Abstract: A method of manufacturing a semiconductor device includes forming a multilayer photoresist stack over a substrate, in which the multilayer photoresist stack has a first photoresist layer and a second photoresist layer over the first photoresist layer, and the second photoresist layer is less reactive to hydrogen than the first photoresist layer, exposing the multilayer photoresist stack to an EUV radiation, and developing the exposed multilayer photoresist stack.

Abstract: A method of manufacturing a semiconductor device includes forming a photoresist layer over a substrate, exposing the photoresist layer to an EUV radiation, developing the photoresist layer to form a patterned photoresist, forming a coating layer on the patterned photoresist, and after forming the coating layer on the patterned photoresist, etching the substrate using a combination of the coating layer and the patterned photoresist as an etching mask.

Abstract: Example embodiments described herein involve a system for testing a light-emitting module. The light-emitting module may include a mounting platform configured to hold a light-emitting module for a camera. The mounting platform may also be configured to rotate. The system may further include a housing holding a plurality of photodiodes arranged in an array over at least a 90 degree arc of a hemisphere. The system may also include a controller configured to control the photodiodes and the rotation of the mounting platform.

Abstract: A camera module includes a housing with an opening and a portion that surrounds the opening, wherein the portion of the housing is transparent to near infrared (NIR) light. A fisheye lens is disposed within the opening such that a portion of the fisheye lens protrudes through the opening. An image sensor is disposed within the housing and optically coupled to the fisheye lens. The image sensor is sensitive to visible light and NIR light. A plurality of NIR light emitters is disposed within the housing. The NIR light emitters are configured to emit NIR light through the NIR-transparent portion of the housing. The NIR-transparent portion of the housing may include a light-diffusing structure, such as a pattern of microlenses formed on an inner surface of the NIR-transparent portion of the housing, to spread out the NIR light emitted by the NIR light emitters.

Abstract: A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical solution is dispensed in a spin-coater. The variable-volume buffer tank is refilled by emptying a storage container filled with the chemical solution into the variable-volume buffer tank.

Abstract: A method of manufacturing a semiconductor device includes forming a multilayer photoresist stack over a substrate, in which the multilayer photoresist stack has a first photoresist layer and a second photoresist layer over the first photoresist layer, and the second photoresist layer is less reactive to hydrogen than the first photoresist layer, exposing the multilayer photoresist stack to an EUV radiation, and developing the exposed multilayer photoresist stack.

Abstract: A power converter having a stable output voltage is provided. The power converter includes a high-side switch, a low-side switch, an error amplifier, a low-side feedback circuit, a pulse wave signal generator circuit, a control circuit and a driver circuit. The low-side feedback circuit outputs a blank clock signal according to a voltage of a second end of the low-side switch, a low-side drive signal of a control end of the low-side switch and an error amplified signal from the error amplifier. The pulse wave signal generator circuit sets a frequency of a clock signal according to the blank clock signal. The control circuit outputs a control signal according to the clock signal. The driver circuit, according to the control signal, outputs a high-side drive signal to a control end of the high-side switch and outputs the low-side drive signal to the control end of the low-side switch.

Abstract: Example embodiments relate to vehicle sensor modules with external audio receivers. An example sensor module may include sensors and can be coupled to a vehicle's roof with a first microphone positioned proximate to the front of the sensor module. The sensor module can also include a second microphone extending into a first side of the sensor module such that the second microphone is configured to detect audio originating from an environment located relative to a first side of the vehicle and a third microphone extending into a second side of the sensor module such that the third microphone is configured to detect audio originating from the environment located relative to a second side of the vehicle, wherein the second side is opposite of the first side.

Abstract: A dispensing system includes a dispense material supply that contains a dispense material and a dispensing pump connected downstream from the dispense material supply. The dispensing pump includes a body made of a first electrically conductive material, one or more first electrical contacts that are disposed on the body of the dispensing pump, and one or more first connection wires that are coupled between each one of the one or more first electrical contacts and ground. The dispensing system also includes a dispensing nozzle connected downstream from the dispensing pump and includes a tube made of a second electrically conductive material, one or more second electrical contacts that are disposed on an outer surface of the tube, and one or more second connection wires that are coupled between each one of the one or more second electrical contacts and the ground.

Abstract: A power conversion system having spread spectrum and phase shifting mechanisms is provided. Each of a plurality of power converters of the power conversion system includes a spread spectrum instructing circuit, a synchronization signal detecting circuit, an oscillator circuit and a phase shifting circuit. The oscillator circuit outputs an oscillation signal according to a spread spectrum instruction parameter from the spread spectrum instructing circuit or a synchronization detected signal from the synchronization signal detecting circuit. The phase shifting circuit shifts phases of a plurality of waveforms of the oscillation signal to generate a clock signal. The phase shifting circuit of each of the plurality of power converters outputs the clock signal to a next one of the plurality of power converters. The synchronization signal detecting circuit of each of the power converters detects the clock signal to output the synchronization detected signal.

