Abstract: Television broadcasting systems of this invention comprise an imaging system, and transmission system, and a displaying system. The imaging system captures two-dimensional images of an object at different focal plane, and generates an all-in-focused image and depth profile. A data signal carrying the image data is generated and transmitted over a broadcasting system compatible with commercial two-dimensional television broadcasting, cable, and/or alternative systems. The depth profile is transmitted by using vacant space in video/audio signal within the allocated channel bandwidth. The data signal is received by the displaying system and the extracts the all-in-focused image and depth information from the data signal. The object is restored from all-in-focused image and depth profile and displayed on the displaying system as a three-dimensional spatial image. Viewers having conventional two-dimensional display device can watch enhanced two-dimensional images.

Abstract: A lens driving apparatus which lessens shake of the lenses is provided. The lens driving apparatus includes a lens support unit comprising a first support and a second support that face each other, and a slope on an inner surface of the first support, wherein one or more lenses are mounted on the lens support unit; a contact unit disposed between the first and second supports, wherein a protrusion is formed on one surface of the contact unit facing the slope; a force application unit configured to apply a force to the contact unit so that the protrusion contacts the slope; and a driving unit configured to contact another surface of the contact unit and configured to move the lens support unit in an optical axis direction.

Abstract: The present invention provides an automatic focus imaging system comprising a lens unit, an image sensor, and a Micro-Electro-Mechanical System (MEMS) unit fabricated by microfabrication technology to improve the portability and focusing speed of the automatic focus imaging system. The MEMS unit for automatic focusing comprises a substrate having a control circuitry, at least one reflective surface movably connected to the substrate, and at least one actuation unit comprising a micro-actuator having a large in-plane translation and at least one micro-converter configured to convert the large in-plane translation of the micro-actuator to the large out-of-plane translation of the reflective surface. The MEMS unit changes a distance between lens unit and the image sensor by controlling the out-of-plane translation of the reflective surface in order to form an in-focus image on the image sensor.

Abstract: An uneven area inspection system of the present invention comprises a patterned panel comprising a panel, wherein the panel have a surface on which a pattern is formed, an object with at least one surface reflecting light from the patterned panel, an imaging unit optically coupled to the patterned panel and the object and configured to capture the image of the patterned panel reflected by the surface of the object, and an image processing unit configured to process the captured image to compare the pattern in the patterned panel and the pattern in the captured image. The object can have uneven area and the uneven area of the object is inspected by comparing the pattern in the patterned panel and the pattern in the captured image.

Abstract: A wafer inspection method comprises: performing an exposure process on a wafer partitioned into fields, wherein the exposure process is performed on a first plurality of the fields in a first scan direction and wherein the exposure process is performed on a second plurality of the fields in a second scan direction; storing scan direction information for the first plurality of fields and the second plurality of fields corresponding to whether the exposure process is performed in the first scan direction or in the second scan direction; obtaining image information on the surface of the wafer subjected to the exposure process; determining whether a repetitive defect pattern is present in the image information; and determining whether the repetitive defect pattern is dependent on scan direction by identifying a correlation between the presence of repetitive defect patterns on the wafer and the scan direction information.

Abstract: The present invention provides a three-dimensional camcorder comprising a three-dimensional imaging system acquiring the three-dimensional image information of an object and a three-dimensional viewfinder displaying three-dimensional image using at least one variable focal length micromirror array lens.

Abstract: A lens driving apparatus which lessens shake of the lenses is provided. The lens driving apparatus includes a lens support unit comprising a first support and a second support that face each other, and a slope on an inner surface of the first support, wherein one or more lenses are mounted on the lens support unit; a contact unit disposed between the first and second supports, wherein a protrusion is formed on one surface of the contact unit facing the slope; a force application unit configured to apply a force to the contact unit so that the protrusion contacts the slope; and a driving unit configured to contact another surface of the contact unit and configured to move the lens support unit in an optical axis direction.

