Patents by Inventor Cheng-Hsuan Lin

Cheng-Hsuan Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090246717
    Abstract: A photoresist layer is disclosed. Utilizing light diffraction properties, a transparent layer is disposed between a light-shielding layer and a photoresist layer during an exposure step, such that the patterned photoresist layer has non-vertical sidewalls. The method of the invention can be applied during front side exposure or back side exposure, and is also practical for positive type photoresists or negative photoresists.
    Type: Application
    Filed: August 6, 2008
    Publication date: October 1, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Meng-Chi Huang, Cheng-Hsuan Lin, Fuh-Yu Chang
  • Publication number: 20090161117
    Abstract: A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.
    Type: Application
    Filed: October 15, 2008
    Publication date: June 25, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: YING-JUI HUANG, CHENG-HSUAN LIN, FUH-YU CHANG
  • Publication number: 20090142710
    Abstract: The disclosed is a method for patterning a photoresist layer. An object is provided, a photoresist layer is formed on the object, and an ink pattern is printed on the photoresist layer. Shielded by the ink pattern, the photoresist is exposed and developed to be patterned. In addition, a layered material is optionally formed between the object and the photoresist layer.
    Type: Application
    Filed: April 21, 2008
    Publication date: June 4, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Cheng-Hsuan Lin, Chao-Chun Huang, Fuh-Yu Chang
  • Publication number: 20080304164
    Abstract: A composite lens structure is disclosed. The composite lens structure includes a diffusion plate and an optical structure formed on the diffusion plate. The optical structure includes a plurality of convex portions arranged in a 2-D matrix along a first direction and a second direction and a plurality of concave portions arranged in a 2-D matrix also along the first direction and the second direction. Each convex portion adjacent to a plurality of concave portions includes a low curvature portion and a high curvature portion higher than the low curvature portion. Each concave portion adjacent to a plurality of convex portions includes a low curvature portion and a high curvature portion lower than the low curvature portion. The convex portions, the concave portions and each junction of the convex portion and the concave portion have a curvature different from 0.
    Type: Application
    Filed: August 22, 2007
    Publication date: December 11, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chih-Chiang Chao, Po-Ling Shiao, Yu-Tsan Tseng, Cheng-Hsuan Lin, Mei-Chun Lai
  • Publication number: 20080217798
    Abstract: A mold structure and the manufacturing method thereof are disclosed. The mold structure is comprised of: an axle; a roller, axially ensheathing the axle; and a mold having a specific imprint pattern of microstructures formed thereon, being arranged to mount on the periphery of the roller while connecting to the axle; wherein a pulling force is exerted on the mold by the axle for stretching the mold while enabling the same to tensely adhere upon the periphery of the roller.
    Type: Application
    Filed: April 19, 2007
    Publication date: September 11, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chao-Chun Huang, Fuh-Yu Chang, Cheng-Hsuan Lin, Tune-Hune Kao
  • Publication number: 20080105560
    Abstract: A method for preparing nano metallic particles comprises the steps of dipping a conductive substrate in an electroplating solution containing metallic ions and performing an electroplating process to form the nano metallic particles on the conductive substrate by the reduction reaction of the metallic ions. The nano metallic particles can be used as a catalyst to perform a chemical vapor deposition process to form carbon nanotubes on the conductive substrate. Subsequently, fluorescent material can be positioned on the carbon nanotubes to form a light-emitting device. When a predetermined voltage is applied between the conductive substrate and the fluorescent material, the carbon nanotubes on the conductive substrate emit electrons due to the point discharge effect, and the electrons bombard the fluorescent material to emit light beams.
    Type: Application
    Filed: February 13, 2007
    Publication date: May 8, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Yu Tsan Tseng, Cheng Hsuan Lin, Po Ling Shiao
  • Publication number: 20080055932
    Abstract: An optical diffusion structure includes an optical diffusion structure comprising a plurality of convex portions and a plurality of concave portions. Each convex portion is adjacent to a plurality of concave portions and each concave portion is adjacent to a plurality of convex portions. The convex portions, the concave portions and each junction of the convex and concave portions have a curvature different from 0. The optical diffusion structure further includes a diffusion plate having a first surface, wherein the optical diffusion structure is formed on the first surface, and the convex portions are arranged in a two dimensional array along a first direction and a second direction, and the concave portions are arranged in a two dimensional array along a third direction and a fourth direction.
    Type: Application
    Filed: February 8, 2007
    Publication date: March 6, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chih-Chiang Chao, Po-Ling Shiao, Yu-Tsan Tseng, Cheng-Hsuan Lin, Mei Chun Lai
  • Publication number: 20080037947
    Abstract: An optical diffusion module comprises a first diffusion structure comprising a plurality of convex portions and a plurality of concave portions arranged alternatingly, and a second diffusion structure comprising a plurality of convex portions and a plurality of concave portions arranged alternatingly. Light from a light source passes through the first diffusion structure and the second diffusion structure sequentially, and each convex portion is adjacent to a plurality of concave portions and each concave portion is adjacent to a plurality of convex portions, and the convex portions, the concave portions and each junction of the convex and concave portions have a curvature different from 0.
    Type: Application
    Filed: February 12, 2007
    Publication date: February 14, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chih-Chiang Chao, Po-Ling Shiao, Yu-Tsan Tseng, Cheng-Hsuan Lin, Mei Chun Lai