Patents by Inventor Chia-Hui Lin
Chia-Hui Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11195717Abstract: A four-layer photoresist and method of forming the same are disclosed. In an embodiment, a method includes forming a semiconductor fin; depositing a target layer on the semiconductor fin; depositing a BARC layer on the target layer; depositing a first mask layer over the BARC layer, the first mask layer being deposited using a plasma process with an RF power of less than 50 W; depositing a second mask layer over the first mask layer using a plasma process with an RF power of less than 500 W; depositing a photoresist layer over the second mask layer; patterning the photoresist layer, the second mask layer, the first mask layer, and the BARC layer to form a first mask; and selectively removing the target layer from a first portion of the semiconductor fin using the first mask, the target layer remaining on a second portion of the semiconductor fin.Type: GrantFiled: August 3, 2020Date of Patent: December 7, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Dong-Sheng Li, Chia-Hui Lin, Kai Hung Cheng, Yao-Hsu Sun, Wen-Cheng Wu, Bo-Cyuan Lu, Sung-En Lin, Tai-Chun Huang
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Patent number: 11152262Abstract: A method includes etching a gate structure to form a trench extending into the gate structure, wherein sidewalls of the trench comprise a metal oxide material, applying a sidewall treatment process to the sidewalls of the trench, wherein the metal oxide material has been removed as a result of applying the sidewall treatment process and filling the trench with a first dielectric material to form a dielectric region, wherein the dielectric region is in contact with the sidewall of the gate structure.Type: GrantFiled: November 12, 2019Date of Patent: October 19, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Yi Lee, Ting-Gang Chen, Chieh-Ping Wang, Hong-Hsien Ke, Chia-Hui Lin, Tai-Chun Huang
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Patent number: 11131743Abstract: Disclosed embodiments facilitate wireless channel calibration, including ranging and direction finding, between wirelessly networked devices. In some embodiments. a method on a first station (STA) may comprise: transmitting a first NDPA frame to one or more second stations (STAs), the first NDPA frame comprising a first bit indicating that one or more subsequent frames comprise ranging or angular information; and transmitting, after a Short Interval Frame Space (SIFS) time interval, a second frame. The second frame may be one of: a Null Data Packet az (NDP_az) frame with information about a time of transmission of the NDP_az frame, or a Null Data Packet (NDP) frame, or a Beam Refinement Protocol (BRP) frame. The first NDPA frame may be unicast, multicast, or broadcast.Type: GrantFiled: June 23, 2016Date of Patent: September 28, 2021Assignee: QUALCOMM IncorporatedInventors: Carlos Horacio Aldana, Jeff Smith, Xiaoxin Zhang, Chia-Hui Lin, Yen-Feng Lee, Ravi Gidvani, Alecsander Eitan, Rahul Malik
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Patent number: 11049945Abstract: Semiconductor device structures and methods for forming the same are provided. A semiconductor device structure includes a gate structure over a semiconductor substrate. The gate structure includes a gate electrode layer and a gate dielectric layer covering a bottom surface and sidewalls of the gate electrode layer. The semiconductor device structure also includes spacer elements in contact with sidewalls of the gate structure and protruding from a top surface of the gate electrode layer. The semiconductor device structure also includes a first protection layer over the gate electrode layer and between the spacer elements. The semiconductor device structure also includes a dielectric layer over the first protection layer and between the spacer elements. A portion of the dielectric layer is between sidewalls of the spacer elements and sidewalls of the first protection layer.Type: GrantFiled: April 29, 2019Date of Patent: June 29, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Wen Huang, Yun-Wen Chu, Hong-Hsien Ke, Chia-Hui Lin, Shin-Yeu Tsai, Shih-Chieh Chang
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Publication number: 20210150947Abstract: An electronic device is disclosed and includes a base substrate, a first circuit layer and a plurality of light-emitting elements. The base substrate has a first surface and a second surface opposite to each other. The first circuit layer includes a first portion and a second portion. The first portion is disposed on the first surface of the base substrate, and the second portion is disposed on the second surface of the base substrate. The light-emitting elements are disposed on the first portion of the first circuit layer. At least one of the second surface of the base substrate and the first portion of the first circuit layer includes at least one microstructure.Type: ApplicationFiled: January 28, 2021Publication date: May 20, 2021Inventors: Chin-Lung Ting, Chung-Kuang Wei, Li-Wei Mao, Chi-Liang Chang, Chia-Hui Lin
