Patents by Inventor Chi-Wen Liu

Chi-Wen Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140206166
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure including one or more fins disposed on the substrate. The semiconductor device further includes a dielectric layer disposed on a central portion of the fin structure and traversing each of the one or more fins. The semiconductor device further includes a work function metal disposed on the dielectric layer and traversing each of the one or more fins. The semiconductor device further includes a strained material disposed on the work function metal and interposed between each of the one or more fins. The semiconductor device further includes a signal metal disposed on the work function metal and on the strained material and traversing each of the one or more fins.
    Type: Application
    Filed: April 2, 2014
    Publication date: July 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20140203351
    Abstract: A tunneling field-effect transistor (TFET) device is disclosed. A frustoconical protrusion structure is disposed over a substrate and protruding out of the plane of substrate. A source region is disposed as a top portion of the frustoconical protrusion structure. A sidewall spacer is disposed along sidewall of the source region. A source contact with a critical dimension (CD), which is substantially larger than a width of the source region, is formed on the source region and the sidewall spacer together.
    Type: Application
    Filed: January 18, 2013
    Publication date: July 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Harry-Hak-Lay Chuang, Cheng-Cheng Kuo, Chi-Wen Liu, Ming Zhu
  • Publication number: 20140197458
    Abstract: An integrated circuit structure includes a semiconductor substrate, and isolation regions extending into the semiconductor substrate, wherein the isolation regions have opposite sidewalls facing each other. A fin structure includes a silicon fin higher than top surfaces of the isolation regions, a germanium-containing semiconductor region overlapped by the silicon fin, silicon oxide regions on opposite sides of the germanium-containing semiconductor region, and a germanium-containing semiconductor layer between and in contact with the silicon fin and one of the silicon oxide regions.
    Type: Application
    Filed: September 3, 2013
    Publication date: July 17, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Jiun-Jia Huang, Chao-Hsiung Wang, Chi-Wen Liu
  • Patent number: 8723272
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure disposed over the substrate. The fin structure includes one or more fins. The semiconductor device further includes an insulation material disposed on the substrate. The semiconductor device further includes a gate structure disposed on a portion of the fin structure and on a portion of the insulation material. The gate structure traverses each fin of the fin structure. The semiconductor device further includes a source and drain feature formed from a material having a continuous and uninterrupted surface area. The source and drain feature includes a surface in a plane that is in direct contact with a surface in a parallel plane of the insulation material, each of the one or more fins of the fin structure, and the gate structure.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: May 13, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Patent number: 8723236
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure including one or more fins disposed on the substrate. The semiconductor device further includes a dielectric layer disposed on a central portion of the fin structure and traversing each of the one or more fins. The semiconductor device further includes a work function metal disposed on the dielectric layer and traversing each of the one or more fins. The semiconductor device further includes a strained material disposed on the work function metal and interposed between each of the one or more fins. The semiconductor device further includes a signal metal disposed on the work function metal and on the strained material and traversing each of the one or more fins.
    Type: Grant
    Filed: October 13, 2011
    Date of Patent: May 13, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20140117454
    Abstract: An embodiment fin field effect transistor (FinFET) device includes fins formed from a semiconductor substrate, a non-recessed shallow trench isolation (STI) region disposed between the fins, and a dummy gate disposed on the non-recessed STI region.
    Type: Application
    Filed: October 26, 2012
    Publication date: May 1, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Patent number: 8586436
    Abstract: Provided is a method and device that includes providing for a plurality of differently configured gate structures on a substrate. For example, a first gate structure associated with a transistor of a first type and including a first dielectric layer and a first metal layer; a second gate structure associated with a transistor of a second type and including a second dielectric layer, a second metal layer, a polysilicon layer, the second dielectric layer and the first metal layer; and a dummy gate structure including the first dielectric layer and the first metal layer.
    Type: Grant
    Filed: March 20, 2012
    Date of Patent: November 19, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jin-Aun Ng, Ming Zhu, Chi-Wen Liu
  • Publication number: 20130270647
    Abstract: The present disclosure provides an integrated circuit. The integrated circuit includes a semiconductor substrate; a n-type filed effect transistor (nFET) formed on the semiconductor substrate and having a first gate stack including a high k dielectric layer, a capping layer on the high k dielectric layer, a p work function metal on the capping layer, and a polysilicon layer on the p work function metal; and a p-type filed effect transistor (pFET) formed on the semiconductor substrate and having a second gate stack including the high k dielectric layer, the p work function metal on the high k dielectric layer, and a metal material on the p work function metal.
