lee
  • Patent number: 11626518
    Abstract: A semiconductor device includes a substrate; a fin protruding above the substrate, the fin including a compound semiconductor material that includes a semiconductor material and a first dopant, the first dopant having a different lattice constant than the semiconductor material, where a concentration of the first dopant in the fin changes along a first direction from an upper surface of the fin toward the substrate; a gate structure over the fin; a channel region in the fin and directly under the gate structure; and source/drain regions on opposing sides of the gate structure, the source/drain regions including a second dopant, where a concentration of the second dopant at a first location within the channel region is higher than that at a second location within the channel region, where the concentration of the first dopant at the first location is lower than that at the second location.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shahaji B. More, Shih-Chieh Chang, Cheng-Han Lee
  • Patent number: 11600703
    Abstract: The present disclosure describes a semiconductor device includes a substrate, a buffer layer on the substrate, and a stacked fin structure on the buffer layer. The buffer layer can include germanium, and the stacked fin structure can include a semiconductor layer with germanium and tin. The semiconductor device further includes a gate structure wrapped around a portion of the semiconductor layer and an epitaxial structure on the buffer layer and in contact with the semiconductor layer. The epitaxial structure includes germanium and tin.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: March 7, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang, Shih-Ya Lin, Chung-En Tsai, Chee-Wee Liu
  • Publication number: 20230054243
    Abstract: The present disclosure provides a semiconductor structure and a method of forming the same. A semiconductor structure according to the present disclosure includes a plurality of nanostructures disposed over a substrate and a gate structure wrapping around each of the plurality of nanostructure. Each of the plurality of nanostructures includes a channel layer sandwiched between two cap layers along a direction perpendicular to the substrate.
    Type: Application
    Filed: February 16, 2022
    Publication date: February 23, 2023
    Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang, Wan-Hsuan Hsieh, Chung-En Tsai, Chee-Wee Liu
  • Publication number: 20230058459
    Abstract: The present disclosure provides a semiconductor structure and a method of forming the same. A semiconductor structure according to the present disclosure includes a plurality of nanostructures disposed over a substrate, a plurality of inner spacer features interleaving the plurality of nanostructures. The plurality of nanostructures are arranged along a direction perpendicular to the substrate. The plurality of inner spacer features include a bottommost inner spacer feature and upper inner spacer features disposed above the bottommost inner spacer feature. The first height of the bottommost inner spacer feature along the direction is greater than a second height of each of the upper inner spacer features.
    Type: Application
    Filed: February 16, 2022
    Publication date: February 23, 2023
    Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang, Wan-Hsuan Hsieh, Yi-Chun Liu, Chee-Wee Liu
  • Patent number: 11581411
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a first source/drain epitaxial feature disposed in an NMOS region, a second source/drain epitaxial feature disposed in the NMOS region, a first dielectric feature disposed between the first source/drain epitaxial feature and the second source/drain epitaxial feature, a third source/drain epitaxial feature disposed in a PMOS region, a second dielectric feature disposed between the second source/drain epitaxial feature and the third source/drain epitaxial feature, and a conductive feature disposed over the first, second, and third source/drain epitaxial features and the first and second dielectric features.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shahaji B. More, Jia-Ying Ma, Cheng-Han Lee
  • Publication number: 20230045521
    Abstract: Systems and methods for processing transactions using a digital payment platform.
    Type: Application
    Filed: May 23, 2022
    Publication date: February 9, 2023
    Inventors: Osama Bedier, Ray Tanaka, Victor Chau, Charles Feng, Cheng Han Lee, Lubab Al-Khawaja
  • Patent number: 11569383
    Abstract: The present disclosure describes a method to form silicon germanium (SiGe) source/drain epitaxial stacks with a boron doping profile and a germanium concentration that can induce external stress to a fully strained SiGe channel. The method includes forming one or more gate structures over a fin, where the fin includes a fin height, a first sidewall, and a second sidewall opposite to the first sidewall. The method also includes forming a first spacer on the first sidewall of the fin and a second spacer on the second sidewall of the fin; etching the fin to reduce the fin height between the one or more gate structures; and etching the first spacer and the second spacer between the one or more gate structures so that the etched first spacer is shorter than the etched second spacer and the first and second etched spacers are shorter than the etched fin. The method further includes forming an epitaxial stack on the etched fin between the one or more gate structures.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: January 31, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shahaji B. More, Huai-Tei Yang, Shih-Chieh Chang, Cheng-Han Lee