Patents by Inventor Chi-Feng Tung

Chi-Feng Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PORTABLE STOCKER AND METHOD OF USING SAME
    Publication number: 20100143082
    Abstract: A system comprising a conveyor. A semiconductor processing tool has a lifter port. The tool is positioned near the conveyor, such that the lifter port is configured to transport a Front Opening Unified Pod (FOUP) between the conveyor and the lifter port. An upstream stocker and a downstream stocker are both co-located with the conveyor and the tool. The upstream and downstream stockers each have a respective storage space for the FOUP and a respective robotic device configured to transport the FOUP between its respective storage space and the conveyor. The upstream stocker is configured to receive the FOUP from an overhead transport (OHT) and deliver the FOUP to the conveyor. The downstream stocker is configured to receive the FOUP from the conveyor and deliver the FOUP to the OHT.
    Type: Application
    Filed: December 8, 2008
    Publication date: June 10, 2010
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Cheng Wang, Feng-Ning Lee, Chi-Feng Tung, Mao-Lin Kao, Li-Jen Ko