Patents by Inventor Chi-Fa Ku

Chi-Fa Ku has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170125599
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes an oxide semiconductor protrusion, a source, a drain, an oxide semiconductor layer, a first O-barrier layer, a gate electrode, a second O-barrier layer, and an H-barrier layer. The oxide semiconductor protrusion is disposed on an oxide substrate. The source and the drain are respectively disposed on opposite ends of the oxide semiconductor protrusion. The oxide semiconductor layer is disposed on the oxide substrate and covers the oxide semiconductor protrusion, the source, and the drain. The first O-barrier layer is disposed on the oxide semiconductor layer. The gate electrode is disposed on the first O-barrier layer and across the oxide semiconductor protrusion. The second O-barrier layer is disposed on the gate electrode. The H-barrier layer is disposed on the oxide substrate and covers the second O-barrier layer.
    Type: Application
    Filed: December 4, 2015
    Publication date: May 4, 2017
    Inventors: Hai-Biao Yao, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Zhi-Biao Zhou
  • Publication number: 20170110192
    Abstract: A method for fabricating a semiconductor memory device is disclosed. A semiconductor substrate having a main surface is prepared. At least a first dielectric layer is formed on the main surface of the semiconductor substrate. A first OS FET device and a second OS FET device are formed on the first dielectric layer. At least a second dielectric layer is formed to cover the first dielectric layer, the first OS FET device, and the second OS FET device. A first MIM capacitor and a second MIM capacitor are formed on the second dielectric layer. The first MIM capacitor is electrically coupled to the first OS FET device, thereby constituting a DOSRAM cell. The second MIM capacitor is electrically coupled to the second OS FET device, thereby constituting a NOSRAM cell.
    Type: Application
    Filed: December 19, 2016
    Publication date: April 20, 2017
    Inventors: ZHIBIAO ZHOU, Chen-Bin Lin, Chi-Fa Ku, Shao-Hui Wu
  • Patent number: 9627547
    Abstract: A semiconductor structure includes a substrate and a first element disposed in the substrate and arranged along a first direction. The first element is made of a semiconductor oxide material. The semiconductor structure also includes a dielectric layer disposed on the first element, and a second element, disposed on the dielectric layer and arranged along the first direction. The second element is used as a gate of a transistor structure.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: April 18, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhibiao Zhou, Shao-Hui Wu, Chi-Fa Ku
  • Patent number: 9627549
    Abstract: A semiconductor transistor device includes an oxide semiconductor layer having an active surface, a source electrode, a drain electrode, a gate electrode and a control capacitor. The gate electrode, the source electrode and the drain electrode are directly in contact with the active surface. The gate electrode is disposed between the drain electrode and the source electrode. The gate electrode, the source electrode and the drain electrode are separated from each other. The control capacitor is electrically connected to the gate electrode through a connection.
    Type: Grant
    Filed: October 5, 2015
    Date of Patent: April 18, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Su Xing, Tien-Yu Hsieh
  • Patent number: 9620649
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes an oxide semiconductor protrusion, a source, a drain, an oxide semiconductor layer, a first O-barrier layer, a gate electrode, a second O-barrier layer, and an H-barrier layer. The oxide semiconductor protrusion is disposed on an oxide substrate. The source and the drain are respectively disposed on opposite ends of the oxide semiconductor protrusion. The oxide semiconductor layer is disposed on the oxide substrate and covers the oxide semiconductor protrusion, the source, and the drain. The first O-barrier layer is disposed on the oxide semiconductor layer. The gate electrode is disposed on the first O-barrier layer and across the oxide semiconductor protrusion. The second O-barrier layer is disposed on the gate electrode. The H-barrier layer is disposed on the oxide substrate and covers the second O-barrier layer.
    Type: Grant
    Filed: December 4, 2015
    Date of Patent: April 11, 2017
    Assignee: United Microelectronics Corp.
    Inventors: Hai-Biao Yao, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Zhi-Biao Zhou
  • Publication number: 20170098712
    Abstract: A semiconductor transistor device includes an oxide semiconductor layer having an active surface, a source electrode, a drain electrode, a gate electrode and a control capacitor. The gate electrode, the source electrode and the drain electrode are directly in contact with the active surface. The gate electrode is disposed between the drain electrode and the source electrode. The gate electrode, the source electrode and the drain electrode are separated from each other. The control capacitor is electrically connected to the gate electrode through a connection.
