Patents by Inventor Chetan MAHADESWARASWAMY
Chetan MAHADESWARASWAMY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250047976Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: ApplicationFiled: October 23, 2024Publication date: February 6, 2025Inventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 12155930Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: GrantFiled: December 20, 2023Date of Patent: November 26, 2024Assignee: X Development LLCInventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Publication number: 20240259678Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: ApplicationFiled: December 20, 2023Publication date: August 1, 2024Inventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 11902655Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: GrantFiled: January 30, 2023Date of Patent: February 13, 2024Assignee: X Development LLCInventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Publication number: 20230239568Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: ApplicationFiled: January 30, 2023Publication date: July 27, 2023Inventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 11595561Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: GrantFiled: April 1, 2021Date of Patent: February 28, 2023Assignee: X Development LLCInventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 11373396Abstract: Systems and methods for extracting a feature in an image are provided. In one example embodiment, a computer-implemented method includes obtaining image data representing a scene, wherein the image data includes a plurality of images of the scene, each image associated with a different polarization angle. The method includes determining attribute information based at least in part on the plurality of images. The method includes determining one or more features in the image data based at least in part on the attribute information.Type: GrantFiled: November 6, 2017Date of Patent: June 28, 2022Assignee: GOOGLE LLCInventors: Chetan Mahadeswaraswamy, Jingjin Xie, Christopher James Ducote
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Patent number: 11158528Abstract: Methods and systems for controlling temperatures in plasma processing chamber with a combination of proportional and pulsed fluid control valves. A heat transfer fluid loop is thermally coupled to a chamber component, such as a chuck. The heat transfer fluid loop includes a supply line and a return line to each of hot and cold fluid reservoirs. In an embodiment, an analog valve (e.g., in the supply line) is controlled between any of a closed state, a partially open state, and a fully open state based on a temperature control loop while a digital valve (e.g., in the return line) is controlled to either a closed state and a fully open state.Type: GrantFiled: February 22, 2019Date of Patent: October 26, 2021Assignee: Applied Materials, Inc.Inventor: Chetan Mahadeswaraswamy
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Publication number: 20210227125Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: ApplicationFiled: April 1, 2021Publication date: July 22, 2021Inventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 10972649Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: GrantFiled: February 27, 2019Date of Patent: April 6, 2021Assignee: X Development LLCInventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 10854425Abstract: Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature.Type: GrantFiled: February 2, 2016Date of Patent: December 1, 2020Assignee: Applied Materials, Inc.Inventors: Chetan Mahadeswaraswamy, Walter R Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini Pattar, Duy D Nguyen, Tina Tsong, Shane C Nevil, Douglas A Buchberger, Jr., Fernando M Silveira, Brad L Mays, Kartik Ramaswamy, Hamid Noorbakhsh
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Publication number: 20200311418Abstract: Systems and methods for extracting a feature in an image are provided. In one example embodiment, a computer-implemented method includes obtaining image data representing a scene, wherein the image data includes a plurality of images of the scene, each image associated with a different polarization angle. The method includes determining attribute information based at least in part on the plurality of images. The method includes determining one or more features in the image data based at least in part on the attribute information.Type: ApplicationFiled: November 6, 2017Publication date: October 1, 2020Inventors: Chetan Mahadeswaraswamy, Jingjin Xie, Christopher James Ducote
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Publication number: 20200275011Abstract: Methods, systems, and apparatus for an infrared and visible imaging system. In some implementations, Image data from a visible-light camera is obtained. A position of a device is determined based at least in part on the image data from the visible-light camera. An infrared camera is positioned so that the device is in a field of view of the infrared camera, with the field of view of the infrared camera being narrower than the field of view of the visible-light camera. Infrared image data from the infrared camera that includes regions representing the device is obtained. Infrared image data from the infrared camera that represents the device is recorded. Position data is also recorded that indicates the location and pose of the infrared camera when the infrared image data is acquired by the infrared camera.Type: ApplicationFiled: February 27, 2019Publication date: August 27, 2020Inventors: Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta, Siyuan Xin, Chetan Mahadeswaraswamy
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Patent number: 10578977Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15).Type: GrantFiled: February 21, 2018Date of Patent: March 3, 2020Assignee: NIKON CORPORATIONInventors: Chetan Mahadeswaraswamy, Johnathan Marquez, Joseph P. Rossi
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Publication number: 20190189474Abstract: Methods and systems for controlling temperatures in plasma processing chamber with a combination of proportional and pulsed fluid control valves. A heat transfer fluid loop is thermally coupled to a chamber component, such as a chuck. The heat transfer fluid loop includes a supply line and a return line to each of hot and cold fluid reservoirs. In an embodiment, an analog valve (e.g., in the supply line) is controlled between any of a closed state, a partially open state, and a fully open state based on a temperature control loop while a digital valve (e.g., in the return line) is controlled to either a closed state and a fully open state.Type: ApplicationFiled: February 22, 2019Publication date: June 20, 2019Inventor: Chetan Mahadeswaraswamy
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Patent number: 10256123Abstract: Methods and systems for controlling temperatures in plasma processing chamber with a combination of proportional and pulsed fluid control valves. A heat transfer fluid loop is thermally coupled to a chamber component, such as a chuck. The heat transfer fluid loop includes a supply line and a return line to each of hot and cold fluid reservoirs. In an embodiment, an analog valve (e.g., in the supply line) is controlled between any of a closed state, a partially open state, and a fully open state based on a temperature control loop while a digital valve (e.g., in the return line) is controlled to either a closed state and a fully open state.Type: GrantFiled: October 15, 2012Date of Patent: April 9, 2019Assignee: Applied Materials, Inc.Inventor: Chetan Mahadeswaraswamy
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Publication number: 20180181008Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15).Type: ApplicationFiled: February 21, 2018Publication date: June 28, 2018Inventors: Chetan Mahadeswaraswamy, Johnathan Marquez, Joseph P. Rossi
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Patent number: 9921495Abstract: A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.Type: GrantFiled: January 17, 2014Date of Patent: March 20, 2018Assignee: NIKON CORPORATIONInventors: Pai-Hsueh Yang, Michael Binnard, J. Kyle Wells, Chetan Mahadeswaraswamy, Tsutomu Ogiwara
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Patent number: 9904178Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15).Type: GrantFiled: April 8, 2016Date of Patent: February 27, 2018Assignee: Nikon CorporationInventors: Chetan Mahadeswaraswamy, Johnathan Marquez, Joseph P. Rossi
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Patent number: 9778579Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).Type: GrantFiled: November 6, 2012Date of Patent: October 3, 2017Assignee: Nikon CorporationInventors: Michel Pharand, Chetan Mahadeswaraswamy, Michael B. Binnard