    Type: Application
    Filed: April 17, 2012
    Publication date: October 17, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming Zhu, Jin-Aun Ng, Chi-Wen Liu
  • Publication number: 20130273705
    Abstract: A multiple-fin device includes a substrate and a plurality of fins formed on the substrate. Source and drain regions are formed in the respective fins. A dielectric layer is formed on the substrate. The dielectric layer has a first thickness adjacent one side of a first fin and having a second thickness, different from the first thickness, adjacent an opposite side of the fin. A continuous gate structure is formed overlying the plurality of fins, the continuous gate structure being adjacent a top surface of each fin and at least one sidewall surface of at least one fin. By adjusting the dielectric layer thickness, channel width of the resulting device can be fine-tuned.
    Type: Application
    Filed: June 10, 2013
    Publication date: October 17, 2013
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20130249010
    Abstract: Provided is a method and device that includes providing for a plurality of differently configured gate structures on a substrate. For example, a first gate structure associated with a transistor of a first type and including a first dielectric layer and a first metal layer; a second gate structure associated with a transistor of a second type and including a second dielectric layer, a second metal layer, a polysilicon layer, the second dielectric layer and the first metal layer; and a dummy gate structure including the first dielectric layer and the first metal layer.
    Type: Application
    Filed: March 20, 2012
    Publication date: September 26, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
    Inventors: Jin-Aun Ng, Ming Zhu, Chi-Wen Liu
  • Publication number: 20130113073
    Abstract: An integrated circuit can include a MOM capacitor formed simultaneously with other devices, such as finFETs. A dielectric layer formed on a substrate has a first semiconductor fin therein and a second semiconductor fin therein. Respective top portions of the fins are removed to form respective recesses in the dielectric layer. First and second electrodes are formed in the recesses. The first and second electrodes and the interjacent dielectric layer form a MOM capacitor.
    Type: Application
    Filed: November 4, 2011
    Publication date: May 9, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20130113072
    Abstract: A 3D capacitor and method for fabricating a 3D capacitor is disclosed. An exemplary 3D capacitor includes a substrate including a fin structure, the fin structure including a plurality of fins. The 3D capacitor further includes an insulation material disposed on the substrate and between each of the plurality of fins. The 3D capacitor further includes a dielectric layer disposed on each of the plurality of fins. The 3D capacitor further includes a first electrode disposed on a first portion of the fin structure. The first electrode being in direct contact with a surface of the fin structure. The 3D capacitor further includes a second electrode disposed on a second portion of the fin structure. The second electrode being disposed directly on the dielectric layer and the first and second portions of the fin structure being different.
    Type: Application
    Filed: November 4, 2011
    Publication date: May 9, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20130093026
    Abstract: A semiconductor apparatus includes fin field-effect transistor (FinFETs) having shaped fins and regular fins. Shaped fins have top portions that may be smaller, larger, thinner, or shorter than top portions of regular fins. The bottom portions of shaped fins and regular fins are the same. FinFETs may have only one or more shaped fins, one or more regular fins, or a mixture of shaped fins and regular fins. A semiconductor manufacturing process to shape one fin includes forming a photolithographic opening of one fin, optionally doping a portion of the fin, and etching a portion of the fin.
    Type: Application
    Filed: October 14, 2011
    Publication date: April 18, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Clement Hsingjen WANN, Ling-Yen YEH, Chi-Yuan SHIH, Yi-Tang LIN, Chih-Sheng CHANG, Chi-Wen LIU
  • Publication number: 20130092984
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure including one or more fins disposed on the substrate. The semiconductor device further includes a dielectric layer disposed on a central portion of the fin structure and traversing each of the one or more fins. The semiconductor device further includes a work function metal disposed on the dielectric layer and traversing each of the one or more fins. The semiconductor device further includes a strained material disposed on the work function metal and interposed between each of the one or more fins. The semiconductor device further includes a signal metal disposed on the work function metal and on the strained material and traversing each of the one or more fins.
