Abstract: A particle removal device, along with methods of using such, are described. The device includes a handheld module having a body. A first one or more channels and a second one or more channels are formed in the body. The body includes a nozzle, and the handheld module is configured to provide suction by the nozzle and to inject an ionized fluid stream by the nozzle. The body further includes a handle attached to the nozzle.

Abstract: An extreme ultraviolet (EUV) photolithography system generates EUV light by irradiating droplets with a laser. The system includes a droplet generator with a nozzle and a piezoelectric structure coupled to the nozzle. The generator outputs groups of droplets. A control system applies a voltage waveform to the piezoelectric structure while the nozzle outputs the group of droplets. The waveform causes the droplets of the group to have a spread of velocities that results in the droplets coalescing into a single droplet prior to being irradiated by the laser.

Abstract: Impurities in a liquefied solid fuel utilized in a droplet generator of an extreme ultraviolet photolithography system are removed from vessels containing the liquefied solid fuel. Removal of the impurities increases the stability and predictability of droplet formation which positively impacts wafer yield and droplet generator lifetime.

Abstract: A method for using an extreme ultraviolet radiation source is provided. The method includes assembling a first droplet generator onto a port of a vessel; ejecting a target droplet from the first droplet generator to a zone of excitation in front of a collector; emitting a laser toward the zone of excitation, such that the target droplet is heated by the laser to generate extreme ultraviolet (EUV) radiation; stopping the ejection of the target droplet; after stopping the ejection of the target droplet, disassembling the first droplet generator from the port of the vessel; after disassembling the first droplet generator from the port of the vessel, inserting a cleaning device into the vessel through the port; and cleaning the collector by using the cleaning device.

Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become energized and emit extreme ultraviolet radiation. A collector reflects the extreme ultraviolet radiation toward a photolithography target. The photolithography system isolates a source of droplets from oxidants to prevent the oxidation of the nozzle or the formation of metal oxides on the nozzle, both of which can adversely affect an ability of the nozzle to generate a sufficient amount of droplets and/or direct the droplets in a desired direction.

Abstract: A photolithographic apparatus includes a droplet generator, a droplet generator maintenance system, and a controller communicating with the droplet generator maintenance system. The droplet generator maintenance system operatively communicates with the droplet generator, a coolant distribution unit, a gas supply unit, and a supporting member. The gas supply unit includes a heat exchange assembly and an air heating assembly. The coolant distribution unit is configured to control the temperature of the droplet generator within the acceptable droplet generator range.

Abstract: A semiconductor package structure and a method of manufacturing a semiconductor package structure are provided. The semiconductor package structure includes a first electronic device and a second electronic device. The first electronic device has an active surface and a lateral surface angled with the active surface, and the lateral surface includes a first portion and a second portion that is non-coplanar with the first portion. The second electronic device is disposed on the active surface of the first electronic device.

Abstract: An optical communication package structure includes a wiring structure, at least one via structure, a redistribution structure, at least one optical device and at least one electrical device. The wiring structure includes a main portion and a conductive structure disposed on an upper surface of the main portion. The main portion defines at least one through hole extending through the main portion. The via structure is disposed in the at least one through hole of the main portion and electrically connected to the conductive structure. The redistribution structure is disposed on a lower surface of the main portion and electrically connected to the via structure. The optical device is disposed adjacent to the upper surface of the main portion and electrically connected to the conductive structure. The electrical device is disposed on and electrically connected to the conductive structure.

Abstract: A particle removal device, along with methods of using such, are described. The device includes a handheld module having a body. A first one or more channels and a second one or more channels are formed in the body. The body includes a nozzle, and the handheld module is configured to provide suction by the nozzle and to inject an ionized fluid stream by the nozzle. The body further includes a handle attached to the nozzle.

Abstract: An optical communication package structure includes a wiring structure, at least one via structure, a redistribution structure, at least one optical device and at least one electrical device. The wiring structure includes a main portion and a conductive structure disposed on an upper surface of the main portion. The main portion defines at least one through hole extending through the main portion. The via structure is disposed in the at least one through hole of the main portion and electrically connected to the conductive structure. The redistribution structure is disposed on a lower surface of the main portion and electrically connected to the via structure. The optical device is disposed adjacent to the upper surface of the main portion and electrically connected to the conductive structure. The electrical device is disposed on and electrically connected to the conductive structure.

Abstract: A particle removal device, along with methods of using such, are described. The device includes a handheld module having a body. A first one or more channels and a second one or more channels are formed in the body. The body includes a nozzle, and the handheld module is configured to provide suction by the nozzle and to inject an ionized fluid stream by the nozzle. The body further includes a handle attached to the nozzle.

Abstract: A photolithographic apparatus includes a droplet generator, a droplet generator maintenance system, and a controller communicating with the droplet generator maintenance system. The droplet generator maintenance system operatively communicates with the droplet generator, a coolant distribution unit, a gas supply unit, and a supporting member. The gas supply unit includes a heat exchange assembly and an air heating assembly. The coolant distribution unit is configured to control the temperature of the droplet generator within the acceptable droplet generator range.