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Patent number: 10957226Abstract: An electronic device and a tiling electronic apparatus are disclosed and include a base substrate, a first circuit layer and a plurality of light-emitting elements. The base substrate has a first surface and a second surface opposite to each other. The first circuit layer includes a first portion and a second portion. The first portion is disposed on the first surface of the base substrate, and the second portion is disposed on the second surface of the base substrate. The light-emitting elements are disposed on the first portion of the first circuit layer. At least one of the second surface of the base substrate and the first portion of the first circuit layer includes at least one microstructure.Type: GrantFiled: March 24, 2019Date of Patent: March 23, 2021Assignee: InnoLux CorporationInventors: Chin-Lung Ting, Chung-Kuang Wei, Li-Wei Mao, Chi-Liang Chang, Chia-Hui Lin
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Publication number: 20200411386Abstract: Methods of cutting fins, and structures formed thereby, are described. In an embodiment, a structure includes a first fin on a substrate, a second fin on the substrate, and a fin cut-fill structure disposed between the first fin and the second fin. The first fin and the second fin are longitudinally aligned. The fin cut-fill structure includes an insulating liner and a fill material on the insulating liner. The insulating liner abuts a first sidewall of the first fin and a second sidewall of the second fin. The insulating liner includes a material with a band gap greater than 5 eV.Type: ApplicationFiled: September 14, 2020Publication date: December 31, 2020Inventors: Shih-Wen Huang, Jaming Chang, Kai Hung Cheng, Chia-Hui Lin, Jei Ming Chen
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Publication number: 20200373154Abstract: A four-layer photoresist and method of forming the same are disclosed. In an embodiment, a method includes forming a semiconductor fin; depositing a target layer on the semiconductor fin; depositing a BARC layer on the target layer; depositing a first mask layer over the BARC layer, the first mask layer being deposited using a plasma process with an RF power of less than 50 W; depositing a second mask layer over the first mask layer using a plasma process with an RF power of less than 500 W; depositing a photoresist layer over the second mask layer; patterning the photoresist layer, the second mask layer, the first mask layer, and the BARC layer to form a first mask; and selectively removing the target layer from a first portion of the semiconductor fin using the first mask, the target layer remaining on a second portion of the semiconductor fin.Type: ApplicationFiled: August 3, 2020Publication date: November 26, 2020Inventors: Dong-Sheng Li, Chia-Hui Lin, Kai Hung Cheng, Yao-Hsu Sun, Wen-Cheng Wu, Bo-Cyuan Lu, Sung-En Lin, Tai-Chun Huang
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Patent number: 10795857Abstract: A method includes the steps of: monitoring status information of a blockchain system; determining whether the status information meets a blockchain branch condition; when the status information matches the blockchain branch condition, writing a branch instruction to a selected block of the blockchain, wherein the branch instruction is configured to enable the blockchain to form a plurality of branches, and divide a plurality of blockchain devices in the blockchain system into a plurality of groups to verify the branches in parallel; and obtaining a maximum transmission delay time in the group, and deciding a new one to generate blocks of the first branch according to the maximum transmission delay time.Type: GrantFiled: September 19, 2018Date of Patent: October 6, 2020Assignee: Industrial Technology Research InstituteInventor: Chia-Hui Lin
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Patent number: 10777466Abstract: Methods of cutting fins, and structures formed thereby, are described. In an embodiment, a structure includes a first fin on a substrate, a second fin on the substrate, and a fin cut-fill structure disposed between the first fin and the second fin. The first fin and the second fin are longitudinally aligned. The fin cut-fill structure includes an insulating liner and a fill material on the insulating liner. The insulating liner abuts a first sidewall of the first fin and a second sidewall of the second fin. The insulating liner includes a material with a band gap greater than 5 eV.Type: GrantFiled: March 15, 2018Date of Patent: September 15, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Wen Huang, Chia-Hui Lin, Jaming Chang, Jei Ming Chen, Kai Hung Cheng