    Type: Application
    Filed: October 13, 2011
    Publication date: April 18, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20130082304
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure disposed over the substrate. The fin structure includes one or more fins. The semiconductor device further includes an insulation material disposed on the substrate. The semiconductor device further includes a gate structure disposed on a portion of the fin structure and on a portion of the insulation material. The gate structure traverses each fin of the fin structure. The semiconductor device further includes a source and drain feature formed from a material having a continuous and uninterrupted surface area. The source and drain feature includes a surface in a plane that is in direct contact with a surface in a parallel plane of the insulation material, each of the one or more fins of the fin structure, and the gate structure.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 4, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Publication number: 20130075831
    Abstract: A metal gate stack having a TiAlN blocking/wetting layer, and methods of manufacturing the same, are disclosed. In an example, an integrated circuit device includes a semiconductor substrate and a gate stack disposed over the semiconductor substrate. The gate stack includes a gate dielectric layer disposed over the semiconductor substrate; a work function layer disposed over the gate dielectric layer; a multi-function wetting/blocking layer disposed over the work function layer, wherein the multi-function wetting/blocking layer is a titanium aluminum nitride layer; and a conductive layer disposed over the multi-function wetting/blocking layer.
    Type: Application
    Filed: September 24, 2011
    Publication date: March 28, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shiu-Ko JangJian, Szu-An Wu, Ying-Lang Wang, Chi-Wen Liu
  • Publication number: 20130056826
    Abstract: A multiple-fin device includes a substrate and a plurality of fins formed on the substrate. Source and drain regions are formed in the respective fins. A dielectric layer is formed on the substrate. The dielectric layer has a first thickness adjacent one side of a first fin and having a second thickness, different from the first thickness, adjacent an opposite side of the fin. A continuous gate structure is formed overlying the plurality of fins, the continuous gate structure being adjacent a top surface of each fin and at least one sidewall surface of at least one fin. By adjusting the dielectric layer thickness, channel width of the resulting device can be fine-tuned.
    Type: Application
    Filed: September 1, 2011
    Publication date: March 7, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Wen Liu, Chao-Hsiung Wang
  • Patent number: 8383938
    Abstract: A sliding cover faceplate and an electronic device using the same are provided. The sliding cover faceplate includes a sliding cover, a cover plate, and a sliding structure. The cover plate is provided on the electronic device, and the sliding cover is disposed on one side of the cover plate. The sliding structure includes a guiding portion and an elastic positioning portion. The guiding portion is disposed on the cover plate and is connected to the sliding cover to guide the sliding cover to slide between a first location and a second location on the cover plate. The elastic positioning portion connects the cover plate with the sliding cover to provide an elastic force to the sliding cover, such that when the sliding cover slides close to the first location or the second location, the sliding cover is automatically positioned on the first location or the second location.
    Type: Grant
    Filed: August 9, 2010
    Date of Patent: February 26, 2013
    Assignee: ASUSTek Computer Inc.
    Inventors: Chin-Lai Lin, Chih-Ming Fan, Chi-Wen Liu
  • Publication number: 20130034966
    Abstract: A method of semiconductor fabrication including providing a semiconductor wafer and dispensing a first chemical spray onto the wafer using a first nozzle and dispensing a second chemical spray using a second nozzle onto the wafer. These dispensing may be performed simultaneously. The method may further include moving the first and second nozzle. The first and second nozzle may provide the first and second chemical spray having at least one different property. For example, different chemical compositions, concentrations, temperatures, angles of dispensing, or flow rate. A chemical dispersion apparatus providing two nozzles which are operable to be separately controlled is also provided.
    Type: Application
    Filed: August 4, 2011
    Publication date: February 7, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
    Inventors: Ming-Hsi Yeh, Kuo-Sheng Chuang, Ying-Hsueh Chang Chien, Chi-Ming Yang, Chi-Wen Liu, Chin-Hsiang Lin
  • Patent number: D639139
    Type: Grant
    Filed: April 21, 2008
    Date of Patent: June 7, 2011
    Assignee: The Eastern Company
    Inventors: Michael O. Misner, Chi-Wen Liu