    Type: Application
    Filed: October 5, 2015
    Publication date: April 6, 2017
    Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Su Xing, Tien-Yu Hsieh
  • Publication number: 20170098599
    Abstract: A manufacturing method of an oxide semiconductor device includes the following steps. An interposer substrate is provided. At least one oxide semiconductor transistor is formed on the interposer substrate. At least one trough silicon via (TSV) is formed in the interposer substrate. An interconnection structure on the interposer substrate, and the at least one oxide semiconductor transistor is connected to the interconnection structure.
    Type: Application
    Filed: October 1, 2015
    Publication date: April 6, 2017
    Inventors: ZHIBIAO ZHOU, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin
  • Patent number: 9607123
    Abstract: A semiconductor monitoring device includes a substrate, a die seal ring formed on the substrate, a deep n-typed well formed in the substrate under the die seal ring, and a monitoring device electrically connected to the die seal ring. The monitoring device is formed in a scribe line region defined on the substrate. A width of the deep n-typed well is larger than a width of the die seal ring.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: March 28, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Xing Hua Zhang, Chi-Fa Ku, Hong Liao, Ye Chao Li, Hui Yang
  • Publication number: 20170084614
    Abstract: A memory cell includes a substrate, a deep trench (DT) capacitor formed in the substrate, at least an insulting layer formed on the substrate, and an oxide semiconductor field effect transistor (OS FET) device formed on the insulating layer. And more important, the OS FET device is electrically connected to the DT capacitor.
    Type: Application
    Filed: September 17, 2015
    Publication date: March 23, 2017
    Inventors: Shao-Hui Wu, ZHIBIAO ZHOU, HAI BIAO YAO, Chi-Fa Ku, Chen-Bin Lin
  • Patent number: 9577029
    Abstract: A metal-insulator-metal (MIM) capacitor structure and a method for manufacturing the same. The method includes a step hereinafter. A 5-layered dual-dielectric structure is provided on a substrate. The 5-layered dual-dielectric structure includes a bottom metal layer, a first dielectric layer, an intermediate metal layer, a second dielectric layer and a top metal layer in order. The first dielectric layer and the second dielectric layer have different thicknesses.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: February 21, 2017
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku
  • Patent number: 9564217
    Abstract: A semiconductor memory device includes a semiconductor substrate having a main surface, at least a first dielectric layer on the main surface of the semiconductor substrate, a first OS FET device and a second OS FET device disposed on the first dielectric layer, at least a second dielectric layer covering the first dielectric layer, the first OS FET device, and the second OS FET device, a first MIM capacitor on the second dielectric layer and electrically coupled to the first OS FET device, and a second MIM capacitor on the second dielectric layer and electrically coupled to the second OS FET device.
    Type: Grant
    Filed: October 19, 2015
    Date of Patent: February 7, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhibiao Zhou, Chen-Bin Lin, Chi-Fa Ku, Shao-Hui Wu
  • Publication number: 20170017416
    Abstract: A semiconductor device includes a main processor, a normally-off processor, and at least one oxide semiconductor random access memory (RAM). The normally-off processor includes at least one oxide semiconductor transistor. The main processor is connected to the normally-off processor, and a clock rate of the main processor is higher than a clock rate of the normally-off processor. The oxide semiconductor RAM is connected to the normally-off processor. An operating method of the semiconductor includes backing up data from the main processor to the normally-off process and/or the oxide semiconductor RAM.
    Type: Application
    Filed: August 19, 2015
    Publication date: January 19, 2017
    Inventors: ZHIBIAO ZHOU, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin
  • Patent number: 9530834
    Abstract: A method for fabricating capacitor is disclosed. The method includes the steps of: providing a material layer; forming a patterned first conductive layer on the material layer, forming a first dielectric layer on the patterned first conductive layer; forming a second conductive layer and a cap layer on the first dielectric layer; removing part of the cap layer to form a spacer on the second conductive layer; and using the spacer to remove part of the second conductive layer for forming a trench above the patterned first conductive layer and fin-shaped structures adjacent to the trench.
    Type: Grant
    Filed: December 13, 2015
    Date of Patent: December 27, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhibiao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin
  • Publication number: 20160322502
    Abstract: A semiconductor structure includes a substrate and a first element disposed in the substrate and arranged along a first direction. The first element is made of a semiconductor oxide material. The semiconductor structure also includes a dielectric layer disposed on the first element, and a second element, disposed on the dielectric layer and arranged along the first direction. The second element is used as a gate of a transistor structure.