Abstract: A lithography includes a storage tank that stores process chemical fluid, an anti-collision frame, and an integrated sensor assembly. The storage tank includes a dispensing port positioned at a lowest part of the storage tank in a gravity direction. The anti-collision frame is coupled to the storage tank. An integrated sensor assembly is disposed on at least one of the anti-collision frame and the storage tank to measure a variation in fluid quality in response to fluid quality measurement of fluid.

Abstract: Example embodiments described herein involve a system for testing a light-emitting module. The light-emitting module may include a mounting platform configured to hold a light-emitting module for a camera. The mounting platform may also be configured to rotate. The system may further include a housing holding a plurality of photodiodes arranged in an array over at least a 90 degree arc of a hemisphere. The system may also include a controller configured to control the photodiodes and the rotation of the mounting platform.

Abstract: An electrostatic discharge (ESD) mitigating article for storing a semiconductor device or for transporting a process fluid during semiconductor manufacturing is provided. The article includes a conductive polymer that comprises conjugated segments of arylene or heteroaryl groups connected to each other via an optional vinylene group, ethynylene group or a divalent linker comprising a carbon, nitrogen, oxygen, sulfur, selenium, or silicon atom in the polymer backbone.

Abstract: Example embodiments relate to vehicle sensor modules with external audio receivers. An example sensor module may include sensors and can be coupled to a vehicle's roof with a first microphone positioned proximate to the front of the sensor module. The sensor module can also include a second microphone extending into a first side of the sensor module such that the second microphone is configured to detect audio originating from an environment located relative to a first side of the vehicle and a third microphone extending into a second side of the sensor module such that the third microphone is configured to detect audio originating from the environment located relative to a second side of the vehicle, wherein the second side is opposite of the first side.

Abstract: A power conversion system having spread spectrum and phase shifting mechanisms is provided. Each of a plurality of power converters of the power conversion system includes a spread spectrum instructing circuit, a synchronization signal detecting circuit, an oscillator circuit and a phase shifting circuit. The oscillator circuit outputs an oscillation signal according to a spread spectrum instruction parameter from the spread spectrum instructing circuit or a synchronization detected signal from the synchronization signal detecting circuit. The phase shifting circuit shifts phases of a plurality of waveforms of the oscillation signal to generate a clock signal. The phase shifting circuit of each of the plurality of power converters outputs the clock signal to a next one of the plurality of power converters. The synchronization signal detecting circuit of each of the power converters detects the clock signal to output the synchronization detected signal.

Abstract: A power converter having a negative current control mechanism is provided. The power converter includes an error amplifying circuit, a first comparator, a switch control circuit, a compensation trigger circuit and a compensation current supplying circuit. The error amplifying circuit multiplies a difference between a voltage of a second terminal of an inductor and a reference voltage by a gain to output a first error amplified signal. The first comparator compares a voltage of a first terminal of the inductor with a voltage of the resistor connected to a low-side switch to output a comparison signal. The switch control circuit controls a high-side switch and the low-side switch according to the comparison signal. The compensation trigger circuit, according to the comparison signal, determines whether to trigger the compensation current supplying circuit to supply a compensation current to the resistor according to the first error amplified signal.

Abstract: A sensor module comprising a housing defining an internal cavity having a proximal opening and a distal opening, a first barrier that covers the proximal opening of the internal cavity, a second barrier that is positioned between the first barrier and the proximal opening of the internal cavity, at least one microphone acoustically coupled to the distal opening of the internal cavity, and a porous plastic material that fills a particular portion of the internal cavity located between the proximal opening and the distal opening.

Abstract: A device includes a first transistor, a second transistor, and a dielectric structure. The first transistor is over a substrate and has a first gate structure. The second transistor is over the substrate and has a second gate structure. The dielectric structure is between the first gate structure and the second gate structure. The dielectric structure has a width increasing from a bottom position of the dielectric structure to a first position higher than the bottom position of the dielectric structure. A width of the first gate structure is less than the width of the dielectric structure at the first position.

Abstract: A power converter having a stable output voltage is provided. The power converter includes a high-side switch, a low-side switch, an error amplifier, a low-side feedback circuit, a pulse wave signal generator circuit, a control circuit and a driver circuit. The low-side feedback circuit outputs a blank clock signal according to a voltage of a second end of the low-side switch, a low-side drive signal of a control end of the low-side switch and an error amplified signal from the error amplifier. The pulse wave signal generator circuit sets a frequency of a clock signal according to the blank clock signal. The control circuit outputs a control signal according to the clock signal. The driver circuit, according to the control signal, outputs a high-side drive signal to a control end of the high-side switch and outputs the low-side drive signal to the control end of the low-side switch.

Abstract: A system and method for depositing a photoresist and utilizing the photoresist are provided. In an embodiment a deposition chamber is utilized along with a first precursor material comprising carbon-carbon double bonds and a second precursor material comprising repeating units to deposit the photoresist onto a substrate. The first precursor material is turned into a plasma in a remote plasma chamber prior to being introduced into the deposition chamber. The resulting photoresist comprises a carbon backbone with carbon-carbon double bonds.