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Publication number: 20200287109Abstract: An electronic device includes a substrate, a light-emitting element, and a spacing structure. The light-emitting element is disposed on the substrate. The spacing structure is disposed adjacent to the light-emitting element, and the spacing structure includes a first wall, a second wall, and a boundary portion. The first wall includes a first protrusion portion and extends in a first direction. The second wall includes a second protrusion portion and extends in a second direction, and the first direction is different from the second direction. The boundary portion is connected to the first protrusion portion and the second protrusion portion, and the height of the boundary portion is lower than the height of the first protrusion portion.Type: ApplicationFiled: February 18, 2020Publication date: September 10, 2020Inventors: Chi-Liang CHANG, Fang-Ho LIN, Ya-Fen CHENG, Chia-Hui LIN, I-Chang LIANG, Hsin-Cheng HUNG
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Patent number: 10752834Abstract: Disclosed herein are composite fluorescent gold nanoclusters with high quantum yield, as well as methods for manufacturing the same. According to some embodiments, the composite fluorescent gold nanocluster includes a gold nanocluster and a capping layer that encapsulates at least a portion of the outer surface of the gold nanocluster. The capping layer includes a matrix made of a benzene-based compound, and multiple phosphine-based compounds distributed across the matrix.Type: GrantFiled: May 17, 2018Date of Patent: August 25, 2020Assignee: CHUNG YUAN CHRISTIAN UNIVERSITYInventors: Cheng-An Lin, Cheng-Yi Huang, Chia-Hui Lin, Tzu-Yin Hou
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Patent number: 10734227Abstract: A four-layer photoresist and method of forming the same are disclosed. In an embodiment, a method includes forming a semiconductor fin; depositing a target layer on the semiconductor fin; depositing a BARC layer on the target layer; depositing a first mask layer over the BARC layer, the first mask layer being deposited using a plasma process with an RF power of less than 50 W; depositing a second mask layer over the first mask layer using a plasma process with an RF power of less than 500 W; depositing a photoresist layer over the second mask layer; patterning the photoresist layer, the second mask layer, the first mask layer, and the BARC layer to form a first mask; and selectively removing the target layer from a first portion of the semiconductor fin using the first mask, the target layer remaining on a second portion of the semiconductor fin.Type: GrantFiled: June 3, 2019Date of Patent: August 4, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Dong-Sheng Li, Chia-Hui Lin, Kai Hung Cheng, Yao-Hsu Sun, Wen-Cheng Wu, Bo-Cyuan Lu, Sung-En Lin, Tai-Chun Huang
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Publication number: 20200235214Abstract: A method for forming a semiconductor structure is provided. The method includes forming a gate structure over a fin structure, forming a source/drain structure in the fin structure and adjacent to the gate structure, forming a dielectric layer over the gate structure and the source/drain structure, and forming an opening in the dielectric layer to expose the source/drain structure. The method further includes depositing a barrier layer lining a sidewall surface of the opening and a top surface of the source/drain structure. The method further includes etching a portion of the barrier layer to expose the source/drain structure. The method further includes depositing a glue layer covering the sidewall surface of the opening and the source/drain structure in the opening. The method further includes forming a contact structure filling the opening in the dielectric layer. The contact structure is surrounded by the glue layer.Type: ApplicationFiled: April 2, 2020Publication date: July 23, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Wen HUANG, Chung-Ting KO, Hong-Hsien KE, Chia-Hui LIN, Tai-Chun HUANG
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Patent number: 10720430Abstract: A method includes etching a semiconductor substrate to form trenches, with a portion of the semiconductor substrate between the trenches being a semiconductor strip, and depositing a dielectric dose film on sidewalls of the semiconductor strip. The dielectric dose film is doped with a dopant of n-type or p-type. The remaining portions of the trenches are filled with a dielectric material. A planarization is performed on the dielectric material. Remaining portions of the dielectric dose film and the dielectric material form Shallow Trench Isolation (STI) regions. A thermal treatment is performed to diffuse the dopant in the dielectric dose film into the semiconductor strip.Type: GrantFiled: December 26, 2019Date of Patent: July 21, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Wen Huang, Chia-Hui Lin, Shin-Yeu Tsai, Kai Hung Cheng