Abstract: An optical communication package structure includes a wiring structure, at least one via structure, a redistribution structure, at least one optical device and at least one electrical device. The wiring structure includes a main portion and a conductive structure disposed on an upper surface of the main portion. The main portion defines at least one through hole extending through the main portion. The via structure is disposed in the at least one through hole of the main portion and electrically connected to the conductive structure. The redistribution structure is disposed on a lower surface of the main portion and electrically connected to the via structure. The optical device is disposed adjacent to the upper surface of the main portion and electrically connected to the conductive structure. The electrical device is disposed on and electrically connected to the conductive structure.

Abstract: A polytetrafluoroethylene textile and manufacturing method thereof is disclosed. a pretreatment process is performed on a plurality of polytetrafluoroethylene yarns. In the pretreatment process, a step of extending the polytetrafluoroethylene yarns are extended, the polytetrafluoroethylene yarns are knitted into a polytetrafluoroethylene fabric, the shape of the polytetrafluoroethylene fabric is fixed, and the polytetrafluoroethylene fabric are de-knitted into the polytetrafluoroethylene yarns with a plurality of knit-assisting parts. A second knitting process is performed to knit the polytetrafluoroethylene yarns and a plurality of artificial yarns together to obtain the polytetrafluoroethylene textile.

Abstract: A polytetrafluoroethylene textile and manufacturing method thereof is disclosed. a pretreatment process is performed on a plurality of polytetrafluoroethylene yarns. In the pretreatment process, a step of extending the polytetrafluoroethylene yarns are extended, the polytetrafluoroethylene yarns are knitted into a polytetrafluoroethylene fabric, the shape of the polytetrafluoroethylene fabric is fixed, and the polytetrafluoroethylene fabric are de-knitted into the polytetrafluoroethylene yarns with a plurality of knit-assisting parts. A second knitting process is performed to knit the polytetrafluoroethylene yarns and a plurality of artificial yarns together to obtain the polytetrafluoroethylene textile.

Abstract: A polytetrafluoroethylene textile and manufacturing method thereof is disclosed. The method of manufacturing the polytetrafluoroethylene textile comprises: providing a polytetrafluoroethylene yarn and an artificial fiber yarn; and performing a knitting process to knit the polytetrafluoroethylene yarn and the artificial fiber yarn together to thereby obtain the polytetrafluoroethylene textile. The polytetrafluoroethylene textile comprises: an artificial fiber structural layer comprising a plurality of artificial fiber yarns; and a polytetrafluoroethylene structural layer comprising a plurality of polytetrafluoroethylene yarns, and a part of the polytetrafluoroethylene yarns of the polytetrafluoroethylene structural layer and a part of the artificial fiber yarns of the artificial fiber structural layer are knitted together.

Abstract: An anti-freeze faucet contains: a first pipe, a second pipe, a check valve, and a control valve. The first pipe includes a hollow portion, an orifice, an outlet, and an inflow segment having two inlets. The second inserts into the hollow portion and includes a first connection segment, a second connection segment, and an air conduit, wherein the first connection segment has an air hole. The check valve is accommodated in the inflow segment and corresponding to the two inlets. The control valve is housed in the hollow portion and includes a base, a fitting bushing, and a coupling holder, wherein the base has two channels, and between the base and the fitting bushing is defined an accommodation chamber, the coupling holder has a rotation disc with a cold-water vent and a hot-water vent, and the coupling holder has multiple first openings and multiple second openings.

Abstract: An anti-freeze faucet contains: a first pipe, a second pipe, a control holder, a closing member, a closing member, a controlling valve, and a resilient element. The first pipe includes a first through hole, an outlet, an inlet, a channel, and a fitting sleeve having a second through hole and an inner screwing section. The second pipe includes a vertical moving portion, a connecting portion, and an air conduit. The vertical moving portion is connected with a rotary knob and has an outer screwing section and an air orifice. The control holder includes a water aperture, a water stop ring, plural first vents, plural second vents, and a connection portion. The closing member is fitted between the control holder and the connecting portion. The controlling valve is connected with the coupling portion, and the resilient element is mounted on the coupling portion and pushes the controlling valve toward the inlet.

Abstract: An anti-freeze faucet contains: a first pipe, a second pipe, a control holder, a closing member, a closing member, a controlling valve, and a resilient element. The first pipe includes a first through hole, an outlet, an inlet, a channel, and a fitting sleeve having a second through hole and an inner screwing section. The second pipe includes a vertical moving portion, a connecting portion, and an air conduit. The vertical moving portion is connected with a rotary knob and has an outer screwing section and an air orifice. The control holder includes a water aperture, a water stop ring, plural first vents, plural second vents, and a connection portion. The closing member is fitted between the control holder and the connecting portion. The controlling valve is connected with the coupling portion, and the resilient element is mounted on the coupling portion and pushes the controlling valve toward the inlet.