    Type: Application
    Filed: May 28, 2015
    Publication date: November 3, 2016
    Inventors: ZHIBIAO ZHOU, Shao-Hui Wu, Chi-Fa Ku
  • Patent number: 9455351
    Abstract: An oxide semiconductor field effect transistor (OS FET) device includes a first dielectric layer formed on a substrate, an oxide semiconductor (OS) island formed on the first dielectric layer, a first gate electrode formed on the OS island, a gate dielectric layer formed in between the first gate electrode and the OS island, a patterned hard mask layer formed on a top surface of the first gate electrode, an etch stop layer covering a top surface of the patterned hard mask layer and sidewalls of the first gate electrode, and a source electrode and a drain electrode formed on the OS island. At least one of the source electrode and the drain electrode partially overlaps the etching stop layer on the sidewalls of the first gate electrode.
    Type: Grant
    Filed: September 1, 2015
    Date of Patent: September 27, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhibiao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Chun-Yuan Wu
  • Patent number: 9431441
    Abstract: A back side illumination image sensor pixel structure includes a substrate having a front side and a back side opposite to the front side, a sensing device formed in the substrate to receive an incident light through the back side of the substrate, two oxide-semiconductor field effect transistor (OS FET) devices formed on the front side of the substrate, and a capacitor formed on the front side of the substrate. The two OS FET devices are directly stacked on the sensing device and the capacitor is directly stacked on the OS FET devices. The two OS FET devices overlap the sensing device, and the capacitor overlaps both of the OS FET devices and the sensing device.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: August 30, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhibiao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Chun-Yuan Wu, Chia-Fu Hsu
  • Patent number: 9412734
    Abstract: A structure with an inductor and a MIM capacitor is provided. The structure includes a dielectric layer, an inductor and a MIM capacitor. The inductor and the MIM capacitor are disposed within the dielectric layer. The inductor includes a core and a wire surrounding the core. The MIM capacitor includes a top electrode, a bottom electrode and an insulating layer. The top electrode or the bottom electrode includes a material which forms the core.
    Type: Grant
    Filed: January 5, 2015
    Date of Patent: August 9, 2016
    Assignee: UNITED MICROELECTORINCS CORP.
    Inventors: Zhibiao Zhou, Shao-Hui Wu, Chi-Fa Ku
  • Publication number: 20160211187
    Abstract: A semiconductor monitoring device includes a substrate, a die seal ring formed on the substrate, a deep n-typed well formed in the substrate under the die seal ring, and a monitoring device electrically connected to the die seal ring. The monitoring device is formed in a scribe line region defined on the substrate. A width of the deep n-typed well is larger than a width of the die seal ring.
    Type: Application
    Filed: January 16, 2015
    Publication date: July 21, 2016
    Inventors: Xing Hua Zhang, Chi-Fa Ku, Hong Liao, Ye Chao Li, Hui Yang
  • Publication number: 20160163693
    Abstract: A structure with an inductor and a MIM capacitor is provided. The structure includes a dielectric layer, an inductor and a MIM capacitor. The inductor and the MIM capacitor are disposed within the dielectric layer. The inductor includes a core and a wire surrounding the core. The MIM capacitor includes a top electrode, a bottom electrode and an insulating layer. The top electrode or the bottom electrode includes a material which forms the core.
    Type: Application
    Filed: January 5, 2015
    Publication date: June 9, 2016
    Inventors: ZHIBIAO ZHOU, Shao-Hui Wu, Chi-Fa Ku
  • Patent number: 9349873
    Abstract: Provided is an oxide semiconductor device. A source, a drain, and a first gate are buried in a first dielectric layer, and the first gate is located between the source and the drain. A first barrier layer is located on the first dielectric layer, partially overlaps the source and the drain and overlaps the first gate. The first barrier layer includes a first opening and a second opening respectively corresponds to the source and the drain. An oxide semiconductor layer covers the first barrier layer and fills in the first opening and the second opening. A second barrier layer is located on the oxide semiconductor layer. A second gate is located on the second barrier layer and overlaps with the source, the drain, and the first gate.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: May 24, 2016
    Assignee: United Microelectronics Corp.
    Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Chun-Yuan Wu