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Publication number: 20200176259Abstract: A method includes etching a gate structure to form a trench extending into the gate structure, wherein sidewalls of the trench comprise a metal oxide material, applying a sidewall treatment process to the sidewalls of the trench, wherein the metal oxide material has been removed as a result of applying the sidewall treatment process and filling the trench with a first dielectric material to form a dielectric region, wherein the dielectric region is in contact with the sidewall of the gate structure.Type: ApplicationFiled: November 12, 2019Publication date: June 4, 2020Inventors: Chun-Yi Lee, Ting-Gang Chen, Chieh-Ping Wang, Hong-Hsien Ke, Chia-Hui Lin, Tai-Chun Huang
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Publication number: 20200144258Abstract: A method includes etching a semiconductor substrate to form trenches, with a portion of the semiconductor substrate between the trenches being a semiconductor strip, and depositing a dielectric dose film on sidewalls of the semiconductor strip. The dielectric dose film is doped with a dopant of n-type or p-type. The remaining portions of the trenches are filled with a dielectric material. A planarization is performed on the dielectric material. Remaining portions of the dielectric dose film and the dielectric material form Shallow Trench Isolation (STI) regions. A thermal treatment is performed to diffuse the dopant in the dielectric dose film into the semiconductor strip.Type: ApplicationFiled: December 26, 2019Publication date: May 7, 2020Inventors: Shih-Wen Huang, Chia-Hui Lin, Shin-Yeu Tsai, Kai Hung Cheng
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Patent number: 10629693Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure, a gate spacer, a source/drain structure, a contact structure, a glue layer and a barrier layer. The gate structure is positioned over a fin structure. The gate spacer is positioned over the fin structure and on a sidewall surface of the gate structure. The source/drain structure is positioned in the fin structure and adjacent to the gate spacer. The contact structure is positioned over the source/drain structure. The glue layer covers a bottom surface and a sidewall surface of the contact structure. The barrier layer encircles the sidewall surface of the contact structure. A bottom surface of the glue layer is exposed to the barrier layer.Type: GrantFiled: May 30, 2018Date of Patent: April 21, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Wen Huang, Chung-Ting Ko, Hong-Hsien Ke, Chia-Hui Lin, Tai-Chun Huang
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Patent number: 10590303Abstract: Disclosed herein are improved thermoplastic polyurethane compositions, articles, and related methods. These compositions include aliphatic thermoplastic polyurethanes having a hard segment content ranging from 57 percent to 80 percent by weight. The hard coat compositions have a Shore D hardness of at least 70 and can display an Elongation at Break test result at 25 degrees Celsius of at least 150 percent. These materials, when hardened, can serve decorative and/or protective functions while displaying both a high degree of elongation at moderate temperatures and high hardness.Type: GrantFiled: July 24, 2015Date of Patent: March 17, 2020Assignee: 3M Innovative Properties CompanyInventors: Charlie C. Ho, Robert D. Hamann, Jeremy P. Gundale, Vijay Rajamani, Ken Egashira, Chia Hui Lin, Hsi Shou Kuo
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Publication number: 20200075320Abstract: A four-layer photoresist and method of forming the same are disclosed. In an embodiment, a method includes forming a semiconductor fin; depositing a target layer on the semiconductor fin; depositing a BARC layer on the target layer; depositing a first mask layer over the BARC layer, the first mask layer being deposited using a plasma process with an RF power of less than 50 W; depositing a second mask layer over the first mask layer using a plasma process with an RF power of less than 500 W; depositing a photoresist layer over the second mask layer; patterning the photoresist layer, the second mask layer, the first mask layer, and the BARC layer to form a first mask; and selectively removing the target layer from a first portion of the semiconductor fin using the first mask, the target layer remaining on a second portion of the semiconductor fin.Type: ApplicationFiled: June 3, 2019Publication date: March 5, 2020Inventors: Dong-Sheng Li, Chia-Hui Lin, Kai Hung Cheng, Yao-Hsu Sun, Wen-Cheng Wu, Bo-Cyuan Lu, Sung-En Lin, Tai-Chun Huang