Abstract: An optical system with optical image stabilization of the present invention comprises at least one movement determination unit determining a movement of the optical system, a control circuitry generating a movement compensation signal using the movement information of the optical system from the movement determination unit, and a Micro-Electro Mechanical System (MEMS) unit made by microfabrication technology and controlled by the control circuitry with the movement compensation signal 32C to stabilize an image of an object formed on the image plane. The MEMS unit comprises a substrate, an MEMS mirror movably connected to the substrate and configured to have a motion comprising a rotation, and at least one actuation unit configured to actuating the MEMS mirror.

Abstract: The present invention provides an automatic focus imaging system comprising a lens unit, an image sensor, and a Micro-Electro-Mechanical System (MEMS) unit fabricated by microfabrication technology to improve the portability and focusing speed of the automatic focus imaging system. The MEMS unit for automatic focusing comprises a substrate having a control circuitry, at least one reflective surface movably connected to the substrate, and at least one actuation unit comprising a micro-actuator having a large in-plane translation and at least one micro-converter configured to convert the large in-plane translation of the micro-actuator to the large out-of-plane translation of the reflective surface. The MEMS unit changes a distance between lens unit and the image sensor by controlling the out-plane translation of the reflective surface in order to form in-focus mage on the image sensor.

Abstract: A multi-step microactuator is provided with the multiple supports in a stepper plate to give multi-step displacement to a controlled object. The microactuator has advantages such that multiple motion can be applied to the controlled object and that the object can be controlled in a low driving voltage and that simple motion control is applied by digital controlling and that the degrees of freedom in motion of the object can be chosen by the number of the stepper plate and that only single voltage is needed for driving the micromirror motion. With many advantages, the multi-step microactuator provides a solution to overcome the difficulties in controlling multi-step motion.

Abstract: The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.

Abstract: An optical tracking system using a variable focal length lens includes at least one camera system, and the at least one camera system includes an objective lens system, configured to receive an object image, and at least one micromirror array lens, optically coupled to the objective lens system, configured to focus the object image received by the objective lens system onto an image sensor. The image sensor is optically coupled to the micromirror array lens, configured to receive the focused object image from the micromirror array lens and to sense the focused object image. The advantages of the present invention include ability to rapidly change the focal length and optical axis of a camera system, allowing for high-resolution, wide-angle imaging.

Abstract: The present invention provides a three-dimensional endoscope system comprising a three-dimensional imaging device and a three-dimensional display device using a variable focal length micromirror array lens. The micromirror array lens has enough focusing speed and focusing depth range for three-dimensional imaging and realistic three-dimensional display.

Abstract: A new three-dimensional imaging system has been needed to overcome the problems of the prior arts using conventional variable focal length lenses, which have slow response time, small focal length variation, and low focusing efficiency, and require a complex mechanism to control it. The three-dimensional imaging system of the present invention uses the variable focal length micromirror array lens. Since the micromirror array lens has many advantages such as very fast response time, large focal length variation, high optical focusing efficiency, large size aperture, low cost, simple mechanism, and so on, the three-dimensional imaging system can get a real-time three-dimensional image with large depth range and high depth resolution.

Abstract: The objective of the present invention is to provide a high-speed, miniaturized, low-cost DVD recording and reproducing system. The present invention is particularly directed to a motorless optical pick-up device for recording and/or reading information on or from an optical disc (CD or DVD), which provides focusing, tracking, seamless layer jumping, tilt compensation, and CD/DVD compatibility.

Abstract: A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.

Abstract: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

Abstract: A three-dimensional optical mouse device with a Micromirror Array Lens (MMAL) is provided. To have the three-dimensional optical mouse system, a three-dimensional imaging device is used for detecting the motion of optical pointer or fingers of the user and gives a location of the pointer to computer working as a pointing device in three-dimension. This three-dimensional pointing system uses three-dimensional imaging device using MMAL with variable focal length.

Abstract: A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.

Abstract: A compact auto-focus image taking lens system with a Micromirror Array Lens and a lens-surfaced prism of the present invention comprises a lens-surfaced prism, an aperture stop, a first lens element, a second lens element, a Micromirror Array Lens, and an image surface, optionally an infrared cut-off filter. By introducing a Micromirror Array Lens and a lens-surfaced prism, the compact auto-focus image taking lens system with a Micromirror Array Lens and a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, fast focusing speed, low power consumption, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.